JP2000091745A - Method for manufacturing rigid reflex multilayer printed-wiring board - Google Patents

Method for manufacturing rigid reflex multilayer printed-wiring board

Info

Publication number
JP2000091745A
JP2000091745A JP26276098A JP26276098A JP2000091745A JP 2000091745 A JP2000091745 A JP 2000091745A JP 26276098 A JP26276098 A JP 26276098A JP 26276098 A JP26276098 A JP 26276098A JP 2000091745 A JP2000091745 A JP 2000091745A
Authority
JP
Japan
Prior art keywords
rigid
coverlay film
hole
substrate
laminated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP26276098A
Other languages
Japanese (ja)
Inventor
Mikiya Kojima
幹矢 小島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon CMK Corp
CMK Corp
Original Assignee
Nippon CMK Corp
CMK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon CMK Corp, CMK Corp filed Critical Nippon CMK Corp
Priority to JP26276098A priority Critical patent/JP2000091745A/en
Publication of JP2000091745A publication Critical patent/JP2000091745A/en
Pending legal-status Critical Current

Links

Landscapes

  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Structure Of Printed Boards (AREA)

Abstract

PROBLEM TO BE SOLVED: To form a plated through hole with improved connection reliability by eliminating a part corresponding to the through hole of a coverlay film before laminating a rigid substrate. SOLUTION: First, a circuit 2 is formed on both surfaces of a flexible substrate 1. Then, a coverlay film 3 including an adhesive layer 3a is laminated to both surfaces of the flexible substrate 1 with the circuit 2 on both the surfaces. Then, for example, a laser beam 4 is applied to a part corresponding to the through hole of the coverlay film 3 and an elimination part 5 is provided. After that, a rigid substrate 6 where a circuit is formed on one surface in advance is laminated on both the surfaces of the flexible substrate 1 where the coverlay film 3 is laminated via a prepreg 7. Then, a through hole 8 is punched at a specific site. After that, a smear on the inner wall surface of the through hole 8 is subjected to desmearing treatment and then the entire surface of the lamination substrate is subjected to the treatment of copper plating 9. After that, an outer-layer circuit 10 is formed on both the surfaces of the lamination substrate, thus obtaining a rigid flex multilayer printed-wiring board.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、リジット・フレッ
クス多層プリント配線板の製造方法に関する。
The present invention relates to a method for manufacturing a rigid-flex multilayer printed wiring board.

【0002】[0002]

【従来の技術】近年電子機器は、小型軽量化され高速化
され、これを構成するプリント配線板用の多層プリント
配線板においてもより薄く軽くすることが望まれてい
る。プリント配線板の多層化が進み、さらにプリント配
線板間の接続に用いるコネクターおよびケーブルを省略
するため、複数のリジット多層プリント配線板のそれぞ
れの一部の層を一つのフレキシブルプリント配線板で共
有させて一体化させる、所謂リジット・フレックス多層
プリント配線板が注目されている。
2. Description of the Related Art In recent years, electronic devices have been reduced in size and weight and have been operated at higher speeds, and it has been desired that thinner and lighter multilayer printed wiring boards for printed wiring boards constituting the electronic devices be used. In order to reduce the number of connectors and cables used for connection between printed wiring boards as multilayered printed wiring boards progress, some layers of each of multiple rigid multilayer printed wiring boards are shared by one flexible printed wiring board. A so-called rigid-flex multilayer printed wiring board has been attracting attention.

【0003】従来、斯かるリジット・フレックス多層プ
リント配線板の製造方法としては、例えばフレキシブル
基板の導体回路上に、接着層を含むカバーレイフィルム
を介在せしめてリジット基板を積層した後、貫通穴を施
し、銅メッキの前処理として、貫通穴のスミアを化学的
あるいはプラズマ(物理的)処理にて除去する方法が知
られている。
Conventionally, as a method for manufacturing such a rigid-flex multilayer printed wiring board, for example, a rigid board is laminated on a conductor circuit of a flexible board by interposing a coverlay film including an adhesive layer, and then a through hole is formed. As a pretreatment for copper plating, a method of removing smear in a through hole by a chemical or plasma (physical) treatment is known.

