JP2000082618A - Method for cleaning transformer case on pillar to which insulating oil is adhered - Google Patents
Method for cleaning transformer case on pillar to which insulating oil is adheredInfo
- Publication number
- JP2000082618A JP2000082618A JP10251109A JP25110998A JP2000082618A JP 2000082618 A JP2000082618 A JP 2000082618A JP 10251109 A JP10251109 A JP 10251109A JP 25110998 A JP25110998 A JP 25110998A JP 2000082618 A JP2000082618 A JP 2000082618A
- Authority
- JP
- Japan
- Prior art keywords
- case
- oil
- cleaning
- cleaning agent
- adhered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Transformer Cooling (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明はポリ塩化ビフェニー
ル（ＰＣＢ）を含有した絶縁油が付着した柱上変圧器ケ
ースの洗浄方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for cleaning a pole transformer case to which insulating oil containing polychlorinated biphenyl (PCB) has adhered.
【０００２】[0002]
【従来の技術】故障、寿命などにより降柱された柱上変
圧器は、解体されて修理されるか、またはスクラップ化
されるが、絶縁油は解体される前に抜き取られ、これを
再精製して再度絶縁油（以下、再生油という。）として
使用されることが多い。ところが、再精製される過程で
何らかの理由により、国が規制しているＰＣＢが混入
し、ＰＣＢが混入した再生油を使用した柱上変圧器が装
柱されてしまった。ところで、ある変圧器についてＰＣ
Ｂ濃度を調査した結果、数ｐｐｍ〜数十ｐｐｍが検出さ
れたので、装柱した変圧器から該当変圧器を特定して降
柱しなければならないが、この該当変圧器の特定が事実
上困難であるため、全ての再生油を使用した柱上変圧器
を降柱することになった。降柱された後、その一部は新
油と交換して再使用されてはいるが、殆どは廃棄処分す
ることができないので、そのままの状態で相当な数が保
管されているのが現状である。2. Description of the Related Art Pole transformers that have been downgraded due to failure, service life, etc. are dismantled and repaired or scrapped, but the insulating oil is extracted before being dismantled and re-refined. It is often used again as insulating oil (hereinafter referred to as regenerated oil). However, during the refining process, PCB regulated by the government was mixed for some reason, and a pole transformer using recycled oil mixed with PCB was mounted. By the way, about a certain transformer, PC
As a result of investigating the B concentration, several ppm to several tens ppm were detected. Therefore, it was necessary to specify the applicable transformer from the mounted transformer and descend the pole, but it was practically difficult to specify the applicable transformer. Therefore, all pole-mounted transformers using reclaimed oil were to be dropped. After being lowered, some of them have been replaced with new oil and reused, but since most of them cannot be disposed of, a considerable number are kept as they are. is there.
【０００３】[0003]
【発明が解決しようとする課題】ところで、最近、ＰＣ
Ｂを含む油の処理基準が明確になり、上記の変圧器も解
体処分できるようになった。そこで、解体前に抜き取ら
れた再生油及び解体後の変圧器中身は適宜に処理して処
分され、また解体後の変圧器ケースは屑鉄として処分さ
れるが、ケースの内面に再生油が相当量付着しているの
で、そのまま処分するには問題である。また、この問題
を解決するために、ケース内面に付着した再生油を除去
するための洗浄を行うにしても、洗浄装置、洗浄剤、洗
浄時間などに関して未調査の点が多い。Incidentally, recently, PCs
The standards for treating oil containing B have been clarified, and the above-mentioned transformers can now be dismantled. Therefore, the recycled oil extracted before dismantling and the contents of the transformer after dismantling are properly treated and disposed of, and the transformer case after dismantling is disposed of as scrap iron. Since it is attached, it is a problem to dispose it as it is. Further, in order to solve this problem, even if cleaning is performed to remove regenerated oil adhering to the inner surface of the case, there are many unexamined points regarding the cleaning device, the cleaning agent, the cleaning time, and the like.
【０００４】本発明の目的は、ケースに付着した再生油
に含有するＰＣＢの残存量が処理基準値以下となるよう
な洗浄方法を提供することにある。[0004] It is an object of the present invention to provide a cleaning method in which the residual amount of PCB contained in regenerated oil adhering to a case is equal to or lower than a treatment reference value.
