JP2000058989A - Flexible metal wheel laminate plate - Google Patents

Flexible metal wheel laminate plate

Info

Publication number
JP2000058989A
JP2000058989A JP22905998A JP22905998A JP2000058989A JP 2000058989 A JP2000058989 A JP 2000058989A JP 22905998 A JP22905998 A JP 22905998A JP 22905998 A JP22905998 A JP 22905998A JP 2000058989 A JP2000058989 A JP 2000058989A
Authority
JP
Japan
Prior art keywords
base film
coefficient
adhesive sheet
thickness
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22905998A
Other languages
Japanese (ja)
Inventor
Minehiro Mori
峰寛 森
Kenji Tanabe
健二 田辺
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Chemicals Inc
Original Assignee
Mitsui Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Chemicals Inc filed Critical Mitsui Chemicals Inc
Priority to JP22905998A priority Critical patent/JP2000058989A/en
Publication of JP2000058989A publication Critical patent/JP2000058989A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To realize excellent dimensional stability without sacrifice of adhesion and to enhance moisture swelling characteristics after pattern formation by employing a material having a moisture swelling coefficient lower than a specified value in the base film of an adhesive sheet. SOLUTION: Metal plates are laminated through an adhesive sheet on the opposite sides of an insulation layer, i.e., a base film, to obtain athree layer structure wherein the moisture swelling coefficient of the base film is set at 200 ppm or below and the thickness of the adhesive layer is set at 5 μm or less. The metal plate to be laminated is composed of stainless steel, Cu, Fe, or the like, and the base film employed in the adhesive sheet is composed of non-thermoplastic resin. Coefficient of thermal expansion of the adhesive sheet is controlled by selecting a base film having coefficient of thermal expansion lower than that of the metal being used and then determining the thickness of the adhesive layer roughly using the coefficient of thermal expansion of a thermoplastic polyimide forming the base film and the adhesive layer.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は金属部分をパターン
形成して使用する金属積層板に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a metal laminate used by patterning a metal portion.

【0002】[0002]

【従来の技術】従来より、金属積層板はパターン形成
後、露出される接着剤樹脂部分の吸湿膨張係数が大きい
ことから、環境の湿度変化に対応する接着剤の吸湿量の
変化に依存して収縮と膨張を繰り返す。このことは製品
にうねりや、その後の加工工程等で位置あわせ不良等の
不具合をもたらし、かつ最終製品信頼性にも大きく影響
を及ぼす。吸湿量変化による収縮膨張の影響を軽減する
ため、接着シートを絶縁層として用いる金属積層板にお
いては、パターン形成後の露出される接着剤層の吸湿膨
張係数の低下及び吸湿量の低下を行なうことが効果的で
あるが、金属と良好な接着性を得るためにはこれらの特
性を改善することは非常に困難であった。
2. Description of the Related Art Conventionally, a metal laminate has a large coefficient of hygroscopic expansion of a portion of an adhesive resin exposed after a pattern is formed, and therefore depends on a change in the amount of moisture absorbed by an adhesive corresponding to a change in environmental humidity. Repeat contraction and expansion. This causes undulations in the product, defects such as misalignment in the subsequent processing steps, etc., and greatly affects the reliability of the final product. In order to reduce the influence of shrinkage and expansion due to changes in the amount of moisture absorption, in a metal laminate using an adhesive sheet as an insulating layer, the coefficient of moisture absorption and expansion of the exposed adhesive layer after pattern formation and the amount of moisture absorption should be reduced. Is effective, but it is very difficult to improve these properties in order to obtain good adhesion to metal.

【0003】[0003]

【発明が解決しようとする課題】本発明の目的は、上記
した問題点を解決し、吸湿時の寸法安定性に優れたフレ
キシブル金属箔積層板を提供することにある。
SUMMARY OF THE INVENTION It is an object of the present invention to solve the above-mentioned problems and to provide a flexible metal foil laminate excellent in dimensional stability when absorbing moisture.