【0004】然しながら、斯かる従来法において、化学
的にデスミア処理する場合には、一般に過マンガン酸ナ
トリウム溶液等に浸漬することによって行なわれていた
ため、カバーレイフィルムの接着層が膨潤し易いという
問題があった。しかも、デスミアの条件出しとして、リ
ジット・フレックスは、通常のリジット基板におけるデ
スミア処理と異なり、液濃度、温度、浸漬時間等の管理
幅が狭いという問題があった。
[0004] However, in such a conventional method, when a chemical desmearing treatment is generally performed by immersion in a sodium permanganate solution or the like, there is a problem that the adhesive layer of the cover lay film easily swells. was there. In addition, as a condition for desmearing, the rigid flex has a problem that, unlike ordinary desmearing treatment on a rigid substrate, the control range of the liquid concentration, temperature, immersion time, and the like is narrow.

【0005】また、プラズマ処理の場合には、カバーレ
イフィルムの接着層がアタックされてエッチバックして
しまう問題や、フロンガスを使用するため基板の表面が
フッ素コートされたような状態(撥水)になり、スルー
ホールに銅メッキが付き難いという問題があった。
[0005] In the case of plasma treatment, the adhesive layer of the coverlay film is attacked and etched back, or the surface of the substrate is coated with fluorine due to the use of Freon gas (water repellency). And there is a problem that it is difficult to attach copper plating to the through holes.

【0006】[0006]

【発明が解決しようとする課題】本発明は上記の如き従
来の問題に鑑みてなされたものであり、カバーレイフィ
ルムの接着層による悪影響を排除し、貫通穴の内壁のス
ミアを通常のリジット基板と同様に処理しても、接続信
頼性の高いメッキスルーホールを形成することができる
リジット・フレックス多層プリント配線板の製造方法を
提供することを目的とする。
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned conventional problems, and eliminates the adverse effect of the adhesive layer of the coverlay film, and reduces the smear on the inner wall of the through-hole by a conventional rigid substrate. An object of the present invention is to provide a method of manufacturing a rigid-flex multilayer printed wiring board that can form a plated through hole with high connection reliability even if the same processing is performed.

【0007】[0007]

【課題を解決するための手段】本発明は、リジット部と
フレキシブル部を有するリジット・フレックス多層プリ
ント配線板の製造方法において、フレキシブル基板の導
体回路上に、接着層を含むカバーレイフィルムを介在せ
しめてリジット基板を積層するに際し、該リジット基板
の積層前に、カバーレイフィルムの貫通穴該当部分を予
め除去することにより、上記目的を達成したものであ
る。
SUMMARY OF THE INVENTION The present invention relates to a method for manufacturing a rigid-flex multilayer printed wiring board having a rigid portion and a flexible portion, wherein a coverlay film including an adhesive layer is interposed on a conductor circuit of a flexible substrate. The above object has been achieved by removing a portion corresponding to a through hole of a coverlay film before laminating the rigid substrate when laminating the rigid substrate.

【0008】斯かる構成によれば、カバーレイフィルム
に貫通穴に相当する穴が予め形設された状態で、リジッ
ト基板が積層されるので、貫通穴形設後、該貫通穴の内
壁面のスミアの除去を、通常のリジット基板におけるデ
スミア処理と同様に行なっても、カバーレイフィルムの
接着層の膨潤による剥離や、プラズマ処理によりカバー
レイフィルムの接着層がアタックされてエッチバックし
てしまうこともないので、信頼性の高いメッキスルーホ
ールを形成することができる。
According to such a configuration, the rigid substrate is laminated in a state in which holes corresponding to the through holes are formed in the cover lay film in advance, so that after forming the through holes, the inner wall surface of the through holes is formed. Even if the smear is removed in the same manner as the desmear treatment on a normal rigid substrate, the adhesive layer of the coverlay film is peeled off by swelling, or the adhesive layer of the coverlay film is attacked by the plasma treatment and etched back. Therefore, a highly reliable plated through hole can be formed.

