ITRM20040464A1 - Dispositivo per la pulizia di punte di un microscopio a scansione tunnel (stm), microscopio a scansione tunnel e relativo procedimento di pulizia. - Google Patents
Dispositivo per la pulizia di punte di un microscopio a scansione tunnel (stm), microscopio a scansione tunnel e relativo procedimento di pulizia.Info
- Publication number
- ITRM20040464A1 ITRM20040464A1 ITRM20040464A ITRM20040464A1 IT RM20040464 A1 ITRM20040464 A1 IT RM20040464A1 IT RM20040464 A ITRM20040464 A IT RM20040464A IT RM20040464 A1 ITRM20040464 A1 IT RM20040464A1
- Authority
- IT
- Italy
- Prior art keywords
- tip
- scan microscope
- stm
- microscope
- tunnel
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/50—Repairing or regenerating used or defective discharge tubes or lamps
- H01J9/505—Regeneration of cathodes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
- G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
- G01Q30/16—Vacuum environment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
- G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
- G01Q70/02—Probe holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2209/00—Apparatus and processes for manufacture of discharge tubes
- H01J2209/01—Generalised techniques
- H01J2209/017—Cleaning
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2209/00—Apparatus and processes for manufacture of discharge tubes
- H01J2209/02—Manufacture of cathodes
- H01J2209/022—Cold cathodes
- H01J2209/0223—Field emission cathodes
- H01J2209/0226—Sharpening or resharpening of emitting point or edge
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
- Y02W30/00—Technologies for solid waste management
- Y02W30/50—Reuse, recycling or recovery technologies
- Y02W30/82—Recycling of waste of electrical or electronic equipment [WEEE]
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITRM20040464 ITRM20040464A1 (it) | 2004-09-29 | 2004-09-29 | Dispositivo per la pulizia di punte di un microscopio a scansione tunnel (stm), microscopio a scansione tunnel e relativo procedimento di pulizia. |
PCT/IB2005/053195 WO2006035403A2 (en) | 2004-09-29 | 2005-09-28 | Cleaning device and process for scanning tunneling microscopy (stm) tip |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ITRM20040464 ITRM20040464A1 (it) | 2004-09-29 | 2004-09-29 | Dispositivo per la pulizia di punte di un microscopio a scansione tunnel (stm), microscopio a scansione tunnel e relativo procedimento di pulizia. |
Publications (1)
Publication Number | Publication Date |
---|---|
ITRM20040464A1 true ITRM20040464A1 (it) | 2004-12-29 |
Family
ID=35744824
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ITRM20040464 ITRM20040464A1 (it) | 2004-09-29 | 2004-09-29 | Dispositivo per la pulizia di punte di un microscopio a scansione tunnel (stm), microscopio a scansione tunnel e relativo procedimento di pulizia. |
Country Status (2)
Country | Link |
---|---|
IT (1) | ITRM20040464A1 (it) |
WO (1) | WO2006035403A2 (it) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8070920B2 (en) | 2006-04-26 | 2011-12-06 | The Board Of Trustees Of The University Of Illinois | Nanometer-scale sharpening of conductor tips |
US7569112B2 (en) * | 2007-03-16 | 2009-08-04 | International Business Machines Corporation | Scanning probe apparatus with in-situ measurement probe tip cleaning capability |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2098954A5 (it) * | 1970-07-31 | 1972-03-10 | Anvar | |
NL8500596A (nl) * | 1985-03-04 | 1986-10-01 | Philips Nv | Inrichting voorzien van een halfgeleiderkathode. |
JP2711311B2 (ja) * | 1989-12-15 | 1998-02-10 | 光技術研究開発株式会社 | 走査トンネル顕微鏡 |
-
2004
- 2004-09-29 IT ITRM20040464 patent/ITRM20040464A1/it unknown
-
2005
- 2005-09-28 WO PCT/IB2005/053195 patent/WO2006035403A2/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2006035403A2 (en) | 2006-04-06 |
WO2006035403A3 (en) | 2006-08-24 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1336835A4 (en) | CONDUCTIVE PROBE FOR SCANNING MICROSCOPE AND RELATIVE MACHINING METHOD | |
ATE321355T1 (de) | Nanorohrbasierter elektronenemitter und verfahren zur dessen verwendung | |
Cabrera et al. | Scale invariance of a diodelike tunnel junction | |
Garleff et al. | Bistable behavior of silicon atoms in the (110) surface of gallium arsenide | |
WO2005008707A2 (en) | Improved tip for nanoscanning electron microscope | |
EP2061064A1 (en) | Electron source | |
ITRM20040464A1 (it) | Dispositivo per la pulizia di punte di un microscopio a scansione tunnel (stm), microscopio a scansione tunnel e relativo procedimento di pulizia. | |
CN106018442A (zh) | 原子尺度下动态观测iii-v族场效应晶体管栅介质失效的方法 | |
Shih et al. | Stable and high performance algan self-aligned-gate field emitter arrays | |
EP1598848A3 (en) | Electron microscope | |
WO2004076049A3 (en) | Method and apparatus for fabricating nanoscale structures | |
Ernst et al. | Tip preparation for usage in an ultra-low temperature UHV scanning tunneling microscope | |
JP2006272374A (ja) | カーボン繊維の切断・加工方法及びその装置 | |
Wetzel et al. | A versatile instrument for in situ combination of scanning probe microscopy and time-of-flight mass spectrometry | |
US6943356B2 (en) | Tip for nanoscanning electron microscope | |
CN102495089B (zh) | 半导体材料测量装置及原位测量界面缺陷分布的方法 | |
KR20110070031A (ko) | 원자간력 현미경 탐침의 팁용 탄소나노튜브 부착방법 및 그 방법에 의해 팁에 탄소나노튜브가 부착된 원자간력 현미경용 탐침 | |
Rohrbaugh et al. | Long-term stability assessment of AlGaN/GaN field effect transistors modified with peptides: Device characteristics vs. surface properties | |
EP1148371A3 (en) | Optical waveguide probe and manufacturing method of the same, and scanning near field optical microscope | |
JP2008091307A (ja) | 電子源 | |
KR101448199B1 (ko) | 초고진공에서의 미세팁의 클리닝 방법 | |
JP2001198896A (ja) | 電子顕微鏡用マイクロマニピュレータ | |
JP2020119762A (ja) | 電子源の安定化方法、電子ビーム装置 | |
Van Aken et al. | A simple fabrication method for tunnel junction emitters | |
JP2006267113A (ja) | 先端被覆ナノチューブ、走査型顕微鏡用先端被覆プローブ、これを用いた加工装置及び加工方法 |