JPH11126817A - Stage for high vacuum - Google Patents

Abstract

PROBLEM TO BE SOLVED: To adjust the position of the sample holding section of a stage for high vacuum by moving the section, without providing any mechanism for driving the stage for high vacuum in a high vacuum chamber in which the sample supporting section is provided. SOLUTION: A stage for high vacuum is provided with a connecting arm 4, which is extended in an x-axis direction perpendicular to a partition wall 2 dividing a high vacuum chamber A1 and a low vacuum chamber A2 from each other through an arm through-hole 3 formed through the wall 2, an X-Y table 8 which supports the part of the arm 4 staying in the low vacuum chamber A2, a panel 14 for forming an orifice which is arranged adjacent along the wall 2 at an interval Sp from the wall 2 to form an orifice as an air flow passage, and a pipe member 13, which covers the outer peripheral surface of the arm 4 with an interval Sa from the outer peripheral surface to form an orifice as an air flow passage.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high vacuum stage used in a vacuum sample chamber for performing observation, drawing, inspection and the like using a charged particle beam such as an electron beam. INDUSTRIAL APPLICABILITY The present invention can be used for a high vacuum stage that moves in both XY directions or one of X and Y directions.

[0002]

2. Description of the Related Art In a high vacuum stage of the type described above,
Conventionally, a high vacuum stage having an XY table has been known. In a conventional high vacuum stage having an XY table, a portion for supporting a sample and a portion for driving the XY table are arranged in the same high vacuum chamber.

[0003]

In the stage for high vacuum, there is a demand for "improving the vacuum of a portion where a sample is to be placed" and "reducing the amount of dust". Recently, construction for realizing the demand has increased. Is coming. The functions that require a stage have good accuracy and good reproducibility.To achieve this, processing accuracy and assembly accuracy are required, and this is the most important item of the stage. .

On the other hand, to improve the vacuum, it is fundamental to "reduce the amount of released gas". The most common method is “bake”. However, “baking” for the stage causes “distortion” inherent in the components of the stage to “extract” and causes “deterioration of accuracy” of the stage. In addition, the stage has a moving mechanism, it has to be a complicated structure,
"Structure in which gas is difficult to emit, that is, structure in which gas is released for a long period of time" and "Structure in which dust easily occurs" are incompatible with high vacuum. In the conventional stage, the sample is directly placed on the driving part of the XY table, and the entire XY stage including the sample needs to be put in a high vacuum chamber. Then the vacuum will not be improved "and" garbage will come out ".

[0005] In view of the above circumstances, the present invention has the following content (O01). (O01) The position of the sample support portion can be moved and adjusted in a high vacuum chamber in which the sample support portion of the high vacuum stage is disposed without disposing a drive mechanism for the stage for high vacuum.

[0006]

Next, the present invention devised to solve the above-mentioned problems will be described. The elements of the present invention are used to facilitate correspondence with the elements of the embodiments described later. , The reference numerals of the elements of the embodiment are enclosed in parentheses. The reason why the present invention is described in correspondence with the reference numerals of the embodiments described below is to facilitate understanding of the present invention and not to limit the scope of the present invention to the embodiments.

(1st invention) In order to solve the aforementioned problem,
The stage for high vacuum of the first invention of the present application has the following requirements: (A01) a partition wall (2) for partitioning between a high vacuum chamber (A1) and a low vacuum chamber (A2); A connecting arm (4) that penetrates the formed arm through hole (3) and extends in the X-axis direction that is perpendicular to the partition wall (2);
(A02) The low vacuum chamber (A2) of the connecting arm (4)
The XY table (8) that supports the portion disposed in the X-axis direction and is movable in the X-axis direction and the Y-axis direction perpendicular to the X-axis direction. (A03) The high vacuum chamber (A) of the partition wall (2).
The orifice of the air flow passage is formed by a gap (Sp) formed adjacent to the wall surface along one wall surface on the 1) side or the low vacuum chamber (A2) side and formed with the partition wall (2). And an orifice forming panel (14) having a connecting arm through hole (14a) which is movably disposed along the partition wall (2) and through which the connecting arm (4) passes. The connecting arm (4) has a cylindrical inner surface that covers the outside of the outer peripheral surface and forms an orifice of an air flow passage by a gap (Sa) formed between the connecting arm (4) and the outer peripheral surface. An orifice forming cylinder member (13) having a cylindrical outer surface airtightly connected to the orifice forming panel (14) through an arm through hole (3) of the partition wall (2), (A05) the arm Y-axis direction of through hole (3) The have a size smaller Y-axis than the dimension, the arm through hole (3) movable in the Y-axis direction in a state passing through a said orifice forming tubular member (13).