【0009】この発明において、上記カバーレイフィル
ムの貫通穴該当部分の除去は、当該カバーレイフィルム
をフレキシブル基板の導体回路上に積層した後に行なっ
ても、また当該積層の前に行なっても良い。
In the present invention, the portion corresponding to the through hole of the cover lay film may be removed after the cover lay film is laminated on the conductor circuit of the flexible substrate or before the lamination.

【0010】尚、ここにカバーレイフィルムの貫通穴該
当部分の除去手段としては、その如何を問わないが、例
えばレーザー、ドリル、金型等が挙げられる。
The means for removing the portion corresponding to the through-hole of the cover lay film is not particularly limited, and examples thereof include a laser, a drill, and a mold.

【0011】また、本発明は、リジット部とフレキシブ
ル部を有するリジット・フレックス多層プリント配線板
の製造方法において、フレキシブル基板の導体回路上に
リジット基板を積層するに際し、該リジット基板を積層
するフレキシブル基板の導体回路部分には接着層を含む
カバーレイフィルムを介在せしめることなくリジット基
板を積層し、リジット基板を積層しないフレキシブル基
板の導体回路部分にのみ当該カバーレイフィルムを積層
することにより、上記目的を達成したものである。
The present invention also relates to a method for manufacturing a rigid-flex multilayer printed wiring board having a rigid portion and a flexible portion, wherein the rigid substrate is laminated on a conductor circuit of the flexible substrate. The above-mentioned object is achieved by laminating a rigid substrate without interposing a coverlay film including an adhesive layer on the conductor circuit portion of the flexible circuit board and laminating the coverlay film only on the conductor circuit portion of the flexible substrate without laminating the rigid substrate. It has been achieved.

【0012】斯かる構成によれば、リジット基板積層後
貫通穴を形設する部分に、接着層を含むカバーレイフィ
ルムが存在しないため、貫通穴形設後、該貫通穴の内壁
面のスミアの除去を、通常のリジット基板におけるデス
ミア処理と同様に行なっても、カバーレイフィルムの接
着層による悪影響は何ら受けることがないので、信頼性
の高いメッキスルーホールを形成することができる。
According to such a configuration, since the coverlay film including the adhesive layer does not exist in the portion where the through hole is formed after the rigid substrate is laminated, after the through hole is formed, the smear on the inner wall surface of the through hole is reduced. Even if the removal is performed in the same manner as the desmear treatment on the ordinary rigid substrate, there is no adverse effect from the adhesive layer of the coverlay film, so that a highly reliable plated through hole can be formed.

【0013】因に、上記における貫通穴の内壁面のデス
ミア処理方法としては、例えば濃硫酸又は/及びクロム
酸、あるいは過マンガン酸ナトリウムやカリウム溶液に
浸漬して、エポキシスミアを膨潤溶解除去する化学的処
理法;軽度のエポキシスミアを砥粒の激突破壊力で除去
する液体ホーニング法;O2とCF4の混合ガスを真空チ
ャンバーに流し込みながら高周波をかけ、高励起状態に
あるフリーラジカルによってエポキシスミアを除去する
プラズマ法等が挙げられる。
As a method of desmearing the inner wall surface of the through-hole, the chemical method of swelling, dissolving and removing epoxy smear by, for example, immersing in concentrated sulfuric acid and / or chromic acid or a sodium or potassium permanganate solution. Liquid honing method for removing mild epoxy smear by the impact breaking force of abrasive grains; applying high frequency while flowing a mixed gas of O 2 and CF 4 into a vacuum chamber, and causing epoxy smear by free radicals in a highly excited state And a plasma method for removing carbon.

【0014】[0014]

【発明の実施の形態】以下本発明の実施の形態を図面と
共に説明する。
Embodiments of the present invention will be described below with reference to the drawings.

