ITUB20161080A1 - Dispositivo sensore di pressione di tipo micro-elettro-meccanico con ridotta sensibilita' alla temperatura - Google Patents
Dispositivo sensore di pressione di tipo micro-elettro-meccanico con ridotta sensibilita' alla temperaturaInfo
- Publication number
- ITUB20161080A1 ITUB20161080A1 ITUB2016A001080A ITUB20161080A ITUB20161080A1 IT UB20161080 A1 ITUB20161080 A1 IT UB20161080A1 IT UB2016A001080 A ITUB2016A001080 A IT UB2016A001080A IT UB20161080 A ITUB20161080 A IT UB20161080A IT UB20161080 A1 ITUB20161080 A1 IT UB20161080A1
- Authority
- IT
- Italy
- Prior art keywords
- electro
- micro
- pressure sensor
- sensor device
- mechanical type
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0027—Structures for transforming mechanical energy, e.g. potential energy of a spring into translation, sound into translation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/0035—Packages or encapsulation for maintaining a controlled atmosphere inside of the chamber containing the MEMS
- B81B7/0038—Packages or encapsulation for maintaining a controlled atmosphere inside of the chamber containing the MEMS using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0009—Structural features, others than packages, for protecting a device against environmental influences
- B81B7/0019—Protection against thermal alteration or destruction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
- B81B7/0061—Packages or encapsulation suitable for fluid transfer from the MEMS out of the package or vice versa, e.g. transfer of liquid, gas, sound
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00269—Bonding of solid lids or wafers to the substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00349—Creating layers of material on a substrate
- B81C1/00373—Selective deposition, e.g. printing or microcontact printing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/145—Housings with stress relieving means
- G01L19/146—Housings with stress relieving means using flexible element between the transducer and the support
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/02—Sensors
- B81B2201/0264—Pressure sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0315—Cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2207/00—Microstructural systems or auxiliary parts thereof
- B81B2207/01—Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS
- B81B2207/012—Microstructural systems or auxiliary parts thereof comprising a micromechanical device connected to control or processing electronics, i.e. Smart-MEMS the micromechanical device and the control or processing electronics being separate parts in the same package
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C2201/00—Manufacture or treatment of microstructural devices or systems
- B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
- B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
- B81C2201/0183—Selective deposition
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Child & Adolescent Psychology (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITUB2016A001080A ITUB20161080A1 (it) | 2016-02-25 | 2016-02-25 | Dispositivo sensore di pressione di tipo micro-elettro-meccanico con ridotta sensibilita' alla temperatura |
US15/276,613 US9975756B2 (en) | 2016-02-25 | 2016-09-26 | Micro-electro-mechanical pressure device and methods of forming same |
CN201621255067.0U CN206872419U (zh) | 2016-02-25 | 2016-09-30 | 微机电压力传感器装置 |
CN201611035493.8A CN107117577B (zh) | 2016-02-25 | 2016-09-30 | 具有较低的温度灵敏度的微机电型压力装置 |
EP16194672.8A EP3210934B1 (en) | 2016-02-25 | 2016-10-19 | Micro-electro-mechanical type pressure device having low sensitivity to temperature |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITUB2016A001080A ITUB20161080A1 (it) | 2016-02-25 | 2016-02-25 | Dispositivo sensore di pressione di tipo micro-elettro-meccanico con ridotta sensibilita' alla temperatura |
Publications (1)
Publication Number | Publication Date |
---|---|
ITUB20161080A1 true ITUB20161080A1 (it) | 2017-08-25 |
Family
ID=55949001
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ITUB2016A001080A ITUB20161080A1 (it) | 2016-02-25 | 2016-02-25 | Dispositivo sensore di pressione di tipo micro-elettro-meccanico con ridotta sensibilita' alla temperatura |
Country Status (4)
Country | Link |
---|---|
US (1) | US9975756B2 (it) |
EP (1) | EP3210934B1 (it) |
CN (2) | CN107117577B (it) |
IT (1) | ITUB20161080A1 (it) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ITUB20161080A1 (it) * | 2016-02-25 | 2017-08-25 | St Microelectronics Srl | Dispositivo sensore di pressione di tipo micro-elettro-meccanico con ridotta sensibilita' alla temperatura |