【０００５】[0005]
【課題を解決するための手段】本発明は、絶縁油付着柱
上変圧器ケースの洗浄方法に係わるものであり、内面に
絶縁油が付着した柱上変圧器ケース全体を炭化水素系溶
剤の洗浄剤に浸漬し、ケース内部で洗浄剤の噴流を生成
することにより、絶縁油に含有するポリ塩化ビフェニー
ル（ＰＣＢ）の残存量が処理基準値以下となるような所
定付着油量になるまでケース内面を洗浄するようにした
ものである。SUMMARY OF THE INVENTION The present invention relates to a method of cleaning a pole-mounted transformer case with insulating oil, and a method for cleaning the entirety of the pole-mounted transformer case with insulating oil adhered on the inner surface of the case. By immersing in the agent and generating a jet of the cleaning agent inside the case, the inside of the case is kept until the remaining amount of the polychlorinated biphenyl (PCB) contained in the insulating oil becomes equal to or less than the treatment reference value. Is to be washed.
【０００６】上記の発明においては、洗浄剤として、炭
化水素系溶剤を用いることにより、毒性が低くなり、ま
た臭気が極めて低くなるために、人体や環境に対する安
全性を高めつつ洗浄力を高めることができ、しかもケー
ス全体を洗浄剤に浸漬させると共に、洗浄剤をケース内
部で噴流させることにより、洗浄剤と絶縁油との接触が
高められるため、ケース内面に付着した絶縁油（再生
油）の洗浄力をさらに向上させることができる。したが
って、この絶縁油に含有するＰＣＢの残存量を処理基準
値以下にすることができる。In the above invention, the use of a hydrocarbon-based solvent as a cleaning agent reduces toxicity and extremely reduces odor, so that the detergency is improved while improving safety against human bodies and the environment. In addition, by immersing the entire case in the cleaning agent and jetting the cleaning agent inside the case, the contact between the cleaning agent and the insulating oil is increased, so that the insulating oil (regenerated oil) adhering to the inner surface of the case is removed. The detergency can be further improved. Therefore, the residual amount of PCB contained in this insulating oil can be made equal to or less than the processing reference value.
【０００７】[0007]
【発明の実施の形態】図１は本発明に係る洗浄方法を実
施するための一実施形態を示す洗浄装置の概略構成図で
ある。図において、１は洗浄槽であり、洗浄槽１には洗
浄剤２が充填れている。この洗浄剤２に、図示しない搬
送装置により搬送された変圧器ケース３の開口部を横向
きにした状態で、しかもケース全体を浸漬させる。そし
て、予め洗浄剤２中で待避していた棒状の噴射ノズル４
が、変圧器ケースの内面全体に向かって洗浄剤を噴射可
能となるように、ケース開口部からケース底方向に向か
って移動してくる。噴射ノズル４は、加圧ポンプ５とフ
ィルタ６とを介して洗浄槽１の洗浄剤２に連通されてお
り、加圧ポンプ５により圧送された洗浄剤２は噴射ノズ
ル４から噴射されてジェット噴流となり、ケース内面に
対して垂直に当てられる。上記の噴射ノズル４、加圧ポ
ンプ５、フィルタ６はそれぞれパイプ７により接続され
ている。FIG. 1 is a schematic configuration diagram of a cleaning apparatus showing an embodiment for carrying out a cleaning method according to the present invention. In the figure, reference numeral 1 denotes a cleaning tank, and the cleaning tank 1 is filled with a cleaning agent 2. The entire case is immersed in the cleaning agent 2 with the opening of the transformer case 3 conveyed by a conveying device (not shown) turned sideways. Then, the rod-shaped injection nozzle 4 previously evacuated in the cleaning agent 2
Moves toward the bottom of the case from the case opening so that the cleaning agent can be sprayed toward the entire inner surface of the transformer case. The spray nozzle 4 is communicated with the cleaning agent 2 in the cleaning tank 1 via a pressure pump 5 and a filter 6, and the cleaning agent 2 pumped by the pressure pump 5 is jetted from the injection nozzle 4 to form a jet stream. And is applied perpendicular to the inner surface of the case. The injection nozzle 4, the pressure pump 5, and the filter 6 are connected by a pipe 7, respectively.