【0015】図1は本発明の第1の実施の形態を示す概
略断面製造工程説明図で、以下該図に基いて説明すれ
ば、まず、(A)に示すように、フレキシブル基板1の
両面に、例えば写真法等により回路2を形成する。次い
で、(B)に示すように、両面に回路2が施されたフレ
キシブル基板1の表裏両面に、それぞれ接着層3aを含
むカバーレイフィルム3を積層する。次いで、(C)に
示すように、カバーレイフィルム3の貫通穴該当部分
に、例えばレーザー光4を照射し、除去部5を設ける。
次いで、(D)に示すように、予め片面に写真法等によ
り回路形成を施したリジット基板6を、前記カバーレイ
フィルム3を積層したフレキシブル基板1の表裏両面
に、それぞれプリプレグ7を介して積層する。次いで、
(E)に示すように、所定部位に貫通穴8を、例えばド
リル加工等により形設する。次いで、(F)に示すよう
に、貫通穴8の内壁面のスミアを例えば化学的処理法に
よりデスミア処理後、積層基板全面に銅メッキ9処理を
施す。次いで、例えば写真法等により、積層基板の表裏
に外層回路10を形成することにより、(G)に示す如
きリジット・フレックス多層プリント配線板が得られ
る。
FIG. 1 is a schematic cross-sectional manufacturing process explanatory view showing a first embodiment of the present invention. Referring to FIG. 1A, first, as shown in FIG. Then, the circuit 2 is formed by, for example, a photographic method. Next, as shown in (B), coverlay films 3 each including an adhesive layer 3a are laminated on both the front and back surfaces of the flexible substrate 1 on which the circuit 2 is provided on both surfaces. Next, as shown in (C), a portion corresponding to the through hole of the cover lay film 3 is irradiated with, for example, a laser beam 4 to provide a removing portion 5.
Next, as shown in (D), a rigid substrate 6 having a circuit formed on one side in advance by a photographic method or the like is laminated via a prepreg 7 on both front and back surfaces of the flexible substrate 1 on which the coverlay film 3 is laminated. I do. Then
As shown in (E), a through hole 8 is formed in a predetermined portion by, for example, drilling. Next, as shown in (F), after the smear on the inner wall surface of the through hole 8 is desmeared by, for example, a chemical treatment method, copper plating 9 is applied to the entire surface of the laminated substrate. Next, by forming the outer layer circuit 10 on the front and back of the laminated substrate by, for example, a photographic method, a rigid-flex multilayer printed wiring board as shown in (G) is obtained.

【0016】図2は本発明の第2の実施の形態を示す概
略断面製造工程説明図で、以下該図に基いて説明すれ
ば、まず(A)に示すように、フレキシブル基板11の
両面に、例えば写真法等により回路12を形成する。他
方、(B)に示すように、接着層13aを含むカバーレ
イフィルム13については、積層したときの貫通穴該当
部分に、例えばドリルや金型等により予め貫通孔15を
形設する。次いで、(C)に示すように、前記(A)で
得た両面に回路12が施されたフレキシブル基板11の
表裏両面に、それぞれ貫通孔15が施された前記(B)
で得た接着層13aを含むカバーレイフィルム13を積
層する。以下、図1の(D)〜(G)に示す工程と同一
の工程により、リジット・フレックス多層プリント配線
板が得られる。
FIG. 2 is a schematic cross-sectional manufacturing process explanatory view showing a second embodiment of the present invention. Referring to FIG. 2A, first, as shown in FIG. The circuit 12 is formed by, for example, a photographic method. On the other hand, as shown in (B), in the cover lay film 13 including the adhesive layer 13a, a through hole 15 is previously formed in a portion corresponding to the through hole when laminated, for example, by a drill or a mold. Next, as shown in (C), the through-holes 15 are formed on both front and back surfaces of the flexible substrate 11 having the circuit 12 formed on both surfaces obtained in (A).
The coverlay film 13 including the adhesive layer 13a obtained in the above is laminated. Hereinafter, a rigid-flex multilayer printed wiring board is obtained by the same steps as those shown in FIGS. 1 (D) to 1 (G).

