WO2006035403A3 - Cleaning device and process for scanning tunneling microscopy (stm) tip - Google Patents

Cleaning device and process for scanning tunneling microscopy (stm) tip Download PDF

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Publication number
WO2006035403A3
WO2006035403A3 PCT/IB2005/053195 IB2005053195W WO2006035403A3 WO 2006035403 A3 WO2006035403 A3 WO 2006035403A3 IB 2005053195 W IB2005053195 W IB 2005053195W WO 2006035403 A3 WO2006035403 A3 WO 2006035403A3
Authority
WO
WIPO (PCT)
Prior art keywords
tip
stm
cleaning device
scanning tunneling
conducting filament
Prior art date
Application number
PCT/IB2005/053195
Other languages
French (fr)
Other versions
WO2006035403A2 (en
Inventor
Maurizio Iannilli
Nunzio Motta
Daniele Pecchi
Anna Sgarlata
Original Assignee
Univ Roma
Maurizio Iannilli
Nunzio Motta
Daniele Pecchi
Anna Sgarlata
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Roma, Maurizio Iannilli, Nunzio Motta, Daniele Pecchi, Anna Sgarlata filed Critical Univ Roma
Publication of WO2006035403A2 publication Critical patent/WO2006035403A2/en
Publication of WO2006035403A3 publication Critical patent/WO2006035403A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/50—Repairing or regenerating used or defective discharge tubes or lamps
    • H01J9/505—Regeneration of cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q30/00—Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
    • G01Q30/08—Means for establishing or regulating a desired environmental condition within a sample chamber
    • G01Q30/16—Vacuum environment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/10—STM [Scanning Tunnelling Microscopy] or apparatus therefor, e.g. STM probes
    • G01Q60/16—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/01—Generalised techniques
    • H01J2209/017—Cleaning
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2209/00—Apparatus and processes for manufacture of discharge tubes
    • H01J2209/02—Manufacture of cathodes
    • H01J2209/022—Cold cathodes
    • H01J2209/0223—Field emission cathodes
    • H01J2209/0226—Sharpening or resharpening of emitting point or edge
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W30/00—Technologies for solid waste management
    • Y02W30/50—Reuse, recycling or recovery technologies
    • Y02W30/82—Recycling of waste of electrical or electronic equipment [WEEE]

Abstract

The present invention is referred to a device for effectively cleaning tips of a scanning tunnelling microscope (STM) probe in ultra high vacuum comprising means for bombarding (11, 20, 21, 22) a tip (1) with an electron beam, to a microscope as above specified including the latter a cleaning process for tips of a scanning tunnelling microscope probe in ultra high vacuum comprising the steps of: transferring a tip (1) on an insulated housing system (6); approaching a conducting filament (20) to said tip; applying a predetermined current to said conducting filament (20); applying a predetermined voltage between said conducting filament (20) and said tip (1) to be cleaned for a predetermined time, whereby said tip (1) is subject to an electron flux.
PCT/IB2005/053195 2004-09-29 2005-09-28 Cleaning device and process for scanning tunneling microscopy (stm) tip WO2006035403A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
ITRM20040464 ITRM20040464A1 (en) 2004-09-29 2004-09-29 POINT CLEANING DEVICE FOR A TUNNEL SCAN MICROSCOPE (STM), TUNNEL SCAN MICROSCOPE AND RELATED CLEANING PROCEDURE.
ITRM2004A000464 2004-09-29

Publications (2)

Publication Number Publication Date
WO2006035403A2 WO2006035403A2 (en) 2006-04-06
WO2006035403A3 true WO2006035403A3 (en) 2006-08-24

Family

ID=35744824

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2005/053195 WO2006035403A2 (en) 2004-09-29 2005-09-28 Cleaning device and process for scanning tunneling microscopy (stm) tip

Country Status (2)

Country Link
IT (1) ITRM20040464A1 (en)
WO (1) WO2006035403A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008048710A2 (en) * 2006-04-26 2008-04-24 The Board Of Trustees Of The University Of Illinois Nanometer-scale sharpening of conductor tips
US7569112B2 (en) * 2007-03-16 2009-08-04 International Business Machines Corporation Scanning probe apparatus with in-situ measurement probe tip cleaning capability

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3763346A (en) * 1970-07-31 1973-10-02 Anvar Methods of shaping resharpening or cleaning tips
US4717855A (en) * 1985-03-04 1988-01-05 U.S. Philips Corporation Dual-cathode electron emission device
JPH03185302A (en) * 1989-12-15 1991-08-13 Hikari Gijutsu Kenkyu Kaihatsu Kk Scanning tunnel microscope

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3763346A (en) * 1970-07-31 1973-10-02 Anvar Methods of shaping resharpening or cleaning tips
US4717855A (en) * 1985-03-04 1988-01-05 U.S. Philips Corporation Dual-cathode electron emission device
JPH03185302A (en) * 1989-12-15 1991-08-13 Hikari Gijutsu Kenkyu Kaihatsu Kk Scanning tunnel microscope

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
AUCIELLO O ET AL: "Ion bombardment sharpening of field emitter arrays", VACUUM MICROELECTRONICS CONFERENCE, 1995. IVMC., 1995 INTERNATIONAL PORTLAND, OR, USA 30 JULY-3 AUG. 1995, NEW YORK, NY, USA,IEEE, US, 30 July 1995 (1995-07-30), pages 192 - 196, XP010155604, ISBN: 0-7803-2143-X *
NAGAI M ET AL: "SHARPENING PROCESSES OF SCANNING TUNNELING MICROSCOPY/SCANNING TUNNELING SPECTROSCOPY TIPS BY THERMAL FIELD TREATMENT", JAPANESE JOURNAL OF APPLIED PHYSICS, JAPAN SOCIETY OF APPLIED PHYSICS, TOKYO, JP, vol. 36, no. 6B, June 1997 (1997-06-01), pages 3844 - 3849, XP000741472, ISSN: 0021-4922 *
PATENT ABSTRACTS OF JAPAN vol. 015, no. 439 (P - 1273) 8 November 1991 (1991-11-08) *

Also Published As

Publication number Publication date
ITRM20040464A1 (en) 2004-12-29
WO2006035403A2 (en) 2006-04-06

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