JP2000030649A - Shutter device for cylinder wall - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce the space for installing a shutter opening/closing an interior observing window provided on a cylinder wall on the inside or the space required for opening/closing the shutter. SOLUTION: This shutter device is constituted of an interior observing window 2b having a transparent member 41 provided on a cylinder wall 2 to allow observation of the interior from the outside of the cylinder wall 2, a shutter operating shaft 42 arranged through the cylinder wall 2 portion adjacent to the interior observing window 2b and provided with a shutter connection section 44 at the inner end section and an operating shaft operation section 43 for rotating the shutter operating shaft 42 at the outer end section, and a thin plate-like shutter 48 connected to the shutter connection section 44, formed with an elastic thin plate deformed after the shape of the inside face of the cylinder wall 2, and rotatable between the closed position P1 where the inside face of the interior observing window 2b is closed as the shutter operating shaft 42 is rotated and the opened position P2 where the inside face of the window 2b is opened.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a shutter for a cylindrical wall, which is disposed inside a cylindrical wall provided with an internal observation window having a transparent member and opens and closes an inner surface of the internal observation window. The cylindrical wall shutter is used to prevent foreign matter from adhering to the inner surface of the transparent member of the internal observation window.

[0002]

2. Description of the Related Art Various operations are performed in a chamber surrounded by a cylindrical wall or in a vacuum chamber (an ion beam is used to cut off the surface of an observation sample for an electron microscope by shaving off the surface of the sample while leaving a shadowed portion of a wire. When performing an ion milling operation, a sputtering operation, or the like, it is necessary to observe the inside of the chamber from outside the chamber. For this reason, an internal observation window having a transparent member provided on the cylindrical wall is provided so that the inside can be observed from the outside of the cylindrical wall. In this case, there is a problem that the particles repelled by the ion milling operation or the sputtering operation adhere to the inner surface of the transparent member of the internal observation window, thereby impairing the transparency. In order to prevent the particles from adhering to the inner surface of the transparent member of the inner observation window, the inner surface of the inner observation window is generally closed using a shutter except during observation. As the shutter opening / closing mechanism, a rotary type, a slide type, or the like is employed.

The following technology (J01) is considered as a rotary shutter device (shutter device for a cylindrical wall) for opening and closing a shutter of an internal observation window provided on the cylindrical wall. (J01) Technology shown in FIG. 5 FIG. 5 is an explanatory view of a conventional rotary type shutter device for a cylindrical wall. FIG. 5A is a sectional view perpendicular to the axis of a main part of the cylindrical wall, and FIG.
5A is a view as seen from the arrow VB in FIG. 5A. In FIG. 5, a vacuum chamber A is formed inside a cylindrical wall 01, and an ion gun mounting hole 02 is formed above the cylindrical wall 01. FIG. 5 does not show the ion gun. The cylindrical wall 01 is provided with an internal observation window 03 whose inside and outside are blocked by a transparent member 03a. A shutter operating shaft 04 that penetrates the cylindrical wall 01 in and out is rotatably supported at a portion of the cylindrical wall 01 adjacent to the internal observation window 03. A shutter 06 made of sheet metal is fixed to an inner end of the shutter operation shaft 04. Shutter 0
Reference numeral 6 denotes an openable / closable shutter movable between a closed position P1 for closing the inner surface of the internal observation window 03 and an open position P2 for opening the inner surface in accordance with the rotation of the shutter operation shaft 04.

[0004] As shown by a solid line in FIG.
, The center of rotation 06a of the shutter 06 is close to the inner surface of the cylindrical wall 01, and the center of rotation
A closed portion 06b, which is a bent portion on the distal end side from 6a, also closes the inner surface of the internal observation window 03 close to the inner surface. When the shutter 06 is rotated to the open position P2 (see a two-dot chain line in FIG. 5), the rotation center portion 06a remains close to the inner surface of the cylindrical wall 01, but the closed portion 06b is It is in a state away from the side to the inside.