(Operation of the First Invention) In the high vacuum stage of the first invention of the present application having the above-mentioned features, the high vacuum chamber (A
1) and a connecting arm (4) extending in the X-axis direction which is a direction perpendicular to the partition wall (2) that partitions between the low vacuum chamber (A2) and
It penetrates through an arm through hole (3) formed in the partition wall (2). The XY table (8) movable in the Y-axis direction along the X-axis direction and the partition wall (2) perpendicular to the X-axis direction is provided in the low vacuum chamber (A) of the connection arm (4).
2) Support the part arranged. The orifice forming panel (14) disposed adjacent to the partition wall (2) along one of the high vacuum chamber (A1) side and the low vacuum chamber (A2) side of the partition wall (2) includes the partition wall. An orifice of the air flow passage is formed by the gap (Sp) formed between the air flow passage (2). The connecting arm (4) passes through the connecting arm through hole (14a) of the orifice forming panel (14). Further, a cylindrical inner surface of the orifice forming cylindrical member (13) covers an outer peripheral surface of the connecting arm (4) and a gap (Sa) formed between the outer peripheral surface and the connecting arm (4). This forms an orifice in the air flow passage.

The cylindrical outer surface of the orifice forming tubular member (13) airtightly connected to the orifice forming panel (14) passes through the arm through hole (3) of the partition wall (2). Since the dimension of the orifice forming tubular member (13) in the Y-axis direction is smaller than the dimension of the arm through hole (3) in the Y-axis direction, the orifice forming tubular member (13) is formed of the partition wall (2). Can be moved in the Y-axis direction while passing through the arm through hole (3). The orifice forming panel (14) airtightly connected to the orifice forming tubular member (13) is attached to the partition wall (2) when the orifice forming tubular member (13) moves in the Y-axis direction. Along the Y-axis.

As described above, the orifice forming tubular member (1)
Since the dimension in the Y-axis direction of 3) is smaller than the dimension of the arm through-hole (3) in the Y-axis direction, a space is provided between the orifice forming tubular member (13) and the arm through-hole (3). There is. Assuming that this space is (Sc), the gas communication passage between the high vacuum chamber (A1) and the low vacuum chamber (A2) has the following two systems. The orifice forming tubular member (1)
The gap (Sa) formed between the inner cylindrical surface of (3) and the outer peripheral surface of the connecting arm (4) is referred to as an “orifice between cylinder and arm (Sa)”, and the partition wall (2) and the orifice (Sa). A gap (S) formed with the orifice forming panel (14)
p) is referred to as “wall / panel orifice (Sp)”. (1) First gas communication passage High vacuum chamber (A1) ... orifice between cylinder and arm (Sa) ...
... Low vacuum chamber (A2) (2) Second gas communication passage (2-1) When orifice forming panel (14) is provided in high vacuum chamber (A1): High vacuum chamber (A1) ... Orifice between panels (Sp) ...
... Space between cylinder and through hole (Sc) ... Low vacuum chamber (A2) (2-2) When orifice forming panel (14) is provided in low vacuum chamber (A2): Low vacuum chamber (A2) …… Orifice between wall and panel (Sp)…
… Space between cylinder and through hole (Sc) …… High vacuum chamber (A1)

Since the first and second gas communication paths each have orifices (Sa) and (Sp), the flow of gas is prevented, and the vacuum difference between the high vacuum chambers (A1) and (A2) is reduced. Is held. When the XY table (8) moves in the Y-axis direction, the connection arm (4) moves in the Y-axis direction with the movement of the XY table (8), and the connection arm (4) penetrates the connection arm. Through hole (14a)
The orifice forming panel (14) and the orifice forming cylindrical member (13) covering the outer periphery of the connecting arm (4) also move in the Y-axis direction. At this time, since the distance between the orifice (Sa) between the cylinder and the arm and the orifice (Sp) between the wall and the panel does not change, gas flow is prevented, and the vacuum difference between the high vacuum chambers (A1) and (A2) is reduced. Is held.