【0017】図3は、本発明の第3の実施の形態を示す
概略断面製造工程説明図で、以下該図に基いて説明すれ
ば、まず(A)に示すように、フレキシブル基板21の
両面に、例えば写真法等により回路22を形成する。次
いで、(B)に示すように、両面に回路22が施された
フレキシブル基板21の表裏両面のうち、リジット基板
を積層しない導体回路部分のみに、それぞれ接着層23
aを含むカバーレイフィルム23を積層する。次いで、
(C)に示すように、両面に回路22が施されたフレキ
シブル基板21の表裏両面のうち、カバーレイフィルム
23が積層されていない部分に、予め片面に写真法等に
より回路形成を施したリジット基板26を、それぞれプ
リプレグ27を介して積層する。次いで、(D)に示す
ように、リジット・フレックス部にドリル加工等により
貫通穴28を形設する。次いで、(E)に示すように、
貫通穴28の内壁面のスミアを例えばプラズマ法により
デスミア処理後、リジット・フレックス部全面に銅メッ
キ29処理を施す。次いで、例えば写真法等により、積
層基板の表裏に外層回路30を形成することにより、
(F)に示す如きリジット・フレックス多層プリント配
線板が得られる。
FIG. 3 is a schematic cross-sectional manufacturing process explanatory view showing a third embodiment of the present invention. First, as shown in FIG. 3A, as shown in FIG. Then, the circuit 22 is formed by, for example, a photographic method. Next, as shown in (B), the adhesive layers 23 are respectively applied only to the conductor circuit portions on which the rigid substrate is not laminated, of the front and back surfaces of the flexible substrate 21 on which the circuits 22 are provided on both surfaces.
The coverlay film 23 containing a is laminated. Then
As shown in FIG. 4C, a rigid body in which a circuit is formed on one side in advance by a photographic method or the like in a portion where the coverlay film 23 is not laminated among the front and back surfaces of the flexible substrate 21 having the circuit 22 formed on both sides. The substrates 26 are laminated via prepregs 27, respectively. Next, as shown in (D), a through hole 28 is formed in the rigid flex portion by drilling or the like. Then, as shown in (E),
After the smear on the inner wall surface of the through hole 28 is desmeared by, for example, a plasma method, copper plating 29 is applied to the entire surface of the rigid flex portion. Then, by forming the outer layer circuit 30 on the front and back of the laminated substrate by, for example, a photographic method,
A rigid-flex multilayer printed wiring board as shown in FIG.

【0018】[0018]

【発明の効果】本発明のリジット・フレックス多層プリ
ント配線板の製造方法によれば、カバーレイフィルムの
接着層による悪影響を受けることがないので、貫通穴の
デスミア処理を通常のリジット基板におけると同様に処
理しても、接続信頼性の高いメッキスルーホールを形成
することができる。
According to the method for manufacturing a rigid-flex multilayer printed wiring board of the present invention, since there is no adverse effect due to the adhesive layer of the cover lay film, the desmear treatment of the through holes is performed in the same manner as in a normal rigid substrate. , A plated through hole with high connection reliability can be formed.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の第1の実施の形態を示す概略断面製造
工程説明図。
FIG. 1 is a schematic cross-sectional manufacturing process explanatory view showing a first embodiment of the present invention.

【図2】本発明の第2の実施の形態を示す概略断面製造
工程説明図。
FIG. 2 is a schematic cross-sectional manufacturing process explanatory view showing a second embodiment of the present invention.

【図3】本発明の第3の実施の形態を示す概略断面製造
工程説明図。
FIG. 3 is a schematic cross-sectional manufacturing process explanatory view showing a third embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1,11,21:フレキシブル基板 2,12,22:導体回路 3,13,23:カバーレイフィルム 3a,13a,23a:接着層 4:レーザー光 5:カバーレイフィルム除去部 15:カバーレイフィルム貫通孔 6,26:リジット基板 7,27:プリプレグ 8,28:貫通穴 9,29:銅メッキ 10,30:外層回路 1,11,21: Flexible substrate 2,12,22: Conductor circuit 3,13,23: Coverlay film 3a, 13a, 23a: Adhesive layer 4: Laser light 5: Coverlay film removal part 15: Coverlay film penetration Hole 6, 26: rigid board 7, 27: prepreg 8, 28: through hole 9, 29: copper plating 10, 30: outer layer circuit