【０００８】ところで、この洗浄装置を動作させるにあ
たり、噴射時間に対する付着油量の変化を調べるための
洗浄実験を行った。実験に用いるケースとしては、実ケ
ースにはブッシング取付穴が設けられているため、この
取付穴のないケースとして実ケースのサイズに近い２０
０φ×３００の模擬ケースを製作し、全体に塗装を施し
た。また、洗浄剤２には、炭化水素系溶剤として商品名
「ＮＳクリーン２２０（日鉱石油化学製）」を用いた。
さらに、加圧ポンプ５には吐出量が３．２リットル／ｍ
ｉｎのものを用いた。By the way, in operating this cleaning apparatus, a cleaning experiment was conducted to examine a change in the amount of oil adhering to the injection time. As a case used in the experiment, a bushing mounting hole is provided in the actual case.
A 0φ × 300 simulated case was manufactured, and the whole was painted. Further, as the cleaning agent 2, "NS Clean 220 (manufactured by Nippon Petrochemical)" was used as a hydrocarbon-based solvent.
Further, the discharge rate of the pressurizing pump 5 is 3.2 l / m.
in was used.
【０００９】まず、絶縁油を模擬ケースの上端まで入
れ、絶縁油を排出させてケースを逆さにして６０分間油
切りを行い、この時点での付着油量を規定の重量法によ
り測定した。つぎに、洗浄槽１に充填した洗浄剤２中に
ケース全体を浸漬させ、直ぐに洗浄剤２を噴射ノズル４
により噴射させて１分間継続した。ついで、このような
洗浄を行った後、８０℃で３０分間洗浄剤乾燥を行った
時点での付着油量を規定の重量法により測定し、このと
きの値を１回目の測定値とする。つづいて、２回目の測
定として、上記のように絶縁油を排出させて６０分間油
切りを行った時点での付着油量を測定した後、洗浄剤２
中にケース全体を浸漬させ、洗浄剤２を噴射ノズル４に
より噴射させて３分間継続した。その後、上記のように
洗浄剤乾燥を行って付着油量を測定した。さらにつづい
て、３回目の測定として、上記のように絶縁油を排出さ
せて油切りを行った時点での付着油量を測定した後、洗
浄剤２を噴射ノズル４により噴射させて５分間継続し
た。その後、洗浄剤乾燥を行って付着油量を測定した。
以上の実験結果を図２に示す。図２において、０分での
プロットは３回の測定値の平均値を示している。また、
噴射時間を５分としたのは、洗浄のタクトタイムを５分
／台としたためである。First, the insulating oil was poured into the simulated case up to the upper end, the insulating oil was discharged, the case was turned upside down, and the oil was drained for 60 minutes, and the amount of oil adhering at this time was measured by a prescribed weight method. Next, the entire case is immersed in the cleaning agent 2 filled in the cleaning tank 1, and the cleaning agent 2
And continued for 1 minute. Next, after such washing is performed, the amount of oil adhering when the detergent is dried at 80 ° C. for 30 minutes is measured by a prescribed weight method, and the value at this time is defined as the first measurement value. Subsequently, as a second measurement, the amount of oil adhering at the time when the insulating oil was discharged and the oil was drained for 60 minutes as described above was measured, and then the cleaning agent 2 was measured.
The entire case was immersed in the cleaning agent, and the cleaning agent 2 was sprayed by the spray nozzle 4 for 3 minutes. Thereafter, the detergent was dried as described above, and the amount of oil adhering was measured. Subsequently, as a third measurement, after the insulating oil was discharged and the amount of oil adhering at the time of oil draining was measured as described above, the cleaning agent 2 was injected by the injection nozzle 4 and continued for 5 minutes. did. Thereafter, the cleaning agent was dried to measure the amount of adhered oil.
FIG. 2 shows the above experimental results. In FIG. 2, the plot at 0 minutes indicates the average of three measurements. Also,
The reason why the injection time is set to 5 minutes is that the cleaning tact time is set to 5 minutes / unit.
