JP2000061246A - 空気清浄装置 - Google Patents
空気清浄装置Info
- Publication number
- JP2000061246A JP2000061246A JP10247781A JP24778198A JP2000061246A JP 2000061246 A JP2000061246 A JP 2000061246A JP 10247781 A JP10247781 A JP 10247781A JP 24778198 A JP24778198 A JP 24778198A JP 2000061246 A JP2000061246 A JP 2000061246A
- Authority
- JP
- Japan
- Prior art keywords
- air
- water
- temperature
- chemical
- outside air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000126 substance Substances 0.000 claims abstract description 56
- 239000000428 dust Substances 0.000 claims abstract description 23
- 238000007664 blowing Methods 0.000 claims abstract description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 83
- 239000007921 spray Substances 0.000 claims description 31
- 239000003344 environmental pollutant Substances 0.000 claims description 28
- 231100000719 pollutant Toxicity 0.000 claims description 28
- 238000004140 cleaning Methods 0.000 claims description 11
- 238000005507 spraying Methods 0.000 claims description 7
- 239000000356 contaminant Substances 0.000 abstract description 16
- 239000002184 metal Substances 0.000 abstract description 7
- 229910052751 metal Inorganic materials 0.000 abstract description 7
- 239000003570 air Substances 0.000 description 113
- 239000002245 particle Substances 0.000 description 17
- 238000001816 cooling Methods 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 239000007788 liquid Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 235000002639 sodium chloride Nutrition 0.000 description 4
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 3
- 239000002826 coolant Substances 0.000 description 3
- 239000011780 sodium chloride Substances 0.000 description 3
- NLXLAEXVIDQMFP-UHFFFAOYSA-N Ammonia chloride Chemical compound [NH4+].[Cl-] NLXLAEXVIDQMFP-UHFFFAOYSA-N 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 238000011045 prefiltration Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 101500000959 Bacillus anthracis Protective antigen PA-20 Proteins 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 102000003729 Neprilysin Human genes 0.000 description 1
- 108090000028 Neprilysin Proteins 0.000 description 1
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 235000019270 ammonium chloride Nutrition 0.000 description 1
- -1 ammonium ions Chemical class 0.000 description 1
- 239000011362 coarse particle Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003631 expected effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 229940085991 phosphate ion Drugs 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229910052938 sodium sulfate Inorganic materials 0.000 description 1
- 235000011152 sodium sulphate Nutrition 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Landscapes
- Gas Separation By Absorption (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10247781A JP2000061246A (ja) | 1998-08-18 | 1998-08-18 | 空気清浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10247781A JP2000061246A (ja) | 1998-08-18 | 1998-08-18 | 空気清浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000061246A true JP2000061246A (ja) | 2000-02-29 |
| JP2000061246A5 JP2000061246A5 (enrdf_load_stackoverflow) | 2005-11-04 |
Family
ID=17168564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10247781A Pending JP2000061246A (ja) | 1998-08-18 | 1998-08-18 | 空気清浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2000061246A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004358436A (ja) * | 2003-06-09 | 2004-12-24 | Shimizu Corp | 汚染物質除去装置 |
| JP2005013792A (ja) * | 2003-06-24 | 2005-01-20 | Ricoh Elemex Corp | 空気清浄機 |
| JP2006250410A (ja) * | 2005-03-09 | 2006-09-21 | Techno Ryowa Ltd | 水膜を備えた空気調和装置及び水膜への純水供給方法 |
| JP2010172834A (ja) * | 2009-01-30 | 2010-08-12 | Shinryo Corp | 空気中汚染物質の除去装置 |
| JP2015218971A (ja) * | 2014-05-19 | 2015-12-07 | 三菱電機株式会社 | 空気清浄換気装置 |
-
1998
- 1998-08-18 JP JP10247781A patent/JP2000061246A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004358436A (ja) * | 2003-06-09 | 2004-12-24 | Shimizu Corp | 汚染物質除去装置 |
| JP2005013792A (ja) * | 2003-06-24 | 2005-01-20 | Ricoh Elemex Corp | 空気清浄機 |
| JP2006250410A (ja) * | 2005-03-09 | 2006-09-21 | Techno Ryowa Ltd | 水膜を備えた空気調和装置及び水膜への純水供給方法 |
| JP2010172834A (ja) * | 2009-01-30 | 2010-08-12 | Shinryo Corp | 空気中汚染物質の除去装置 |
| JP2015218971A (ja) * | 2014-05-19 | 2015-12-07 | 三菱電機株式会社 | 空気清浄換気装置 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20050815 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20050815 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20070404 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20070410 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20070814 |