[0005]

(Problems of the technique shown in FIG. 5) In the technique shown in FIG. 5, at the open position P2, the closing portion 06b of the shutter 06 is closed by the inner wall of the cylindrical wall 01. It is in a state away from the side to the inside. Therefore, there is a problem that a space in which the closing part 06b moves (a space with a dot in FIG. 5A) becomes an unusable dead space. Since the vacuum chamber A itself is desirably designed to be small in order to reduce the size of the apparatus, the space taken for opening and closing the shutter 06 is preferably small. Further, even when a sliding shutter is provided, it is necessary to secure a space for sliding and a space for providing a member for operating the sliding shutter from outside the vacuum chamber A. Therefore, the vacuum chamber A itself is required. Cannot be designed smaller.

The present invention has been made in view of the circumstances described above, and has as its object the following contents. (O01) A space for installing a shutter for opening and closing the internal observation window provided on the cylindrical wall inside or a space required for opening and closing the shutter is reduced.

[0007]

Next, a description will be given of the present invention which has solved the above-mentioned problems. In the description of the present invention, reference numerals in parentheses added after constituent elements of the present invention denote constituent elements of the present invention. Reference numerals of corresponding components of the embodiment described later. The reason why the present invention is described in association with the reference numerals of the components of the embodiments described later is to facilitate understanding of the present invention, and not to limit the scope of the present invention to the embodiments.

(Solution of the Invention) In order to solve the above-mentioned problems, a shutter device for a cylindrical wall according to the present invention has the following requirements. An internal observation window (2b) having a transparent member (41) provided on the cylindrical wall (2) so as to be observable; (A02) the inside and outside of the cylindrical wall (2) adjacent to the internal observation window (2b); Shutter operating shaft (42; 4)
2 '), and a shutter connecting portion (44; 4)
4 '), and the shutter operation shaft (4
2; 42 ') to rotate the operating shaft operating section (43;
43 ') provided with the shutter operation shaft (42; 4).
2 '), (A03) the shutter connecting portion (44; 44')
And is formed of an elastic thin plate which is deformed according to the shape of the inner surface of the cylindrical wall (2), and the internal observation window (2b) is rotated with the rotation of the shutter operation shaft (42; 42 '). A) a thin plate shutter (48) rotatable between a closed position (P1) for closing the inner side surface and an open position (P2) for opening.

(Operation of the Present Invention) In the shutter device for a cylindrical wall according to the present invention having the above-mentioned features, the shutter operating shaft (4
2; 42 ′) is disposed so as to penetrate the cylindrical wall (2) portion adjacent to the internal observation window (2 b) in and out. When the shutter operation shaft (42; 42 ') is rotated by an operation shaft operation section (43; 43') provided at an outer end of the shutter operation shaft (42; 42 '), the shutter operation shaft (42; 42 ') at the inner end of the shutter connecting portion (44; 4).
4 ') and a thin plate shutter (48) formed of an elastic thin plate is provided with the shutter operating shaft (42; 4).
2 '), the closed position (P1) and the open position (P
2) Rotate between. At this time, the thin plate shutter (48) is deformed according to the shape of the inner surface of the cylindrical wall (2). In the closed position (P1), the thin plate shutter (48) closes the inner side surface of the internal observation window (2b). In the open position (P2), the thin plate shutter (48) opens the inner surface of the internal observation window (2b), and the transparent member (4) of the internal observation window (2b).
Through 1), the inside of the cylindrical wall (2) can be observed from the outside. Therefore, the thin plate shutter (48)
Is constituted by an elastic thin plate which deforms according to the shape of the inner surface of the cylindrical wall (2), so that the thin plate shutter (48) is in the closed position (P1) or the open position (P2).
Thus, the inner wall of the cylindrical wall (2) does not move inward. Therefore, even if the shutter rotates between the closed position (P1) and the open position (P2), the cylindrical wall (2)
A space (dead space) that cannot be used inside the space is not formed. Further, the thin plate shutter (4
8) When opening and closing the internal observation window (2b), it rotates while deforming according to the shape of the inner surface of the cylindrical wall (2), so that a space for sliding is larger than that of a sliding shutter. A small space is required, and a space for installing the shutter is small.

