JP2000091624A5 - - Google Patents

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Publication number
JP2000091624A5
JP2000091624A5 JP1998256991A JP25699198A JP2000091624A5 JP 2000091624 A5 JP2000091624 A5 JP 2000091624A5 JP 1998256991 A JP1998256991 A JP 1998256991A JP 25699198 A JP25699198 A JP 25699198A JP 2000091624 A5 JP2000091624 A5 JP 2000091624A5
Authority
JP
Japan
Prior art keywords
semiconductor
conductive layer
incident light
signal extraction
position detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998256991A
Other languages
English (en)
Japanese (ja)
Other versions
JP2000091624A (ja
JP4197775B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP25699198A priority Critical patent/JP4197775B2/ja
Priority claimed from JP25699198A external-priority patent/JP4197775B2/ja
Publication of JP2000091624A publication Critical patent/JP2000091624A/ja
Publication of JP2000091624A5 publication Critical patent/JP2000091624A5/ja
Application granted granted Critical
Publication of JP4197775B2 publication Critical patent/JP4197775B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP25699198A 1998-09-10 1998-09-10 半導体位置検出器 Expired - Fee Related JP4197775B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25699198A JP4197775B2 (ja) 1998-09-10 1998-09-10 半導体位置検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25699198A JP4197775B2 (ja) 1998-09-10 1998-09-10 半導体位置検出器

Publications (3)

Publication Number Publication Date
JP2000091624A JP2000091624A (ja) 2000-03-31
JP2000091624A5 true JP2000091624A5 (enExample) 2005-10-13
JP4197775B2 JP4197775B2 (ja) 2008-12-17

Family

ID=17300212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25699198A Expired - Fee Related JP4197775B2 (ja) 1998-09-10 1998-09-10 半導体位置検出器

Country Status (1)

Country Link
JP (1) JP4197775B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7557032B2 (en) 2005-09-01 2009-07-07 Micron Technology, Inc. Silicided recessed silicon

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