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 リジット部とフレキシブル部を有するリ
ジット・フレックス多層プリント配線板の製造方法にお
いて、フレキシブル基板の導体回路上に、接着層を含む
カバーレイフィルムを介在せしめてリジット基板を積層
するに際し、該リジット基板の積層前に、カバーレイフ
ィルムの貫通穴該当部分を予め除去することを特徴とす
るリジット・フレックス多層プリント配線板の製造方
法。
In a method of manufacturing a rigid-flex multilayer printed wiring board having a rigid portion and a flexible portion, a rigid board is laminated with a coverlay film including an adhesive layer interposed on a conductive circuit of a flexible substrate. A method for manufacturing a rigid-flex multilayer printed wiring board, wherein a portion corresponding to a through hole of a coverlay film is removed in advance before laminating the rigid substrate.
【請求項2】 カバーレイフィルムの貫通穴該当部分の
除去を、フレキシブル基板の導体回路上に、カバーレイ
フィルムを積層した後に行なうことを特徴とする請求項
1記載のリジット・フレックス多層プリント配線板の製
造方法。
2. The rigid-flex multilayer printed wiring board according to claim 1, wherein the portion corresponding to the through hole of the coverlay film is removed after the coverlay film is laminated on the conductor circuit of the flexible substrate. Manufacturing method.
【請求項3】 カバーレイフィルムの貫通穴該当部分の
除去を、フレキシブル基板の導体回路上に、カバーレイ
フィルムを積層する前に行なうことを特徴とする請求項
1記載のリジット・フレックス多層プリント配線板の製
造方法。
3. The rigid-flex multilayer printed wiring according to claim 1, wherein the portion corresponding to the through hole of the coverlay film is removed before the coverlay film is laminated on the conductor circuit of the flexible substrate. Plate manufacturing method.
【請求項4】 カバーレイフィルムの貫通穴該当部分の
除去を、レーザー、ドリル、又は金型で行なうことを特
徴とする請求項1〜3の何れか1項記載のリジット・フ
レックス多層プリント配線板の製造方法。
4. The rigid-flex multilayer printed wiring board according to claim 1, wherein the portion corresponding to the through-hole of the coverlay film is removed by a laser, a drill, or a mold. Manufacturing method.
【請求項5】 リジット部とフレキシブル部を有するリ
ジット・フレックス多層プリント配線板の製造方法にお
いて、フレキシブル基板の導体回路上にリジット基板を
積層するに際し、該リジット基板を積層するフレキシブ
ル基板の導体回路部分には接着層を含むカバーレイフィ
ルムを介在せしめることなくリジット基板を積層し、リ
ジット基板を積層しないフレキシブル基板の導体回路部
分にのみ当該カバーレイフィルムを積層することを特徴
とするリジット・フレックス多層プリント配線板の製造
方法。
5. A method of manufacturing a rigid / flexible multilayer printed wiring board having a rigid portion and a flexible portion, wherein a rigid circuit board is laminated on the conductor circuit of the flexible substrate when the rigid substrate is laminated on the conductor circuit of the flexible substrate. Rigid-flex multilayer printing characterized by laminating a rigid substrate without interposing a coverlay film including an adhesive layer, and laminating the coverlay film only on the conductor circuit portion of a flexible substrate without laminating the rigid substrate Manufacturing method of wiring board.
JP26276098A 1998-09-17 1998-09-17 Method for manufacturing rigid reflex multilayer printed-wiring board Pending JP2000091745A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26276098A JP2000091745A (en) 1998-09-17 1998-09-17 Method for manufacturing rigid reflex multilayer printed-wiring board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26276098A JP2000091745A (en) 1998-09-17 1998-09-17 Method for manufacturing rigid reflex multilayer printed-wiring board

Publications (1)

Publication Number Publication Date
JP2000091745A true JP2000091745A (en) 2000-03-31

Family

ID=17380216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26276098A Pending JP2000091745A (en) 1998-09-17 1998-09-17 Method for manufacturing rigid reflex multilayer printed-wiring board

Country Status (1)

Country Link
JP (1) JP2000091745A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008252041A (en) * 2007-03-30 2008-10-16 Ube Ind Ltd Method for manufacturing build-up multilayer wiring board

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008252041A (en) * 2007-03-30 2008-10-16 Ube Ind Ltd Method for manufacturing build-up multilayer wiring board

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