[0010]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a shutter device for a cylindrical wall according to an embodiment of the present invention; however, the present invention is not limited to the following embodiment. To facilitate understanding of the following description, in the drawings, the front-rear direction is defined as an X-axis direction, the right-left direction is defined as a Y-axis direction, and the up-down direction is defined as a Z-axis direction.
The directions or sides indicated by arrows X, -X, Y, -Y, Z, -Z are forward, rear, right, left, upper, lower, or front, rear, right, left, and upper, respectively. , Below. Also, in the figure, those with “•” in “○” mean arrows pointing from the back of the paper to the front, and those with “x” in “○” indicate the arrow on the paper. From the back to the back.

(Embodiment 1) FIG. 1 is an explanatory view of an ion milling apparatus provided with a shutter device for a cylindrical wall according to Embodiment 1 of the present invention. FIG. 1A is a longitudinal sectional view of the ion milling apparatus, and FIG. It is the figure seen from the IB-IB line of FIG. 1A. FIG. 2 is a sectional view taken along the line II-II of FIG. FIG. 3 is an explanatory view of a shutter device for a cylindrical wall according to the first embodiment of the present invention. FIG. 3A is a cross-sectional view perpendicular to the axis of a main part of the cylindrical wall, and FIG.
FIG. 3 is a diagram viewed from an arrow IIIB of FIG. 1 and 2,
A cylindrical wall 2 is supported on the upper surface of the base plate 1 of the ion milling apparatus I, and a right wall 3 and a left wall 4 are connected to the right and left of the cylindrical wall 2, respectively. Inside the cylindrical wall 2, the right side wall 3, and the left side wall 4, a vacuum sample chamber A is provided.
Are formed, and are maintained in a vacuum by a vacuum pump (not shown).

A flange member mounting hole 2a is formed in an upper portion of the cylindrical wall 2, and a fixed flange member 6 is mounted and fixed in the flange member mounting hole 2a. The inner peripheral surface of the flange member mounting hole 2a and the outer peripheral surface of the fixed flange member 6 hermetically seal the inside and outside of the vacuum sample chamber A with an O-ring. A gun support member mounting hole 6a is formed in the center of the flange member 6 so as to extend vertically and penetrate therethrough. A lower end portion of a substantially cylindrical gun support member 7 is mounted in the gun support member mounting hole 6a, and is supported so as to be rotatable 360 ° around a vertical axis L1. A gun mounting hole 7a is provided inside the gun support member 7.
Are formed. An O-ring 8 is arranged between the outer peripheral surface of the lower end portion of the gun support member 7 and the inner peripheral surface of the gun support member mounting hole 6a. The rotation of the gun support member 7 about a vertical axis L1 The vacuum chamber A is configured so as not to leak vacuum.

A cylindrical ion gun 9 is mounted in a gun mounting hole 7a of the gun support member 7. The O-ring 1 mounted at the axial center of the ion gun 9 is between the inner peripheral surface of the gun mounting hole 7a and the outer peripheral surface of the ion gun 9.
0 seals the inside and outside of the vacuum chamber A airtightly. The gun support member 7 includes the cylindrical ion gun 9.
Is inclined at an angle θ with respect to the vertical axis L1, and the central axis L2 and the vertical axis L1
The ion gun 9 is supported so that an intersection point P of the ion gun 9 is formed. In the first embodiment, the angle θ is a value set to 5 °. An ion beam B is emitted from the lower end of the cylindrical ion gun 9 along the central axis L2.

In FIG. 1A, a tilt table 11 is supported on the left side wall 4 at a position below the ion gun 9 so as to be tiltable. The inclined table 11 includes a right wall portion 12, a left wall portion 13, and a bottom wall portion. The left side wall 13 of the inclined base 11 is connected to a cylindrical inner shaft member 16, and the outer end of the inner shaft member 16 is connected to an outer shaft member 17. The inner shaft member 16 is rotatably supported on the left side wall 4 by a bearing 18. The bearing 18 and the inner shaft member 16 are positioned by an inner ring-shaped plate 19 and an outer ring-shaped plate 21 fixed to the left side wall 4. The outer shaft member 17
Is provided with a gear 17a. The gear 17a is configured to be rotationally driven by a worm 23 mounted on an output shaft of a motor 22.