【００１０】ここで、洗浄後の所定付着油量を算出す
る。実験に供した絶縁油にＰＣＢが混入しているとし
て、またそのＰＣＢ濃度を５０ｐｐｍとして、所定時間
洗浄後の模擬ケース内面に付着している油の面積当たり
のＰＣＢ残存量０．１μｇ／１００ｃｍ2 を処理基準値
とすると、この場合、１００ｃｍ2 当たりの付着油量は
０．１×１０-6／５０×１０-6＝０．００２（ｇ／１０
０ｃｍ2 ）となる。模擬ケースの内側の表面積は２２０
０ｃｍ2 であるので、ケース全体の所定付着油量は０．
００２×（２２００／１００）＝０．０４４（ｇ）とな
る。したがって、図２から明らかなように、噴射時間５
分で所定付着油量を十分下回っていることが分かる。Here, a predetermined amount of adhered oil after cleaning is calculated. Assuming that PCB was mixed in the insulating oil used in the experiment and that the PCB concentration was 50 ppm, the PCB remaining amount per area of the oil adhering to the inner surface of the simulated case after cleaning for a predetermined time was 0.1 μg / 100 cm 2. Is the processing reference value, in this case, the amount of oil adhering per 100 cm 2 is 0.1 × 10 −6 / 50 × 10 −6 = 0.002 (g / 10
0 cm 2 ). Surface area inside the simulated case is 220
Since it is 0 cm 2 , the predetermined amount of oil adhering to the entire case is 0.1 cm.
002 × (2200/100) = 0.044 (g). Therefore, as is apparent from FIG.
It can be seen that the amount of adhering oil is sufficiently lower in minutes.
【００１１】上記の油切りの時間を６０分としたのは、
実験を行った結果、この時間付近を境にして付着油量の
減少率が低くくなっていること、及び全体の処理時間を
考慮して設定したものである。The reason why the oil draining time is set to 60 minutes is as follows.
As a result of an experiment, the setting was made in consideration of the fact that the rate of decrease in the amount of adhering oil was low around this time and the overall processing time.
【００１２】また、上記の重量法により油量を測定する
には、まずｎ−ヘキサンをケースに適宜の量を入れて、
ケース全面に行き渡るようにケースを振る。つぎに、ケ
ースを逆さにしてｎ−ヘキサンをビーカに移す。つい
で、ビーカを水浴バスに入れて９１〜９３℃で１時間加
熱し、ｎ−ヘキサンを蒸発させる。その後、室温まで冷
却して電気天秤により測定する。In order to measure the amount of oil by the above gravimetric method, first, an appropriate amount of n-hexane is put in a case,
Shake the case to cover the entire case. Next, the case is turned upside down and n-hexane is transferred to the beaker. The beaker is then heated in a water bath at 91-93 ° C. for 1 hour to evaporate n-hexane. Then, it cools to room temperature and measures with an electric balance.
【００１３】つぎに、比較例として、上記に示した模擬
ケース、洗浄槽、洗浄剤を使用して洗浄実験を行った。
まず、絶縁油を模擬ケースの上端まで入れ、絶縁油を排
出させてケースを逆さにして６０分間油切りを行い、こ
の時点での付着油量を規定の重量法により測定する。つ
ぎに、洗浄槽に充填した洗浄剤中にケース全体を３０秒
間浸漬した後、ケースを３０秒間逆さにして洗浄剤切り
を行った。ついで、このように浸漬及び洗浄剤切りを１
回づつ行った後、８０℃で３０分間洗浄剤乾燥を行った
時点での付着油量を規定の重量法により測定し、このと
きの値を回数１の測定値とする。つづいて、２回目の測
定として、上記のように絶縁油を排出させて６０分間油
切りを行った時点での付着油量を測定し、浸漬及び洗浄
剤切を３回づつ行った後、洗浄剤乾燥を行って付着油量
を測定した。さらにつづいて、３回目の測定として、上
記のように絶縁油を排出させて油切りを行った時点での
付着油量を測定し、浸漬及び洗浄剤切りを５回づつ行っ
た後、洗浄剤乾燥を行って付着油量を測定した。以上の
実験結果を図３に示す。図３において、０回でのプロッ
トは３回の測定値の平均値を示している。また、回数を
５回としたのは、洗浄のタクトタイムを５分／台とした
ためである。図３から明らかなように、比較例として示
した洗浄方法では、５回でも所定付着油量０．０４４
（ｇ）よりもかなり上回っていることが分かる。Next, as a comparative example, a cleaning experiment was performed using the above-described simulation case, cleaning tank, and cleaning agent.
