JP2000005682A5

JP2000005682A5 -

Info

Publication number: JP2000005682A5
Application number: JP1998171803A
Authority: JP
Filing date: 1998-06-18
Publication date: 2005-10-20
Anticipated expiration: 2018-06-18

Claims

In order to flow the coating fluid at a predetermined thickness onto a coating effective surface of a flat substrate to be coated, the coating fluid is supplied from a coating head having a slit-shaped opening at a predetermined timing at the start of coating and coating is performed. A slit coat type coating apparatus comprising: a supply unit that stops the supply at a predetermined timing at the end; and a relative movement unit that moves the substrate relative to the coating head;
  In the middle of the flow path of the supply means, an observation means for observing the supply state of the application fluid visually or numerically by detecting a pressure change in the vicinity of the application head and performing piezoelectric conversion,
  Arranged in the middle of the flow path, and is predeterminedly driven at each predetermined timing from the start of application to the end of application, and by adjusting a parameter for supplying the application fluid according to the observation result, A coating liquid supply control means for adjusting the observation result to an appropriate waveform;
  A slit coat type coating apparatus that facilitates coating film adjustment work in a coating region from the start of supply of the coating liquid to the stop of supply.

In order to flow the coating fluid at a predetermined thickness onto the coating effective surface of the flat substrate to be coated, the coating fluid is supplied from a coating head having a slit-shaped opening at a predetermined timing when coating is started. A slit coat type coating apparatus comprising: a supply unit that stops the supply at a predetermined timing at the end; and a relative movement unit that moves the substrate relative to the coating head;
In the middle of the flow path of the supply means, the pressure change in the vicinity of the coating head is detected and subjected to piezoelectric conversion, so that the supply start state at the start of coating and the supply stop state at the end of coating are visually or numerically observed. Observation means to
It is disposed in the middle of the flow path, is driven at a predetermined timing at the start of coating and at the end of coating, and adjusts a plurality of parameters for supplying a coating fluid according to the observation result. Supply control means for adjusting the observation result to a substantially trapezoidal rise and fall waveform,
A slit coat type coating apparatus characterized in that an unstable operation in the supply start state and the supply stop state is narrowed to make adjustment work for widening the effective coating surface of the substrate reliable and easy.

The application fluid is a low-viscosity application fluid that can be supplied to the application head by a supply pressure applied to a supply unit,
A suck back valve having a plug connected to the supply pipe of the coating head and driven by a predetermined stroke to temporarily increase the volume in the supply pipe;
An on-off valve connected between the suck-back valve and the supply unit and opening and closing the flow path by a plug driven by a predetermined stroke;
A flow path is opened to the atmosphere by a plug that is branched and connected from the flow path between the on-off valve and the suck back valve and is driven by a predetermined stroke to release the residual pressure in the flow path. A residual pressure release valve;
An adjustment unit that is provided in at least one of the valves, adjusts a predetermined stroke of the plug, and adjusts an opening / closing timing according to the relative movement speed;
Slit coating type coating apparatus according to claim 1 or 2, characterized in that adjusting the plurality of parameters.

The application fluid is a high-viscosity application fluid supplied to the application head by a forced pump connected to a supply unit,
The forced pump connected to the supply pipe of the coating head;
3. The motor driving unit that automatically adjusts the observation result to a substantially trapezoidal rise and fall waveform by driving the forced pump in a forward and reverse rotation direction at a predetermined timing, according to claim 1 or 2 . The slit coat type coating apparatus as described.

A speed adjusting means for adjusting the degree of acceleration and deceleration of the relative movement of the coating head with respect to the substrate at the start and end of coating;
Slit coating type coating apparatus according to claim 1 or 2, characterized in that it allows adjusting the plurality of parameters.

The said supply control means adjusts the several parameter for supply of a coating fluid automatically according to the said observation result in order to adjust the said adjustment part or the said motor drive part automatically. The slit coat type coating apparatus according to any one of 5 .

In order to flow the coating fluid at a predetermined thickness onto a coating effective surface of a flat substrate to be coated, the coating fluid is supplied from a coating head having a slit-shaped opening at a predetermined timing at the start of coating and coating is performed. A slit coat type coating method comprising a supply step of stopping the supply at a predetermined timing at the end, and a relative movement step of moving the substrate relative to the coating head,
An observation step of observing the supply start state at the start of application and the supply stop state at the end of application visually or numerically by detecting a pressure change in the vicinity of the application head and performing piezoelectric conversion during the supply step. When,
In the middle of the supply step, the observation is performed by predetermined driving at each predetermined timing at the start of application and at the end of application, and by adjusting a plurality of parameters for supplying a coating fluid according to the observation result An adjustment step for adjusting the result to a substantially trapezoidal rise and fall waveform,
A slit coat type coating method characterized in that in the adjustment step, an unstable operation in the supply start state and the supply stop state is set to be narrow so that adjustment work for widening the coating effective surface of the substrate is ensured and facilitated. .

The application fluid is a low-viscosity application fluid that can be supplied to the application head by a supply pressure applied to a supply unit,
In the adjusting step, a predetermined stroke of the plug body of the suck back valve having a plug body connected to the supply pipe of the coating head and driven by a predetermined stroke in order to temporarily increase the volume in the supply pipe Or adjust the moving speed,
A predetermined stroke of the plug body of the on-off valve that is connected between the suck back valve and the supply unit and that opens and closes the flow path by a plug body that is driven by a predetermined stroke, or a moving speed is adjusted. The slit coat type coating method according to claim 7 , wherein the plurality of parameters are adjusted.

The application fluid is a high-viscosity application fluid supplied to the application head by a forced pump connected to a supply unit, and the adjustment pump connected to a supply pipe of the application head in the adjustment step; The slit coat type coating method according to claim 7 , wherein the observation result is automatically adjusted to a substantially trapezoidal rise and fall waveform by driving the forced pump in a forward and reverse rotation direction at a predetermined timing.

9. A coated substrate obtained by the slit coat coating method according to claim 7, wherein the coated substrate includes a flat rectangular substrate and a circular planar semiconductor wafer. .