When the XY table (8) moves in the X-axis direction, the connecting arm (4) moves in the X-axis direction. At this time, the connecting arm (4) moves in the axial direction of the orifice forming tubular member (13). At this time, the distance between the orifice (Sa) between the cylinder and the arm and the orifice (Sp) between the wall and the panel is adjusted. Does not change, the gas flow does not change, and the vacuum difference between the high vacuum chambers (A1) and (A2) is maintained.

(Second Invention) In order to solve the above problems, a high vacuum stage according to a second invention of the present application has the following requirements. (B01) A high vacuum chamber ( A
1) and a connecting arm that extends through an arm through hole (3) formed in a partition wall (2) that partitions between the low vacuum chamber (A2) and the X-axis direction perpendicular to the partition wall (2). (4), (B02) an X-axis table (10) that supports a portion of the connecting arm (4) arranged in the low vacuum chamber (A2) and is movable in the X-axis direction (B03). High vacuum chamber (A1) side of wall (2) or low vacuum chamber (A
2) An orifice of an air flow passage is formed by a gap (Sp) formed along the one wall surface on the side adjacent to the wall surface and formed between the partition wall and the connecting arm. 4) penetrates through the connecting arm through hole (14).
a) orifice forming panel (14) having (a)
4) A gap (S) that covers the outer periphery of the connection arm (4) and is formed between the connection arm and the outer periphery of the connection arm (4).
The orifice forming panel (14) having a cylindrical inner surface forming an orifice of an air flow passage according to (a) and passing through an arm through hole (3) of the partition wall (2).
A tubular member (13) for forming an orifice having a tubular outer surface air-tightly connected to the orifice.

(Operation of the Second Invention) In the high vacuum stage according to the second invention of the present application having the above features, an X-axis table (10) is used instead of the XY table (8) of the first invention. The XY table (8) of the first invention.
Has the same effect as in the case of moving in the X-axis direction.

(Third invention) In order to solve the above problems, a high vacuum stage according to a third invention of the present application has the following requirements. (C01) A high vacuum chamber ( A
1) and a connecting arm that extends through an arm through hole (3) formed in a partition wall (2) that partitions between the low vacuum chamber (A2) and the X-axis direction perpendicular to the partition wall (2). (4), (C02) A Y-axis table that supports a portion of the connecting arm (4) disposed in the low vacuum chamber (A2) and is movable in the Y-axis direction along the partition wall (2). 9), (C03) High vacuum chamber (A1) of the partition wall (2)
An orifice of the air flow passage is formed by a gap (Sp) formed adjacent to the wall surface along one wall surface on the side of the low vacuum chamber (A2) and the partition wall (2). And an orifice forming panel (14) having a connecting arm through hole (14a) through which the connecting arm (4) penetrates, (C04) covering the outside of the outer peripheral surface of the connecting arm (4); A) a cylindrical inner surface defining an orifice of an air flow passage by a gap (Sa) formed between the orifice and the outer peripheral surface, and passing through an arm through hole (3) of the partition wall (2); An orifice forming cylindrical member (13) having a cylindrical outer surface hermetically connected to a forming panel (14), and (C05) a Y-axis direction smaller than the Y-axis dimension of the arm through hole (3). Having dimensions, said arc Through holes (3) movable in the Y-axis direction in a state passing through a said orifice forming tubular member (13).

(Operation of the Third Invention) In the high vacuum stage of the third invention of the present application having the above features, a Y-axis table (9) is used instead of the XY table (8) of the first invention. Therefore, the same operation as when the XY table (8) of the first invention moves in the Y-axis direction is achieved.

