JP1729675S - edge ring - Google Patents
edge ringInfo
- Publication number
- JP1729675S JP1729675S JP2022002600F JP2022002600F JP1729675S JP 1729675 S JP1729675 S JP 1729675S JP 2022002600 F JP2022002600 F JP 2022002600F JP 2022002600 F JP2022002600 F JP 2022002600F JP 1729675 S JP1729675 S JP 1729675S
- Authority
- JP
- Japan
- Prior art keywords
- edge ring
- substrate
- plasma
- support
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 abstract 4
- 239000004065 semiconductor Substances 0.000 abstract 2
- 230000003628 erosive effect Effects 0.000 abstract 1
Abstract
本願に係る物品（以下、「本物品」という。）は、半導体基板を支持する基板支持体の外周に配置されるエッジリングであり、プラズマを半導体基板上の空間に閉じ込め、プラズマによる侵食から基板支持体を保護する。本物品は、交換可能である。An article according to the present application (hereinafter referred to as "the article") is an edge ring arranged on the outer periphery of a substrate support that supports a semiconductor substrate, confines plasma in a space above the semiconductor substrate, and protects the substrate from erosion by the plasma. Protect the support. The Goods are replaceable.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022002600F JP1729675S (en) | 2022-02-10 | 2022-02-10 | edge ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022002600F JP1729675S (en) | 2022-02-10 | 2022-02-10 | edge ring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1729675S true JP1729675S (en) | 2022-11-11 |
Family
ID=83931593
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022002600F Active JP1729675S (en) | 2022-02-10 | 2022-02-10 | edge ring |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP1729675S (en) |
-
2022
- 2022-02-10 JP JP2022002600F patent/JP1729675S/en active Active
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