First, the insulating oil is filled up to the upper end of the simulated case, the insulating oil is discharged, the case is turned upside down, and the oil is drained for 60 minutes. At this time, the amount of the adhering oil is measured by a prescribed weight method. Next, the entire case was immersed in the cleaning agent filled in the cleaning tank for 30 seconds, and then the case was turned upside down for 30 seconds to cut off the cleaning agent. Next, the immersion and cleaning agent cutting were performed in this manner.
After the cleaning, drying was performed at 80 ° C. for 30 minutes, and the amount of oil adhered was measured by a specified gravimetric method. Subsequently, as a second measurement, the amount of adhering oil at the time when the insulating oil was discharged and the oil was drained for 60 minutes was measured as described above, and after immersion and cleaning agent draining were performed three times, washing was performed. The agent was dried to measure the amount of oil adhered. Subsequently, as a third measurement, the amount of oil adhering at the time when the insulating oil was discharged and the oil was drained as described above was measured, and after immersion and cleaning agent draining were performed five times, the cleaning agent was removed. After drying, the amount of the adhered oil was measured. FIG. 3 shows the results of the above experiment. In FIG. 3, the plot at 0 times indicates the average value of the three measured values. The reason why the number of times is set to 5 is that the tact time for cleaning is set to 5 minutes / unit. As is clear from FIG. 3, in the cleaning method shown as the comparative example, even if the cleaning method is performed five times, the predetermined amount of the adhered oil is 0.044.
It turns out that it is much higher than (g).
【００１４】上記の洗浄方法を行う際には、洗浄剤は図
示しない洗浄剤の再精製装置により常に浄化されるよう
になっている。When the above-described cleaning method is performed, the cleaning agent is always purified by a cleaning agent re-purification device (not shown).
【００１５】[0015]
【発明の効果】以上のように、本発明によれば、洗浄剤
として、炭化水素系溶剤を用いるようにしたので、人体
や環境に対する安全性を高めつつ洗浄力を高めることが
できる。しかも、ケース全体を洗浄剤に浸漬させると共
に、洗浄剤をケース内部で噴流させるようにしたので、
ケース内面に付着した絶縁油（再生油）の洗浄力をさら
に向上させることができる。したがって、この絶縁油に
含有するＰＣＢの残存量を処理基準値以下にすることが
できる。As described above, according to the present invention, since the hydrocarbon solvent is used as the cleaning agent, the detergency can be enhanced while improving the safety to the human body and the environment. Moreover, the entire case is immersed in the cleaning agent, and the cleaning agent is jetted inside the case.
The detergency of the insulating oil (regenerated oil) attached to the inner surface of the case can be further improved. Therefore, the residual amount of PCB contained in this insulating oil can be made equal to or less than the processing reference value.
【図１】本発明に係る洗浄方法を実施するための一実施
形態を示す洗浄装置の概略構成図である。FIG. 1 is a schematic configuration diagram of a cleaning apparatus showing an embodiment for performing a cleaning method according to the present invention.
【図２】本発明に係る洗浄方法を実施するための一実施
形態を示す洗浄装置を用いて洗浄実験を行った結果を示
し、噴射時間に対する付着油量の変化を示すグラフであ
る。FIG. 2 is a graph showing a result of performing a cleaning experiment using a cleaning apparatus according to an embodiment for carrying out a cleaning method according to the present invention, and showing a change in the amount of adhered oil with respect to an injection time.
【図３】本発明に係る洗浄方法と比較するための洗浄実
験を行った結果を示し、回数に対する付着油量の変化を
示すグラフである。FIG. 3 is a graph showing a result of performing a cleaning experiment for comparison with the cleaning method according to the present invention, and showing a change in the amount of adhered oil with respect to the number of times.