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION

EXAMPLES Next, specific examples (embodiments) of embodiments of the high vacuum stage of the present invention will be described with reference to the drawings, but the present invention is not limited to the following examples.
In order to facilitate understanding of the following description, orthogonal coordinate axes X axis, Y axis, and Z axis are defined in the drawings, the X axis direction is the front-back direction, the Y axis direction is the left-right direction, and the Z axis direction is the up-down direction. I will say that. Further, the arrow X direction or X side is forward or front side, the arrow -X direction or -X side is rear or rear side, the arrow Y direction or Y side is left or left side, and the arrow -Y
The direction or -Y side is defined as right or right, the arrow Z direction or Z side is defined as upper or upper side, and the arrow -Z direction or -Z side is defined as lower or lower side. Furthermore, in the figure, those with “•” in “「 ”mean the arrow pointing from the back of the paper to the front, and those with“ x ”in“ ○ ”from the table on the paper It shall mean an arrow pointing to the back.

(Embodiment 1) FIG. 1 is an explanatory view of Embodiment 1 of a high vacuum stage of the present invention. FIG. 1A is an overall perspective view.
FIG. 1B is a diagram showing a mounting state of the sample holder on the sample table, and is a cross-sectional view taken along the line IB-IB in FIG. 1A. In FIG. 1, a chamber A accommodating a stage S for high vacuum.
Is composed of an outer wall 1, a partition wall 2 and the like, and is divided into a high vacuum chamber A1 and a low vacuum chamber A2 by the partition wall 2. An opening 1a for sample exchange is provided on the outer wall 1 of the high vacuum chamber A1. The high vacuum chamber A1 is configured to exchange a sample with a sample exchange chamber (not shown) connected through the sample exchange opening 1a. The sample exchange opening 1a is configured to be opened and closed by a gate valve (not shown).

The partition wall 2 is provided with an arm through hole 3 penetrating the partition wall 2 in the X-axis direction. The arm through hole 3 is a rectangular hole having an inner surface 3y extending in the Y-axis direction and an inner surface 3z extending in the Z-axis direction. The front end 4a of the connecting arm 4 passing through the arm through hole 3 is disposed in the high vacuum chamber A1, and the rear end 4b is connected to the low vacuum chamber A2.
Is located within. A sample table 6 is supported on the arm front end 4a, and a holder mounting projection 7 is formed on the upper surface of the sample table 6. The holder mounting protrusion 7 is a member for mounting the sample holder H (see FIG. 1B) conveyed through the sample replacement opening 1a on the sample table 6. As a configuration for mounting the sample holder H on the sample table 6, various conventionally known configurations can be adopted.

An XY table 8 is arranged in the low vacuum chamber A2. The XY table 8 has a Y-axis table 9 movable in the Y-axis direction (a direction along the partition wall 2) and an X-axis movable on the Y-axis table 9 in the X-axis direction (a direction perpendicular to the partition wall 2). It has a table 10. A drive device for the Y-axis table 9 and the X-axis table 10 of the XY table 8 is not shown, but is conventionally known. Further, as the XY table 8, a commercially available product can be used. The rear end 4b of the connection arm 4 is connected to the upper surface of the X-axis table 10 of the XY table 8.

A bracket 11 is mounted on a front side surface of the Y-axis table 9. The bracket 11 has a tubular member (orifice forming tubular member) 1 of an orifice forming member 12.
3 is attached to the rear end (the end on the -X side). A panel (orifice forming panel) 14 having a connecting arm through hole 14a is integrally connected to the front end of the cylindrical member 13. The orifice forming member 12 is constituted by the cylindrical member 13 and the panel 14. The cylindrical member 13 is arranged so as to cover the outside of the connecting arm 4, and a very narrow gap (orifice between the tube and the arm) Sa is formed between the inner surface of the cylindrical member 13 and the outer surface of the connecting arm 4. Have been. Also, a very narrow gap (wall / panel orifice) S between the partition wall 2 and the panel 14
p is formed. A relatively large space (space between the cylinder and the through hole) Sc is formed between the inner surfaces 3y and 3z of the arm through holes 3 of the partition wall 2 and the outer surface of the cylindrical member 13.

