JP2000091624A5 - - Google Patents

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Publication number
JP2000091624A5
JP2000091624A5 JP1998256991A JP25699198A JP2000091624A5 JP 2000091624 A5 JP2000091624 A5 JP 2000091624A5 JP 1998256991 A JP1998256991 A JP 1998256991A JP 25699198 A JP25699198 A JP 25699198A JP 2000091624 A5 JP2000091624 A5 JP 2000091624A5
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JP
Japan
Prior art keywords
semiconductor
conductive layer
incident light
signal extraction
position detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998256991A
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English (en)
Japanese (ja)
Other versions
JP4197775B2 (ja
JP2000091624A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP25699198A priority Critical patent/JP4197775B2/ja
Priority claimed from JP25699198A external-priority patent/JP4197775B2/ja
Publication of JP2000091624A publication Critical patent/JP2000091624A/ja
Publication of JP2000091624A5 publication Critical patent/JP2000091624A5/ja
Application granted granted Critical
Publication of JP4197775B2 publication Critical patent/JP4197775B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP25699198A 1998-09-10 1998-09-10 半導体位置検出器 Expired - Fee Related JP4197775B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25699198A JP4197775B2 (ja) 1998-09-10 1998-09-10 半導体位置検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25699198A JP4197775B2 (ja) 1998-09-10 1998-09-10 半導体位置検出器

Publications (3)

Publication Number Publication Date
JP2000091624A JP2000091624A (ja) 2000-03-31
JP2000091624A5 true JP2000091624A5 (enExample) 2005-10-13
JP4197775B2 JP4197775B2 (ja) 2008-12-17

Family

ID=17300212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25699198A Expired - Fee Related JP4197775B2 (ja) 1998-09-10 1998-09-10 半導体位置検出器

Country Status (1)

Country Link
JP (1) JP4197775B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7557032B2 (en) 2005-09-01 2009-07-07 Micron Technology, Inc. Silicided recessed silicon

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