As described above, the left outer shaft member 1
7, the inner shaft member 16, the inclined base 11, and the like are integrally connected, and are rotatably (inclinably) supported by bearings 18. Therefore, when the left outer shaft member 17 is rotated by the motor 22, the tilt base 11 is tilted about the center line (that is, the tilt axis) T of the bearing 18. The tilt axis T is disposed horizontally and passes through the intersection point P.

A sample stage ST is supported on the upper surface of the bottom wall member 14 of the inclined table 11. The sample stage ST
Has a Y-axis table 31 below it. Said Y
A screw shaft 32 and a guide shaft 33 (see FIGS. 1 and 2) penetrate the shaft table 31 in the right-left direction (Y-axis direction), and a gear G1 is fixed to the left end of the screw shaft 32. . The gear G1 meshes with a gear G2 driven by a motor unit My. When the screw shaft 32 is rotated by the motor unit My via the gears G2 and G1, the Y-axis table 31 moves right and left (Y-axis direction). It is configured to move to.

On the upper surface of the Y-axis table 31, an X-axis table 34 is arranged. A screw shaft 36 and a guide shaft 37 also penetrate the X-axis table 34 in the front-rear direction.
However, the motor unit Mx (see FIG. 2) disposed at the rear end is rotated to move the X-axis table 34 in the front-rear direction (X-axis direction). On the upper surface of the X-axis table 34, a rotating table 38 that rotates around the vertical direction (Z-axis direction) is arranged, and on the upper surface of the rotating table 38, a sample holding member 39 is fixed. . A wire W (wire for ion milling) is disposed so as to vertically intersect the inclination axis T near the intersection P. Both ends of the wire W extend in the front-rear direction (X-axis direction), and are supported by the X-axis table 34 in the first embodiment. The sample holding member 39 holds a sample S, and the surface of the sample S is arranged close to the intersection P. The sample stage ST can be pulled out of the vacuum chamber A together with the left side wall 4 connected to the left side of the cylindrical wall 2 by returning the inside of the vacuum chamber A to atmospheric pressure. .

As shown in FIG. 1A, the angle (X-axis) between the vertical axis L1 and the center axis L2 (ion beam B) of the ion gun 9 as viewed from the direction in which the wire W extends, that is, the front-back direction (X-axis direction). Beam irradiation angle viewed from the direction)
θ1 changes within the range of −θ ≦ θ1 ≦ θ when the ion gun 9 is rotated around the vertical axis L1. Therefore, by rotating the ion gun 9 about the vertical axis L1, the irradiation angle θ1 of the beam viewed from the X-axis direction can be adjusted.

In FIG. 2 and FIG. 3, an internal observation window 2b is formed at a 45 ° front part along the circumferential direction from the flange member mounting 2a formed on the upper part of the cylindrical wall 2. . The inside and outside of the vacuum chamber A of the internal observation window 2b are shut off by a transparent member 41. An observation microscope (not shown) is attached outside the internal observation window 2b. An operating shaft through-hole 2 is formed in an adjacent portion of the cylindrical wall 2 on the lower side along the circumferential direction from the internal observation window 2b.
c is formed. On the outer periphery of the outer end of the working shaft through hole 2c, an operating portion contact recess 2d having a diameter larger than the inner diameter of the working shaft through hole 2c is formed.

A shutter operating shaft 42 is rotatably passed through the operating shaft through hole 2c. The shutter operation shaft 4
2 is an operating shaft operating section 43 on the outer end side and the operating shaft operating section 4
And an inner end side shutter connecting portion 44 having a diameter smaller than the outer diameter of the shutter shaft 3, and penetrates the working shaft through hole 2c. A screw screw hole 44 is provided at the inner end of the shutter connecting portion 44.
a is formed. When the shutter operating shaft 42 penetrates the operating shaft through hole 2c, a ring member for reducing friction is provided between the ring-shaped inner end surface of the operating shaft operating portion 43 and the bottom surface of the operating portion contact recess 2d. 46 are arranged. The ring member 46 is formed of Duracon, but may be formed of another low friction material such as a fluororesin.