In the first embodiment having the above structure, the gas communication passage between the high vacuum chamber A1 and the low vacuum chamber A2 partitioned by the partition wall 2 is of the following two systems. (1) First gas communication passage High vacuum chamber A1 ... orifice Sa between cylinder and arm ... Low vacuum chamber A2 (2) Second gas communication passage High vacuum chamber A1 ... Orifice Sp between wall and panel Sp ... cylinder Space between through-holes ... Low vacuum chamber A2

(Operation of the First Embodiment) In the first embodiment, the gas communication passages of the high vacuum chamber A1 and the low vacuum chamber A2 are only two systems, and the gas passes through each of the two systems. In order to move from the chamber A2 to the high vacuum chamber A1, it is necessary to pass through either the wall / panel orifice Sp or the cylinder / arm orifice Sa. Therefore, the orifice Sp between the wall and the panel and the orifice Sa between the cylinder and the arm are made very narrow, and the area of the orifice Sp between the wall and the panel is made appropriately large and the X-axis of the orifice Sa between the cylinder and the arm. By appropriately increasing the length in the direction, the high vacuum chamber A1 can be maintained at a higher vacuum than the low vacuum chamber A2.

When the Y-axis table 9 is moved in the Y-axis direction, the orifice forming member 12 having the cylindrical member 13 and the panel 14 moves integrally with the Y-axis table.
At this time, since the cylinder member 13 and the communication arm 4 move integrally in the Y-axis direction, the gap between the cylinder-arm orifice Sa does not change. In addition, since the panel 14 moves along the partition wall 2, the gap between the wall and panel orifice Sp does not change. Therefore, even if the Y-axis table 9 moves, both the first and second gas communication passages prevent free communication of gas by the orifices Sa and Sp.

When the X-axis table 10 is moved in the X-axis direction (front-back direction), the orifice forming member 12 does not move. In this case, the orifice Sp between the wall and the panel
Does not change. Further, the movement of the X-axis table 10 causes the connecting arm 4 to move the inside of the cylindrical member 13 X
Although it moves in the axial direction, the gap between the orifice Sa between the cylinder and the arm does not change at this time. Therefore, even when the X-axis table 10 moves, the first and second gas communication passages are prevented from freely communicating with each other by the orifices Sa and Sp. Therefore, a vacuum difference can be maintained between the high vacuum chamber A1 and the low vacuum chamber A2. In addition, since the baking can be clearly divided into a "high vacuum chamber" and a "low vacuum chamber" not baking, it is possible to prevent the deterioration of the movement accuracy of the XY table 8 due to the baking. In addition, since the “high vacuum chamber” contains only the “sample portion”, it is possible to create an environment “without polluting the sample” that emits little gas and has no source of dust.

(Embodiment 2) FIG. 2 is an explanatory view of Embodiment 2 of the high vacuum stage of the present invention.
FIG. In the description of the second embodiment, components corresponding to the components of the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted. In the second embodiment, the orifice forming member 12 is
3 and a panel 14 and a panel 16 connected to the tubular member 13. The panel 16 forms a slight gap Sq between the partition wall 2 and the wall surface on the low vacuum chamber A2 side. The gap Sq is a gap required for the panel 16 to move along the partition wall 2, and is not a gap for forming the orifice of the gas passage.

In the second embodiment, the bracket 11 of the first embodiment for supporting the cylindrical member 13 is omitted, and the position of the cylindrical member 13 in the Y-axis direction and the Z-axis direction is determined by the outer surface of the connecting arm 4. (Y side and Z side). The position of the cylindrical member 13 in the X-axis direction is
It is determined by the panels 14 and 16 arranged on both front and rear sides (both sides in the X-axis direction) of the connection partition wall 2. Therefore, the orifice forming member 12 of the second embodiment is
It is supported by the cylindrical member 13 and the partition wall 2.

