|
US4594226A
(en)
|
1984-02-23 |
1986-06-10 |
Reedy Gerald T |
Gas chromatography/matrix-isolation apparatus
|
|
US6025916A
(en)
|
1997-02-27 |
2000-02-15 |
Wisconsin Alumni Research Foundation |
Wall deposition thickness sensor for plasma processing chamber
|
|
JP3784522B2
(ja)
|
1998-01-20 |
2006-06-14 |
株式会社アルバック |
膜厚モニター
|
|
CN100481308C
(zh)
|
2002-09-30 |
2009-04-22 |
东京毅力科创株式会社 |
采用具有等离子体处理系统的光学系统的装置和方法
|
|
US20040142484A1
(en)
|
2002-09-30 |
2004-07-22 |
Intel Corporation |
Spectroscopic analysis system and method
|
|
KR101025527B1
(ko)
|
2002-09-30 |
2011-04-04 |
도쿄엘렉트론가부시키가이샤 |
반도체 제조 프로세스의 모니터링 및 제어를 위한 방법 및장치
|
|
KR20050059451A
(ko)
|
2003-12-15 |
2005-06-21 |
삼성전자주식회사 |
기판 가공 공정의 종점 검출 장치
|
|
US7578301B2
(en)
|
2005-03-28 |
2009-08-25 |
Lam Research Corporation |
Methods and apparatus for determining the endpoint of a cleaning or conditioning process in a plasma processing system
|
|
US8009938B2
(en)
|
2008-02-29 |
2011-08-30 |
Applied Materials, Inc. |
Advanced process sensing and control using near infrared spectral reflectometry
|
|
KR101629253B1
(ko)
|
2008-04-03 |
2016-06-21 |
램 리써치 코포레이션 |
광방출 스펙트럼의 정규화 방법 및 장치
|
|
KR20110127389A
(ko)
|
2010-05-19 |
2011-11-25 |
삼성전자주식회사 |
플라즈마 처리 장치
|
|
US9347132B2
(en)
|
2011-04-29 |
2016-05-24 |
Applied Materials, Inc. |
Optical endpoint detection system
|
|
US9251360B2
(en)
*
|
2012-04-27 |
2016-02-02 |
Intralinks, Inc. |
Computerized method and system for managing secure mobile device content viewing in a networked secure collaborative exchange environment
|
|
US9747008B2
(en)
*
|
2012-08-24 |
2017-08-29 |
Northrop Grumman Systems Corporation |
Method and user interface device for efficient collaboration in a maintenance environment
|
|
US20150356446A1
(en)
*
|
2013-01-31 |
2015-12-10 |
Lf Technology Development Corporation Limited |
Systems and methods for a learning decision system with a graphical search interface
|
|
USD727336S1
(en)
*
|
2013-02-15 |
2015-04-21 |
dotloop, Inc. |
Display screen with animated user interface
|
|
USD763860S1
(en)
|
2013-03-04 |
2016-08-16 |
Tixtrack, Inc. |
Display panel or portion thereof with graphical user interface
|
|
US10684752B2
(en)
*
|
2013-04-12 |
2020-06-16 |
Salesforce.Com, Inc. |
Computer implemented methods and apparatus for responding to actionable text patterns in a feed item
|
|
USD791820S1
(en)
*
|
2013-09-03 |
2017-07-11 |
Samsung Electronics Co., Ltd. |
Display screen or portion thereof with icon
|
|
KR20150106974A
(ko)
|
2014-01-29 |
2015-09-23 |
세메스 주식회사 |
기판처리장치 및 방법
|
|
KR101553149B1
(ko)
|
2014-03-26 |
2015-09-14 |
(주)쎄미시스코 |
두께 변화 측정 장치
|
|
USD780203S1
(en)
*
|
2014-10-02 |
2017-02-28 |
Deere & Company |
Display screen with a graphical user interface
|
|
USD856364S1
(en)
*
|
2014-10-31 |
2019-08-13 |
Open Text Sa Ulc |
Display screen or portion thereof with animated computer generated icon
|
|
KR101877862B1
(ko)
|
2014-12-19 |
2018-07-12 |
가부시키가이샤 히다치 하이테크놀로지즈 |
플라즈마 처리 장치 및 플라즈마 처리 장치의 운전 방법
|
|
US9367872B1
(en)
*
|
2014-12-22 |
2016-06-14 |
Palantir Technologies Inc. |
Systems and user interfaces for dynamic and interactive investigation of bad actor behavior based on automatic clustering of related data in various data structures
|
|
US11329860B2
(en)
*
|
2015-01-27 |
2022-05-10 |
Moogsoft Inc. |
System for decomposing events that includes user interface
|
|
US9363149B1
(en)
*
|
2015-08-01 |
2016-06-07 |
Splunk Inc. |
Management console for network security investigations