An O-ring 47 is disposed between an inner peripheral surface of the operating shaft through hole 2c and an outer peripheral surface of the shutter connecting portion 44 rotatably supported by the operating shaft through hole 2c. The inside and outside of the chamber A are hermetically sealed.
A thin shutter 48 is arranged on the inner surface of the cylindrical wall 2 at the inner end of the shutter connecting portion 44 of the shutter operation shaft 42. In the first embodiment, the thin plate shutter 48 is formed of a thin metal plate (made of beryllium copper) having a substantially rectangular elasticity, and has a thickness of 0.2 to 0.3 mm.

Referring to FIG. 3, one end of the substantially rectangular thin plate shutter 48 is connected to the inner end of the shutter connecting portion 44 by a connecting screw 49 and a washer 51. When the operating shaft 42 is rotated, the thin plate-shaped shutter 48 rotates to rotate between a closed position P1 for closing the inner surface of the internal observation window 2b and an open position P2 for opening the inner surface. ing.
Note that the surface of the thin plate shutter 48 may be thinly coated with a resin.
It is possible to prevent abrasion between the surface of the thin plate shutter 48 and the inner surface of the cylindrical wall 2 caused by the rotation of the shutter. The shutter devices (42 to 51) for the cylindrical wall according to the first embodiment are constituted by the elements indicated by the reference numerals 42 to 51.

(Operation of Embodiment 1) In FIGS.
Pull out the sample stage ST and extract the sample stage ST
The sample S is mounted on the sample holding member 39. Next, FIG.
A, the thin plate shutter 48 is in the open position P
When the shutter operating shaft 42 is rotated to the open position P2, the operating shaft operating unit 43 provided on the outer end side of the shutter operating shaft 42 is rotated.
When the thin plate shutter 48 connected to the inner end of the
Rotate to. At this time, the thin shutter 48 is deformed according to the shape of the inner surface of the cylindrical wall 2 and closes the inner surface of the internal observation window 2b. While swinging the tilt table 11 about the tilt axis T, the ion beam B
Is vertically irradiated on the surface of the sample S, and the surface of the sample S other than the shadowed portion of the wire W is scraped off. Even if the repelled particles fly to the internal observation window 2b, since the inner surface of the transparent member 41 of the internal observation window 2b is closed by the thin plate shutter 48, the transparent member 4
The particles do not adhere to the inner surface of 1 and the transparency is not impaired.

When it is desired to check how much the milling has progressed during the ion milling, the ion beam B
Irradiation and the swing of the inclined table 11 are temporarily stopped. Then, the shutter operating shaft 42 is rotated to rotate the thin plate shutter 48 to the open position P2. At the open position P2, the thin plate shutter 48 opens the inner side surface of the internal observation window 2b, so that the inside of the cylindrical wall 2 can be observed from the outside through the transparent member 41 of the internal observation window 2b. In this state, the milling situation is observed with an observation microscope (not shown) attached outside the internal observation window 2b. After the observation, the thin plate shutter 48 is rotated to the closing position P1, and ion milling is resumed.

Since the thin plate shutter 48 is made of an elastic thin plate which is deformed according to the shape of the inner surface of the cylindrical wall 2, the thin plate shutter 48 is moved to the closed position P.
At 1 or the open position P2, the cylindrical wall 2 does not move inward from the inner surface. For this reason, when the inclined table 11 swings, even if the inclined table 11 approaches the inner surface of the cylindrical wall 2, the inclined table 11 does not contact the thin plate shutter 48. Accordingly, the space required for opening and closing the thin plate shutter 48 is small, and the vacuum chamber A of the first embodiment can be made smaller than the conventional vacuum chamber.

(Embodiment 2) FIG. 4 is an explanatory view of a shutter device for a cylindrical wall according to Embodiment 2 of the present invention. In the description of the second embodiment, components corresponding to the components of the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted. The second embodiment differs from the first embodiment in the following points, but has the same configuration as the first embodiment in other points. In the second embodiment, the shutter operating shaft 42 'has an operating shaft operating portion 43' and a shutter connecting portion 44 'which are separately configured. The outer end of the shutter connecting portion 44 'is connected to a connecting hole 4 formed in the operating shaft operating portion 43'.
3a 'and fitted with a fixing screw 52.