【0004】[0004]

【課題を解決するための手段】本発明は、金属との接着
性を損なうことなく、パターン形成後の吸湿膨張特性を
改善し、寸法安定性の優れる金属積層板を提供するもの
であって、絶縁層としても用いられる接着シートのベー
スフィルムの吸湿膨張係数が20ppm以下の材質を用
い、かつ接着剤厚みを5μm以下とすることにより、接
着剤層の片側がベースフィルムに固定され、寸法が拘束
されている影響により、接着剤層自体の見かけの吸湿膨
張係数がベースフィルムの吸湿膨張係数に影響され低下
していることを特徴とする。
DISCLOSURE OF THE INVENTION The present invention provides a metal laminate having improved dimensional stability and improved moisture absorption / expansion characteristics after pattern formation without impairing adhesion to metal. By using a material having a coefficient of hygroscopic expansion of 20 ppm or less and a thickness of 5 μm or less for the base film of the adhesive sheet also used as the insulating layer, one side of the adhesive layer is fixed to the base film, and the dimensions are restricted. Due to this effect, the apparent hygroscopic expansion coefficient of the adhesive layer itself is affected by the hygroscopic expansion coefficient of the base film and is reduced.

【0005】[0005]

【発明の実施の形態】以下に本発明を詳しく説明する。
本発明にいう金属積層板は絶縁層に接着シートを有する
ことが基本となり、その両側に接着される金属は材質は
問わず、これは多層積層板を形成する場合でも同様であ
る。ここで積層される金属としては具体的に、ステンレ
ス、Cu、Fe、Ni、Mo、Al等が上げられる。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail.
The metal laminate according to the present invention basically has an adhesive sheet on an insulating layer, and the metal adhered to both sides thereof is not limited to a particular material, and the same applies to the case of forming a multilayer laminate. Specific examples of the metal to be stacked here include stainless steel, Cu, Fe, Ni, Mo, and Al.

【0006】接着シートに用いられる、ベースフィルム
としては通常非熱可塑性樹脂が用いられ、具体的には、
ポリイミド、ポリアミド、ポリアミドイミド、ナイロン
等が用いられる。更に具体的には被熱可塑性宇部興産社
性ポリイミドフィルムUpilexシリーズ、鐘ヶ淵化
学社製ポリイミドフィルムApicalシリーズ、デュ
ポン社製ポリイミドフィルムKaptonシリーズ、東
レ社製アミドフィルムアラミカシリーズ等があげられ
る。
[0006] A non-thermoplastic resin is usually used as a base film used for the adhesive sheet.
Polyimide, polyamide, polyamide imide, nylon and the like are used. More specifically, there may be mentioned a polyimide film Upilex series of thermoplastic Ube Industries, a polyimide film Apical series manufactured by Kanegafuchi Chemical Co., a polyimide film Kapton series manufactured by DuPont, and an amide film Aramica series manufactured by Toray Industries, Inc.

【0007】接着シートの熱膨張係数の制御としては、
基本的には、使用する金属の熱膨張係数より低い熱膨張
係数のベースフィルムを選定した後、ベースフィルムと
接着層を形成する熱可塑性ポリイミドの熱膨張係数を以
下の経験式を用いて、接着層の厚みを概算する。
As a control of the thermal expansion coefficient of the adhesive sheet,
Basically, after selecting a base film with a coefficient of thermal expansion lower than the coefficient of thermal expansion of the metal to be used, the coefficient of thermal expansion of the thermoplastic polyimide forming the base film and the adhesive layer is determined using the following empirical formula. Estimate the layer thickness.

【0008】金属の熱膨張係数=接着シートの熱膨張係
数=(ベースフィルムの熱膨張係数×ベースフィルム厚
み+接着剤熱膨張係数×接着剤層総厚み)/接着シート
総厚み このように概算された接着層厚みからなる接着シートを
作成した後、熱膨張係数を実測して、接着層厚みを実際
に金属と同じになるように厚みを再度調整し制御する。
ここで言う金属と同じ熱膨張係数とは、金属の熱膨張係
数に対して接着シートの熱膨張係数が±5ppm 以下の範
囲であれば、本発明の目的は十分に達成する。金属との
接着はプレス、ラミネーター等による加熱圧着で行われ
る。
The coefficient of thermal expansion of metal = the coefficient of thermal expansion of the adhesive sheet = (the coefficient of thermal expansion of the base film × the thickness of the base film + the coefficient of thermal expansion of the adhesive × the total thickness of the adhesive layer) / the total thickness of the adhesive sheet After preparing the adhesive sheet having the thickness of the adhesive layer, the thermal expansion coefficient is measured, and the thickness is adjusted again and controlled so that the adhesive layer thickness is actually the same as that of the metal.
The term "the same coefficient of thermal expansion as that of a metal" as used herein means that the object of the present invention is sufficiently achieved if the coefficient of thermal expansion of the adhesive sheet is within ± 5 ppm of the coefficient of thermal expansion of the metal. The bonding with the metal is performed by press bonding with a press, a laminator or the like.

