JP1741424S - edge ring - Google Patents
edge ringInfo
- Publication number
- JP1741424S JP1741424S JP2022021981F JP2022021981F JP1741424S JP 1741424 S JP1741424 S JP 1741424S JP 2022021981 F JP2022021981 F JP 2022021981F JP 2022021981 F JP2022021981 F JP 2022021981F JP 1741424 S JP1741424 S JP 1741424S
- Authority
- JP
- Japan
- Prior art keywords
- article
- ring
- edge ring
- edge
- enlarged view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 230000002093 peripheral effect Effects 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Abstract
本願に係る物品（以下、「本物品」という。）は、プラスマ処理システムにおいて用いられる、エッジリング、カバーリング、ボトムリングおよびインナーリングを含むエッジリングシステムに含まれ、プラズマ形成のために、半導体基板の外周に配置されるエッジリングである。本物品は、アクチュエータによって垂直（上下）方向に移動可能なエッジリングである。本物品の底面は「部分拡大図Ａ」に示すように環状凹部を有する。本物品の平面の外周縁部は「部分拡大図Ａ」に示すようにＲ面取りされている。The article of the present application (hereinafter referred to as the "article") is included in an edge ring system, including an edge ring, a cover ring, a bottom ring and an inner ring, used in a plasma processing system, and is used for plasma formation. It is an edge ring arranged on the periphery of the substrate. The article is an edge ring that can be moved vertically (up and down) by an actuator. The bottom surface of the article has an annular recess as shown in "partially enlarged view A". The outer peripheral edge of the plane of the article is rounded as shown in "partially enlarged view A".
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022021981F JP1741424S (en) | 2022-10-12 | 2022-10-12 | edge ring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022021981F JP1741424S (en) | 2022-10-12 | 2022-10-12 | edge ring |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP1741424S true JP1741424S (en) | 2023-04-10 |
Family
ID=85802758
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022021981F Active JP1741424S (en) | 2022-10-12 | 2022-10-12 | edge ring |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP1741424S (en) |
-
2022
- 2022-10-12 JP JP2022021981F patent/JP1741424S/en active Active
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