JP1767336S - Showerhead for semiconductor processing equipment - Google Patents
Showerhead for semiconductor processing equipmentInfo
- Publication number
- JP1767336S JP1767336S JP2023023293F JP2023023293F JP1767336S JP 1767336 S JP1767336 S JP 1767336S JP 2023023293 F JP2023023293 F JP 2023023293F JP 2023023293 F JP2023023293 F JP 2023023293F JP 1767336 S JP1767336 S JP 1767336S
- Authority
- JP
- Japan
- Prior art keywords
- showerhead
- semiconductor processing
- processing equipment
- article
- semiconductors
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 238000007599 discharging Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Abstract
本願に係る物品（以下、「本物品」という。）は、例えば、半導体の製造に用いられる半導体処理装置において処理ガスを放出するためのシャワーヘッドである。The article according to the present application (hereinafter referred to as "the article") is, for example, a showerhead for discharging a process gas in a semiconductor processing apparatus used in the manufacture of semiconductors.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US202329875949 | 2023-05-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1767336S true JP1767336S (en) | 2024-04-03 |
Family
ID=90474325
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023023294F Active JP1767350S (en) | 2023-05-12 | 2023-11-10 | Showerhead for semiconductor processing equipment |
| JP2023023293F Active JP1767336S (en) | 2023-05-12 | 2023-11-10 | Showerhead for semiconductor processing equipment |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2023023294F Active JP1767350S (en) | 2023-05-12 | 2023-11-10 | Showerhead for semiconductor processing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (2) | JP1767350S (en) |
-
2023
- 2023-11-10 JP JP2023023294F patent/JP1767350S/en active Active
- 2023-11-10 JP JP2023023293F patent/JP1767336S/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP1767350S (en) | 2024-04-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP1678278S (en) | Boat for substrate processing equipment | |
| JP1729106S (en) | Shower head for semiconductor processing equipment | |
| JP1767350S (en) | Showerhead for semiconductor processing equipment | |
| JP1733645S (en) | Shower head for semiconductor processing equipment | |
| JP1737180S (en) | Shower head for semiconductor processing equipment | |
| JP1713857S (en) | Shower head for semiconductor processing equipment | |
| JP1713813S (en) | Shower head for semiconductor processing equipment | |
| JP1722189S (en) | Shower head assembly for semiconductor processing equipment | |
| WO2023172378A3 (en) | Etching compositions | |
| JP1767300S (en) | Threaded Nozzle Insert | |
| JP1678274S (en) | Boat for substrate processing equipment | |
| JP1760398S (en) | baffle | |
| JP1760390S (en) | baffle | |
| JP1737453S (en) | Hub with gas flow deflection | |
| JP1721942S (en) | Base for semiconductor processing equipment | |
| JP1722001S (en) | Base for semiconductor processing equipment | |
| JP1722002S (en) | Base for semiconductor processing equipment | |
| JP1722003S (en) | Base for semiconductor processing equipment | |
| JP1754901S (en) | edge ring | |
| JP1754900S (en) | edge ring | |
| JP1729564S (en) | Heating equipment for semiconductor processing tools | |
| TWD215672S (en) | Nozzle for liquid ejection | |
| JP1741175S (en) | Susceptor | |
| TWD208389S (en) | container | |
| TWD228269S (en) | Substrate holder for substrate processing equipment |