【0009】[0009]

【実施例】以下の実施例および比較例によって本発明を
更に詳細に説明する。尚、ここでは吸湿時の寸法安定性
の指標として、金属積層板を片面金属エッチングした後
の直径75mmの円盤を作成し、温度23℃、湿度50%環境
下で24時間放置後の反り量で比較した。
The present invention will be described in more detail with reference to the following Examples and Comparative Examples. Here, as an index of dimensional stability at the time of moisture absorption, a disk having a diameter of 75 mm was prepared by etching a single-sided metal of a metal laminate, and the amount of warpage after leaving for 24 hours at a temperature of 23 ° C. and a humidity of 50% was used. Compared.

【0010】実施例1 ベースフィルムにポリイミドフィルム鐘淵化学工業製ア
ピカルHP(厚み12.5μm)を用い、その両側に熱可塑性
ポリイミド三井化学製PI−A(厚み3μm)形成して
なるオールポリイミド接着シートとOLIN製圧延銅箔
C7025(厚み:18μm)、新日鉄製ステンレス箔SUS304
H-TA(厚み18μm)を接着シートの両側に積層し、ホッ
トプレスを用いて加熱圧着した。このようにして得られ
た接着シート吸湿膨張係数は10ppm 、銅側をエッチング
した直径75mmの円盤の反り量は、樹脂面を上に2mm
であった。
Example 1 An all-polyimide adhesive sheet formed by using a polyimide film, Apical HP (12.5 μm in thickness) manufactured by Kaneguchi Chemical Industry Co., Ltd. as a base film, and forming thermoplastic polyimide PI-A (3 μm in thickness) on both sides thereof And OLIN rolled copper foil C7025 (thickness: 18μm), Nippon Steel stainless steel foil SUS304
H-TA (thickness 18 μm) was laminated on both sides of the adhesive sheet, and hot-pressed using a hot press. The adhesive sheet thus obtained has a coefficient of hygroscopic expansion of 10 ppm, and the amount of warpage of the copper-etched disk having a diameter of 75 mm is 2 mm with the resin surface facing upward.
Met.

【0011】比較例1 ベースフィルムにポリイミドフィルム鐘淵化学工業製ア
ピカルHP(厚み12.5μm)を用い、その両側に熱可塑性
ポリイミド三井化学製PI−A(厚み10μm)形成して
なるオールポリイミド接着シートとOLIN製圧延銅箔
C7025(厚み:18μm)、新日鉄製ステンレス箔SUS304
H-TA(厚み18μm)を接着シートの両側に積層し、ホッ
トプレスを用いて加熱圧着した。このようにして得られ
た接着シート吸湿膨張係数は30ppm、銅側をエッチン
グした直径75mmの円盤の反り量は、樹脂面を上に10m
mであった。
Comparative Example 1 An all-polyimide adhesive sheet having a base film made of polyimide film Apical HP (12.5 μm thick) manufactured by Kaneguchi Chemical Industry and thermoplastic polyimide PI-A (10 μm thick) formed on both sides thereof And OLIN rolled copper foil C7025 (thickness: 18μm), Nippon Steel stainless steel foil SUS304
H-TA (thickness 18 μm) was laminated on both sides of the adhesive sheet, and hot-pressed using a hot press. The adhesive sheet thus obtained has a coefficient of moisture absorption and expansion of 30 ppm, and the amount of warpage of the copper-etched disk having a diameter of 75 mm is 10 m above the resin surface.
m.

【0012】実施例2 ベースフィルムにポリイミドフィルム鐘淵化学工業製ア
ピカルHP(厚み10 μm)を用い、その両側に熱可塑性
ポリイミド三井化学製, PI−AU(厚み2μ)形成し
てなるオールポリイミド接着シートと(厚み:18μ
m)、日本ガイシ製ベリリウム銅合金箔(厚み:14μ
m)と新日鉄製ステンレス箔SUS304H-TA(厚み18μm)
を接着シートの両側に積層し、ホットプレスを用いて加
熱圧着した。このようにして得られた接着シート吸湿膨
張係数は10ppm 、銅側をエッチングした直径75mmの円
盤の反り量は、樹脂面を上に4mmであった。
Example 2 An all-polyimide adhesive formed by forming a polyimide film, Apical HP (10 μm thick) manufactured by Kaneguchi Chemical Industry Co., Ltd. on the base film and forming a thermoplastic polyimide PI-AU (2 μm thick) on both sides of the base film Sheet and (thickness: 18μ
m), NGK beryllium copper alloy foil (thickness: 14μ)
m) and Nippon Steel stainless steel foil SUS304H-TA (18μm thick)
Were laminated on both sides of the adhesive sheet, and heated and pressed using a hot press. The adhesive sheet thus obtained had a coefficient of hygroscopic expansion of 10 ppm, and the amount of warpage of the copper-etched disk having a diameter of 75 mm was 4 mm with the resin surface facing upward.