───────────────────────────────────────────────────── フロントページの続き Ｆターム(参考） 3B201 AA26 AA47 AB03 BB34 BB47 BB90 BB95 CA05 CB12 CC11 CD22 5E050 FA10 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 3B201 AA26 AA47 AB03 BB34 BB47 BB90 BB95 CA05 CB12 CC11 CD22 5E050 FA10
Claims (1)
ス全体を炭化水素系溶剤の洗浄剤に浸漬し、前記ケース
内部で前記洗浄剤の噴流を生成することにより、前記絶
縁油に含有するポリ塩化ビフェニール（ＰＣＢ）の残存
量が処理基準値以下となるような所定付着油量になるま
で前記ケース内面を洗浄する絶縁油付着柱上変圧器ケー
スの洗浄方法。1. An entire pole transformer case having insulating oil adhered to an inner surface thereof is immersed in a cleaning agent of a hydrocarbon solvent, and a jet of the cleaning agent is generated inside the case to contain the insulating oil. A method of cleaning an insulating oil-adhered pole-mounted transformer case, wherein the inner surface of the case is washed until a predetermined amount of adhering oil is reached such that a residual amount of polychlorinated biphenyl (PCB) becomes equal to or less than a treatment reference value.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10251109A JP2000082618A (en) | 1998-09-04 | 1998-09-04 | Method for cleaning transformer case on pillar to which insulating oil is adhered |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10251109A JP2000082618A (en) | 1998-09-04 | 1998-09-04 | Method for cleaning transformer case on pillar to which insulating oil is adhered |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2000082618A true JP2000082618A (en) | 2000-03-21 |
Family
ID=17217794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10251109A Pending JP2000082618A (en) | 1998-09-04 | 1998-09-04 | Method for cleaning transformer case on pillar to which insulating oil is adhered |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000082618A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001342499A (en) * | 2000-06-01 | 2001-12-14 | Mitsui & Co Ltd | Detergent composition for member on which halogenated aromatic compound adheres and method of washing treatment using detergent composition |
| JP2015174032A (en) * | 2014-03-14 | 2015-10-05 | 株式会社太陽工業所 | Cleaning apparatus of pcb contaminated waste electrical equipment |
-
1998
- 1998-09-04 JP JP10251109A patent/JP2000082618A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001342499A (en) * | 2000-06-01 | 2001-12-14 | Mitsui & Co Ltd | Detergent composition for member on which halogenated aromatic compound adheres and method of washing treatment using detergent composition |
| JP2015174032A (en) * | 2014-03-14 | 2015-10-05 | 株式会社太陽工業所 | Cleaning apparatus of pcb contaminated waste electrical equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2568371B2 (en) | Novel lid and door for vacuum chamber and pretreatment | |
| KR100806476B1 (en) | Apparatus for Removing Organic Films | |
| JPH10144650A (en) | Semiconductor material cleaner | |
| JPH05255876A (en) | Method for washing metallic articles, device for washing metallic articles and device for drying metallic articles | |
| JP2002526657A (en) | Electrolytic cleaning of conductive objects | |
| US6384363B1 (en) | Process for electric discharge machining and apparatus therefor | |
| JP2000082618A (en) | Method for cleaning transformer case on pillar to which insulating oil is adhered | |
| US5378315A (en) | Removing imaging member layers from a substrate | |
| CN108454231A (en) | Printing screen cleaning | |
| EP0688860B1 (en) | Process for producing clean article | |
| JP6213186B2 (en) | How to clean contaminated equipment | |
| JPH06212467A (en) | Method and device for cleaning material with oil deposit | |
| JP3469179B2 (en) | Method and apparatus for cleaning member attached to polychlorinated biphenyls | |
| JPH09253592A (en) | Totally enclosed washer | |
| JP2005246652A (en) | Cleaning method of rubber vulcanizing mold | |
| WO2021145014A1 (en) | Waste electrical equipment processing system and processing method | |
| JP3168928B2 (en) | Steel plate cleaning equipment | |
| JPH1071375A (en) | Washing method | |
| JPH04110483A (en) | Method for washing parts with water-soluble detergent | |
| JPH02268879A (en) | Cleaning method | |
| JPH0686960A (en) | Cleaning apparatus | |
| JP3256637B2 (en) | Cleaning method for epoxy resin mixing equipment | |
| JP3296379B2 (en) | Cleaning equipment | |
| KR102181480B1 (en) | Washing apparatus of metal mask | |
| JPH10189526A (en) | Method and apparatus for cleaning of reticle |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20050826 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070424 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20070821 |