The thin plate shutter 48 has a hole into which a protrusion formed at the inner end of the shutter connecting portion 44 'is fitted, and the hole of the thin plate shutter 48 and the protrusion are formed. Are connected by welding in a fitted state. Further, it is also possible to press-fit the convex portion into the thin-plate shutter 48 and connect it. It is possible to make the shape of the hole of the thin plate shutter 48 and the projection of the shutter connecting portion 44 'D-shaped so that it cannot rotate when fitted. Also, from the elements indicated by the reference numerals 42 'to 52, the shutter device (4
2 'to 52).

In the second embodiment, similarly to the first embodiment, when the thin plate shutter 48 is rotated to the closed position P1 or the open position P2, the shutter 48 is deformed according to the shape of the inner surface of the cylindrical wall 2, and the cylindrical shutter 2 is deformed. The inner surface of the wall 2 does not move inward. Therefore, the space required for opening and closing the thin plate shutter 48 is small, and the vacuum chamber A of the second embodiment can be made smaller than the conventional vacuum chamber. Further, in the second embodiment, since the thin plate-shaped shutter 48 and the shutter operating shaft 42 'are not connected by a screw as in the first embodiment, the head of the screw is positioned from the inner surface of the cylindrical wall 2 It does not protrude inward, saving more space.

Although the embodiments of the present invention have been described in detail, the present invention is not limited to the above-described embodiments, and various modifications may be made within the scope of the present invention described in the appended claims. It is possible to make changes. (H01) The thin plate shutter 48 of each of the above embodiments can be formed of a phosphor bronze plate. (H02) The case where the thin plate shutter 48 of each of the above embodiments is made of an elastic metal plate has been exemplified, but the thin plate shutter 48 is elastically deformed according to the shape of the inner surface of the cylindrical wall 2. It is also possible to form with a resin thin plate having (H03) In each of the above embodiments, the case where the cylindrical wall shutter device is provided in the ion milling device is illustrated, but the cylindrical wall shutter device can be installed in a device having a cylindrical wall other than the ion milling device. .

[0030]

The above-described shutter device for a cylindrical wall according to the present invention has the following effects. (E01) The space for installing a shutter for opening and closing the internal observation window provided on the cylindrical wall inside or the space required for opening and closing the shutter can be reduced.

[Brief description of the drawings]

FIG. 1 is an explanatory view of an ion milling device provided with a shutter device for a cylindrical wall according to a first embodiment of the present invention. FIG. 1A is a longitudinal sectional view of the ion milling device, and FIG.
FIG. 2A is a diagram viewed from line IB-IB of FIG.

FIG. 2 is a sectional view taken along line II-II of FIG.

FIG. 3 is an explanatory view of a shutter device for a cylindrical wall according to the first embodiment of the present invention. FIG. 3A is a cross-sectional view perpendicular to the axis of a main part of the cylindrical wall, and FIG. FIG.

FIG. 4 is an explanatory view of a shutter device for a cylindrical wall according to a second embodiment of the present invention.

5 is an explanatory view of a conventional rotary type shutter device for a cylindrical wall. FIG. 5A is a cross-sectional view perpendicular to an axis of a main part of the cylindrical wall, and FIG. 5B is viewed from an arrow VB in FIG. 5A. FIG.

[Explanation of symbols]

P1 ... Closed position, P2 ... Open position, 2 ... Cylindrical wall, 2b ... Internal observation window, 41 ... Transparent member, 42; 42 '... Shutter operation shaft, 43; 43' ... Operation shaft operation unit, 44; …
Shutter connection part, 48 ... Thin plate shutter.

Claims (1)

[Claims] 1. A shutter device for a cylindrical wall, which has the following requirements (A01) to (A03): (A01) A transparent device provided on the cylindrical wall so that the inside can be observed from the outside of the cylindrical wall. An internal observation window having a member, (A02) a shutter operating shaft disposed to penetrate in and out of a cylindrical wall portion adjacent to the internal observation window, wherein a shutter connecting portion is provided at an inner end portion; The shutter operation shaft provided with an operation shaft operation unit for rotating the shutter operation shaft at an end,
(A03) An elastic thin plate connected to the shutter connecting portion and deforming according to the shape of the inner surface of the cylindrical wall, and the inner surface of the internal observation window is rotated with the rotation of the shutter operating shaft. A thin plate shutter rotatable between a closed position to close and an open position to open.