【0013】比較例2 ベースフィルムにポリイミドフィルム鐘淵化学工業製ア
ピカルHP(厚み10μm)を用い、その両側に熱可塑性ポ
リイミド三井化学製, PI−AU(厚み10μ)形成して
なるオールポリイミド接着シートと(厚み:18μm)、
日本ガイシ製ベリリウム銅合金箔(厚み:14μm)と新
日鉄製ステンレス箔SUS304H-TA(厚み18μm)を接着シ
ートの両側に積層し、ホットプレスを用いて加熱圧着し
た。このようにして得られた接着シート吸湿膨張係数は
30ppm、銅側をエッチングした直径75mmの円盤の反
り量は、樹脂面を上に15mmであった。
Comparative Example 2 An all-polyimide adhesive sheet formed by using a polyimide film, Apical HP (10 μm in thickness) manufactured by Kaneguchi Chemical Industry Co., Ltd. as a base film, and forming a thermoplastic polyimide, PI-AU (10 μm in thickness), on both sides thereof. And (thickness: 18 μm),
NGK beryllium copper alloy foil (thickness: 14 μm) and Nippon Steel stainless steel foil SUS304H-TA (thickness: 18 μm) were laminated on both sides of the adhesive sheet, and heated and pressed using a hot press. The adhesive sheet moisture absorption expansion coefficient thus obtained is
The amount of warpage of a disk having a diameter of 75 mm with a copper side etched at 30 ppm was 15 mm with the resin surface facing upward.

【0014】実施例3 ベースフィルムにポリイミドフィルム鐘淵化学工業製ア
ピカルHP(厚み10μm)を用い、その両側に熱可塑性ポ
リイミド三井化学製, PI−A(厚み2μ)形成してな
るオールポリイミド接着シートと(厚み:18μm)、日
本ガイシ製ベリリウム銅合金箔(厚み:14μm)と新日
鉄製ステンレス箔SUS304H-TA(厚み18μm)を接着シー
トの両側に積層し、ホットプレスを用いて加熱圧着し
た。このようにして得られた接着シート吸湿膨張係数は
10ppm 、銅側をエッチングした直径75mmの円盤の反り
量は、樹脂面を上に2mmであった。
Example 3 An all-polyimide adhesive sheet comprising a polyimide film, Apical HP (10 μm thick) manufactured by Kaneka Chemical Industry Co., Ltd. as a base film, and a thermoplastic polyimide PI-A (2 μm thick) formed on both sides thereof. (Thickness: 18 μm), NGK beryllium copper alloy foil (thickness: 14 μm) and Nippon Steel stainless steel foil SUS304H-TA (thickness: 18 μm) were laminated on both sides of the adhesive sheet, and heated and pressed using a hot press. The adhesive sheet moisture absorption expansion coefficient thus obtained is
The amount of warpage of the disk having a diameter of 75 mm with the copper side etched at 10 ppm was 2 mm with the resin surface facing upward.

【0015】比較例3 ベースフィルムにポリイミドフィルム鐘淵化学工業製ア
ピカルHP(厚み10μm)を用い、その両側に熱可塑性ポ
リイミド三井化学製, PI−A(厚み2μ)形成してな
るオールポリイミド接着シートと(厚み:18μm)、日
本ガイシ製ベリリウム銅合金箔(厚み:14μm)と新日
鉄製ステンレス箔SUS304H-TA(厚み18μm)を接着シー
トの両側に積層し、ホットプレスを用いて加熱圧着し
た。このようにして得られた接着シート吸湿膨張係数は
30ppm 、銅側をエッチングした直径75mmの円盤の反り
量は、樹脂面を上に10mmであった。
Comparative Example 3 An all-polyimide adhesive sheet formed by using a polyimide film Apical HP (10 μm thick) manufactured by Kaneka Chemical Industry Co., Ltd. as a base film, and forming a thermoplastic polyimide PI-A (2 μm thick) on both sides thereof. (Thickness: 18 μm), NGK beryllium copper alloy foil (thickness: 14 μm) and Nippon Steel stainless steel foil SUS304H-TA (thickness: 18 μm) were laminated on both sides of the adhesive sheet, and heated and pressed using a hot press. The adhesive sheet moisture absorption expansion coefficient thus obtained is
The amount of warpage of a disk having a diameter of 30 mm and a diameter of 75 mm with the copper side etched was 10 mm with the resin surface facing upward.