DE102017203384B3 (de) * | 2017-03-02 | 2018-01-18 | Robert Bosch Gmbh | Mikromechanischer Drucksensor |
US10407298B2 (en) * | 2017-07-28 | 2019-09-10 | Advanced Semiconductor Engineering Korea, Inc. | Microelectromechanical systems and method of manufacturing the same |
CN107894297B (zh) * | 2017-11-07 | 2020-02-18 | 无锡必创传感科技有限公司 | 一种压力传感器芯片及其制造方法 |
US20210002128A1 (en) | 2018-12-03 | 2021-01-07 | X-Celeprint Limited | Enclosed cavity structures |
US11981560B2 (en) * | 2020-06-09 | 2024-05-14 | Analog Devices, Inc. | Stress-isolated MEMS device comprising substrate having cavity and method of manufacture |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007042336A2 (en) * | 2005-10-14 | 2007-04-19 | Stmicroelectronics S.R.L. | Substrate-level assembly for an integrated device, manufacturing process thereof and related integrated device |
US20150001651A1 (en) * | 2013-06-28 | 2015-01-01 | Stmicroelectronics S.R.I. | Mems device having a suspended diaphragm and manufacturing process thereof |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1577656B1 (en) | 2004-03-19 | 2010-06-09 | STMicroelectronics Srl | Method for manufacturing a semiconductor pressure sensor |
DE602005023761D1 (de) * | 2004-10-27 | 2010-11-04 | Epcos Ag | Verringerung der luftdämpfung in einer mems-vorrichtung |
EP2159558A1 (en) * | 2008-08-28 | 2010-03-03 | Sensirion AG | A method for manufacturing an integrated pressure sensor |
ITTO20090616A1 (it) * | 2009-08-05 | 2011-02-06 | St Microelectronics Srl | Procedimento di fabbricazione di dispositivi mems dotati di cavita' sepolte e dispositivo mems cosi' ottenuto |
WO2011048521A1 (en) * | 2009-10-21 | 2011-04-28 | Koninklijke Philips Electronics N.V. | Microfluidic cartridge with parallel pneumatic interface plate |
WO2013134741A2 (en) * | 2012-03-08 | 2013-09-12 | Cyvek, Inc. | Methods and systems for manufacture of microarray assay systems, conducting microfluidic assays, and monitoring and scanning to obtain microfluidic assay results |
US8217474B2 (en) * | 2009-12-28 | 2012-07-10 | Solid State System Co., Ltd. | Hermetic MEMS device and method for fabricating hermetic MEMS device and package structure of MEMS device |
FR2994228B1 (fr) * | 2012-07-31 | 2017-05-12 | Commissariat Energie Atomique | Pompe realisee dans un substrat |
ITTO20130539A1 (it) * | 2013-06-28 | 2014-12-29 | Stmicroelectronics International N V | Dispositivo mems incorporante un percorso fluidico e relativo procedimento di fabbricazione |
US9114976B1 (en) * | 2014-03-07 | 2015-08-25 | Taiwan Semiconductor Manufacturing Company Limited | Semiconductor arrangement with stress release configuration |
US10428721B2 (en) * | 2014-04-25 | 2019-10-01 | Hitachi Automotive Systems, Ltd. | Cooling control device, flow rate control valve and cooling control method |
CN104062059B (zh) * | 2014-06-13 | 2017-12-01 | 江苏英特神斯科技有限公司 | 一种mems压阻式压力传感器及其制造方法 |
CN106257254B (zh) * | 2015-06-22 | 2020-03-20 | 意法半导体股份有限公司 | 生成具有降低的环境温度依赖性的换能信号的压力传感器及其制造方法 |
ITUB20155716A1 (it) * | 2015-11-19 | 2017-05-19 | St Microelectronics Srl | Dispositivo micro-elettro-meccanico dotato di due cavita' sepolte e relativo procedimento di fabbricazione |
US9670057B1 (en) * | 2016-01-29 | 2017-06-06 | Infineon Technologies Ag | Sensor device and method for making thereof |
ITUB20161080A1 (it) * | 2016-02-25 | 2017-08-25 | St Microelectronics Srl | Dispositivo sensore di pressione di tipo micro-elettro-meccanico con ridotta sensibilita' alla temperatura |
-
2016
- 2016-02-25 IT ITUB2016A001080A patent/ITUB20161080A1/it unknown
- 2016-09-26 US US15/276,613 patent/US9975756B2/en active Active
- 2016-09-30 CN CN201611035493.8A patent/CN107117577B/zh active Active
- 2016-09-30 CN CN201621255067.0U patent/CN206872419U/zh not_active Withdrawn - After Issue
- 2016-10-19 EP EP16194672.8A patent/EP3210934B1/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007042336A2 (en) * | 2005-10-14 | 2007-04-19 | Stmicroelectronics S.R.L. | Substrate-level assembly for an integrated device, manufacturing process thereof and related integrated device |
US20150001651A1 (en) * | 2013-06-28 | 2015-01-01 | Stmicroelectronics S.R.I. | Mems device having a suspended diaphragm and manufacturing process thereof |
Also Published As
Publication number | Publication date |
---|---|
CN107117577B (zh) | 2019-12-31 |
CN206872419U (zh) | 2018-01-12 |
US20170247249A1 (en) | 2017-08-31 |
EP3210934B1 (en) | 2020-06-17 |
EP3210934A1 (en) | 2017-08-30 |
US9975756B2 (en) | 2018-05-22 |
CN107117577A (zh) | 2017-09-01 |
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