|
|
TWD189295S
(zh)
|
2016-03-22 |
2018-03-21 |
鴻海精密工業股份有限公司 |
顯示螢幕之圖形化使用者介面
|
|
KR102576702B1
(ko)
|
2016-07-06 |
2023-09-08 |
삼성전자주식회사 |
증착 공정 모니터링 시스템, 및 그 시스템을 이용한 증착 공정 제어방법과 반도체 소자 제조방법
|
|
US10269545B2
(en)
|
2016-08-03 |
2019-04-23 |
Lam Research Corporation |
Methods for monitoring plasma processing systems for advanced process and tool control
|
|
US9972478B2
(en)
|
2016-09-16 |
2018-05-15 |
Lam Research Corporation |
Method and process of implementing machine learning in complex multivariate wafer processing equipment
|
|
US10466174B2
(en)
|
2016-12-13 |
2019-11-05 |
Infineon Technologies Ag |
Gas analyzer including a radiation source comprising a black-body radiator with at least one through-hole and a collimator
|
|
KR102026832B1
(ko)
|
2017-10-17 |
2019-09-30 |
세메스 주식회사 |
기판 처리 장치 및 기판 처리 방법
|
|
USD847858S1
(en)
*
|
2017-10-27 |
2019-05-07 |
Waymo Llc |
Display screen portion with icon
|
|
USD916776S1
(en)
*
|
2018-03-22 |
2021-04-20 |
Leica Microsystems Cms Gmbh |
Microscope display screen with graphical user interface
|
|
KR102025873B1
(ko)
|
2018-04-02 |
2019-09-26 |
한국기계연구원 |
공정 모니터링을 위한 플라즈마 분석 장치 및 방법
|
|
CA184012S
(en)
|
2018-05-03 |
2019-07-17 |
Beijing Kuaimajiabian Technology Co Ltd |
Display screen with graphical user interface
|
|
US20200013588A1
(en)
|
2018-07-03 |
2020-01-09 |
Applied Materials, Inc. |
Tilted interferometric endpoint (iep) window for sensitivity improvement
|
|
US10705514B2
(en)
|
2018-10-09 |
2020-07-07 |
Applied Materials, Inc. |
Adaptive chamber matching in advanced semiconductor process control
|
|
WO2020142451A1
(en)
|
2018-12-31 |
2020-07-09 |
Lam Research Corporation |
Monitoring process wall depositions and coatings
|
|
JP7183090B2
(ja)
|
2019-03-20 |
2022-12-05 |
東京エレクトロン株式会社 |
プラズマ処理方法及びプラズマ処理装置
|
|
US11114286B2
(en)
|
2019-04-08 |
2021-09-07 |
Applied Materials, Inc. |
In-situ optical chamber surface and process sensor
|
|
KR102182057B1
(ko)
|
2019-06-04 |
2020-11-23 |
한국기초과학지원연구원 |
플라즈마 oes 진단 윈도우 시스템, 플라즈마 oes 값의 보정 방법 및 플라즈마 oes 진단용 윈도우
|
|
JP2022549793A
(ja)
|
2019-09-25 |
2022-11-29 |
ラム リサーチ コーポレーション |
光干渉法および反射率測定法を使用した半導体機器の自律プロセス制御および最適化のためのシステムおよび方法
|
|
US11499869B2
(en)
|
2019-11-13 |
2022-11-15 |
Applied Materials, Inc. |
Optical wall and process sensor with plasma facing sensor
|
|
USD938465S1
(en)
*
|
2020-02-14 |
2021-12-14 |
SparkCognition, Inc. |
Display screen with transitional graphical user interface
|
|
US11455078B1
(en)
*
|
2020-03-31 |
2022-09-27 |
Snap Inc. |
Spatial navigation and creation interface
|
|
US11708635B2
(en)
|
2020-06-12 |
2023-07-25 |
Applied Materials, Inc. |
Processing chamber condition and process state monitoring using optical reflector attached to processing chamber liner
|
|
US12009191B2
(en)
|
2020-06-12 |
2024-06-11 |
Applied Materials, Inc. |
Thin film, in-situ measurement through transparent crystal and transparent substrate within processing chamber wall
|
|
USD1009070S1
(en)
*
|
2020-07-10 |
2023-12-26 |
Schlumberger Technology Corporation |
Electronic device with display screen and graphical user interface
|
|
JP1688822S
(ja)
*
|
2020-11-20 |
2021-06-28 |
|
|
|
USD967141S1
(en)
*
|
2021-03-01 |
2022-10-18 |
Honeywell International Inc. |
Display screen or portion thereof with animated graphical user interface
|
|
US20220357820A1
(en)
*
|
2021-05-04 |
2022-11-10 |
Honeywell International Inc. |
User interface modifications for increased productivity
|