【0016】なお、得られたフレキシブル金属箔積層板
について、各金属箔/ポリイミド界面の寸法安定性及び
半田耐熱試験後ピール強度を測定した。ここで、半田耐
熱試験はIPC- class3試験条件下で行われた。
With respect to the obtained flexible metal foil laminate, the dimensional stability of each metal foil / polyimide interface and the peel strength after the solder heat resistance test were measured. Here, the solder heat resistance test was performed under the IPC-class3 test condition.

【0017】[0017]

【発明の効果】金属との接着性を損なうことなく、パタ
ーン形成後の吸湿膨張特性が改善され、寸法安定性に富
んだ金属箔積層板が提供される。接着剤層が片側ベース
フィルムに固定され、寸法が拘束されているので、接着
剤層自体の見かけの吸湿膨張係数がベースフィルムの膨
張係数の影響を受け低下している。
According to the present invention, a metal foil laminate with improved dimensional stability and improved moisture absorption properties after pattern formation is provided without impairing the adhesion to metal. Since the adhesive layer is fixed to the base film on one side and the dimensions are constrained, the apparent hygroscopic expansion coefficient of the adhesive layer itself is affected by the expansion coefficient of the base film, and is reduced.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 絶縁層としてベースフィルムの両側に接
着剤を形成してなる3層構造の接着シートを用いる金属
積層板において、ベースフィルムの吸湿膨張係数が20
ppm以下であり、かつ、接着剤層の厚みが5μm以下
であることを特徴とするフレキシブル金属箔積層板。
In a metal laminate using a three-layer adhesive sheet having an adhesive formed on both sides of a base film as an insulating layer, the base film has a coefficient of hygroscopic expansion of 20.
ppm, and the thickness of the adhesive layer is 5 μm or less.
JP22905998A 1998-08-13 1998-08-13 Flexible metal wheel laminate plate Pending JP2000058989A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22905998A JP2000058989A (en) 1998-08-13 1998-08-13 Flexible metal wheel laminate plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22905998A JP2000058989A (en) 1998-08-13 1998-08-13 Flexible metal wheel laminate plate

Publications (1)

Publication Number Publication Date
JP2000058989A true JP2000058989A (en) 2000-02-25

Family

ID=16886103

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22905998A Pending JP2000058989A (en) 1998-08-13 1998-08-13 Flexible metal wheel laminate plate

Country Status (1)

Country Link
JP (1) JP2000058989A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006190824A (en) * 2005-01-06 2006-07-20 Nippon Steel Chem Co Ltd Laminate for cof and cof film carrier tape
JPWO2006038533A1 (en) * 2004-10-05 2008-05-15 株式会社カネカ Adhesive sheet and copper-clad laminate
WO2008133182A1 (en) * 2007-04-18 2008-11-06 Asahi Kasei E-Materials Corporation Metal-resin laminate

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2006038533A1 (en) * 2004-10-05 2008-05-15 株式会社カネカ Adhesive sheet and copper-clad laminate
US8298366B2 (en) 2004-10-05 2012-10-30 Kaneka Corporation Adhesive sheet and copper-clad laminate
JP5064033B2 (en) * 2004-10-05 2012-10-31 株式会社カネカ Adhesive sheet and copper-clad laminate
JP2006190824A (en) * 2005-01-06 2006-07-20 Nippon Steel Chem Co Ltd Laminate for cof and cof film carrier tape
JP4642479B2 (en) * 2005-01-06 2011-03-02 新日鐵化学株式会社 COF laminate and COF film carrier tape
WO2008133182A1 (en) * 2007-04-18 2008-11-06 Asahi Kasei E-Materials Corporation Metal-resin laminate

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