In the second embodiment, the panels 14, 16
A bearing (see FIG. 3) B is mounted on a surface facing the partition wall 2 so as to be able to move smoothly when moving along the partition wall 2, and the orifice between the wall and the panel is provided. It is configured so that the gap of Sp can be appropriately held. FIG. 3 is an explanatory view of a bearing for properly maintaining the gap between the orifice Sp between the wall and the panel and the orifice Sa between the cylinder and the arm according to the second embodiment. In FIG. 3, a hole Pa is formed in the cylindrical member 13 and the panels 14 and 16 corresponding to the mounting portion of the bearing B, and a bearing support case C is fixed corresponding to the hole Pa. The shaft C is mounted on the bearing support case C.
a is fixed, and a spherical bearing B is rotatably supported on the shaft Ca. The shaft Ca extends in a direction perpendicular to the direction in which the bearing B rotates. The cylindrical member 13 or the panel 1 is formed by the spherical bearing B.
The members 4 and 16 can move smoothly with the distance between the connecting arm 4 and the partition wall 2 kept constant.

In the second embodiment having the above-described configuration, similarly to the first embodiment, the gas communication passage between the high vacuum chamber A1 and the low vacuum chamber A2 partitioned by the partition wall 2 has the following two systems. It is. (1) First gas communication passage High vacuum chamber A1 ... orifice Sa between cylinder and arm ... Low vacuum chamber A2 (2) Second gas communication passage High vacuum chamber A1 ... Orifice Sp between wall and panel Sp ... cylinder Space between through-holes ... Low vacuum chamber A2

(Operation of the Second Embodiment) In the second embodiment of the high vacuum stage having the above configuration, when the Y-axis table 9 moves, the panels 14 and 16 are guided by the partition wall 2 while the Y-axis table 9 is moved. Move with. At this time, the gap between the cylinder and arm orifice Sa does not change, and the gap between the wall and panel orifice Sp does not change.
When the X-axis table 10 moves, the connecting arm 4 moves inside the cylindrical member 3 in the X-axis direction. At this time, the orifice Sp between the wall and the panel does not change,
Further, the gap between the orifice Sa between the cylinder and the arm does not change. Therefore, in the second embodiment, the first and second gas communication passages have the same orifices Sa and Sp even if the XY table 8 moves, in the same manner as the first embodiment.
This prevents free communication of gas. Therefore, the high vacuum stage of the second embodiment can maintain a vacuum difference between the high vacuum chamber A1 and the low vacuum chamber A2, and thus has the same operation as the first embodiment.

(Modifications) Although the embodiments of the present invention have been described in detail, the present invention is not limited to the above-described embodiments, but falls within the scope of the present invention described in the appended claims. Thus, various changes can be made. Modified embodiments of the present invention will be exemplified below.

(H01) In the first and second embodiments, the high vacuum stage that moves in the XY plane has been described. However, the high vacuum stage that moves only in the X-axis direction, only the Y-axis direction, or only the Z-axis direction can be used. It is possible to apply the invention. (H02) In the first and second embodiments, the cylindrical member 3 is connected to the low vacuum chamber A
Instead of being provided on the second side, it can be provided on the high vacuum chamber A1 side. Further, the cylindrical member 3 can be provided in both the low vacuum chamber A2 and the high vacuum chamber A1. (H03) In Embodiments 1 and 2, the cross-sectional shape of the connecting arm 4 can be circular instead of rectangular.

[0033]

The high vacuum stage according to the present invention has the following advantages. (E01) The position of the sample support portion can be moved and adjusted in a high vacuum chamber in which the sample support portion of the high vacuum stage is disposed without disposing a drive mechanism for the high vacuum stage.

[Brief description of the drawings]

FIG. 1 is a first embodiment of a high vacuum stage according to the present invention.
FIG. 1A is an overall perspective view, and FIG. 1B is a view showing a mounting state of a sample holder on a sample table.
3 is a sectional view taken along line IB-IB of FIG.

FIG. 2 is a second embodiment of the high vacuum stage of the present invention.
FIG. 3 is a diagram corresponding to FIG. 1A of the first embodiment.

FIG. 3 shows an orifice S between a wall and a panel according to a second embodiment.
FIG. 5 is an explanatory view of a bearing for appropriately holding the gap between the p and the orifice Sa between the cylinder and the arm.

[Explanation of symbols]

A1: high vacuum chamber, A2: low vacuum chamber, Sa: orifice between cylinder arms, Sc: space (space between cylinder and through hole, Sp: gap (orifice between wall and panel), 2: partition wall, 3 ... arm Through-hole, 4 ... connecting arm, 8 ... XY table, 9 ... Y-axis table, 10 ... X-axis table, 13 ... Orifice forming cylinder member, 14 ... Orifice forming panel, 14a ... Connecting arm through hole,

Claims (3)

[Claims] 1. A high vacuum stage characterized by the following requirements: (A01) The partition wall penetrating through an arm through hole formed in a partition wall separating a high vacuum chamber and a low vacuum chamber. (A02) a connecting arm extending in the X-axis direction which is a direction perpendicular to the X-axis direction, and supporting a portion of the connecting arm disposed in the low vacuum chamber, in the X-axis direction and in the Y-axis direction perpendicular to the X-axis direction. Movable XY table, (A
03) The orifice of the air flow passage is formed by a gap formed between the partition wall and one of the low vacuum chamber side or the high vacuum chamber side and adjacent to the wall surface and formed between the partition wall and the partition wall. And an orifice forming panel movably disposed along the partition wall and having a connecting arm through hole through which the connecting arm passes. (A04) The outer surface of the connecting arm outer peripheral surface and the connecting arm outer periphery. An orifice formed having a cylindrical inner surface forming an orifice of an air flow passage by a gap formed between the orifice and an orifice of the partition wall, and being hermetically connected to the orifice forming panel through an arm through hole of the partition wall. A cylindrical member for use, (A05) having a dimension in the Y-axis direction smaller than the dimension of the arm through-hole in the Y-axis direction, and being movable in the Y-axis direction while passing through the arm through-hole. Orifice forming tubular member. 2. A high vacuum stage characterized by the following requirements: (B01) the partition wall penetrating through an arm through hole formed in a partition wall separating a high vacuum chamber and a low vacuum chamber. (B02) a connecting arm extending in the X-axis direction, which is a direction perpendicular to the X-axis direction, and (B02) supporting a portion of the connecting arm disposed in the low vacuum chamber and movable in the X-axis direction.
A shaft table, (B03) an air flow passage formed by a gap formed between the partition wall and one of the low vacuum chamber side and the high vacuum chamber side and adjacent to the wall face and formed between the wall and the partition wall; (B04) an orifice forming panel having a connecting arm through hole through which the connecting arm penetrates, and (B04) covering the outside of the connecting arm outer peripheral surface and being formed between the connecting arm outer peripheral surface and the connecting arm outer peripheral surface. An orifice forming cylinder having a cylindrical inner surface forming an orifice of an air flow passage by a gap, and having a cylindrical outer surface that is airtightly connected to the orifice forming panel through an arm through hole of the partition wall; Element. 3. A high vacuum stage characterized by the following requirements: (C01) said partition wall penetrating through an arm through hole formed in a partition wall separating a high vacuum chamber and a low vacuum chamber. (C02) a Y-axis table that supports a portion of the connection arm disposed in the low vacuum chamber and is movable in the Y-axis direction along the partition wall. (C03) The orifice of the air flow passage is formed along the one wall surface of the partition wall on the high vacuum chamber side or the low vacuum chamber side adjacent to the wall surface and formed by the gap formed between the partition wall and the partition wall. An orifice forming panel formed with a connecting arm through hole through which the connecting arm penetrates; (C04) a gap formed between the connecting arm outer peripheral surface and the outside of the connecting arm outer peripheral surface; Distribution Of which has a cylindrical inner surface that forms an orifice, the partition wall of the arm through hole through to the orifice forming tubular member having a connected tubular outer surface airtightly to said orifice forming panel, (C0
5) Y smaller than the dimension of the arm through hole in the Y-axis direction
The orifice forming cylinder member having an axial dimension and movable in the Y-axis direction while passing through the arm through hole.