ITMI952254A0 - - Google Patents

Info

Publication number
ITMI952254A0
ITMI952254A0 ITMI952254A ITMI952254A ITMI952254A0 IT MI952254 A0 ITMI952254 A0 IT MI952254A0 IT MI952254 A ITMI952254 A IT MI952254A IT MI952254 A ITMI952254 A IT MI952254A IT MI952254 A0 ITMI952254 A0 IT MI952254A0
Authority
IT
Italy
Application number
ITMI952254A
Other languages
Italian (it)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of ITMI952254A0 publication Critical patent/ITMI952254A0/it
Publication of ITMI952254A1 publication Critical patent/ITMI952254A1/it
Application granted granted Critical
Publication of IT1276064B1 publication Critical patent/IT1276064B1/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Medicines Containing Plant Substances (AREA)
  • Physical Vapour Deposition (AREA)
IT95MI002254A 1994-11-04 1995-10-31 Apparecchio e procedimento per la vaporizzazione sotto vuoto di lamine IT1276064B1 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4439519A DE4439519C1 (de) 1994-11-04 1994-11-04 Vorrichtung und Verfahren zum Vakuumbedampfen von Folien

Publications (3)

Publication Number Publication Date
ITMI952254A0 true ITMI952254A0 (cs) 1995-10-31
ITMI952254A1 ITMI952254A1 (it) 1997-05-01
IT1276064B1 IT1276064B1 (it) 1997-10-24

Family

ID=6532547

Family Applications (1)

Application Number Title Priority Date Filing Date
IT95MI002254A IT1276064B1 (it) 1994-11-04 1995-10-31 Apparecchio e procedimento per la vaporizzazione sotto vuoto di lamine

Country Status (2)

Country Link
DE (1) DE4439519C1 (cs)
IT (1) IT1276064B1 (cs)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19720026C2 (de) * 1997-05-13 2000-08-10 Martin Ruckh Linienförmige Verdampferquelle für Vakuum-Aufdampfanlagen
DE10249151B4 (de) * 2001-10-11 2009-11-05 Creavac - Creative Vakuumbeschichtung Gmbh Vorrichtung zur ein- oder mehrschichtigen Bedampfung von Substraten in einem einzigen Bedampfungsprozeß
US20030111014A1 (en) * 2001-12-18 2003-06-19 Donatucci Matthew B. Vaporizer/delivery vessel for volatile/thermally sensitive solid and liquid compounds
DE102004051290B4 (de) * 2004-10-13 2007-07-12 Creavac-Creative Vakuumbeschichtung Gmbh Einrichtung zum Beschichten von Substraten durch Aufdampfen in einer evakuierbaren Bearbeitungskammer
ATE364098T1 (de) * 2004-11-20 2007-06-15 Applied Materials Gmbh & Co Kg Vorrichtung zum verdampfen von materialien
JP4440837B2 (ja) * 2005-01-31 2010-03-24 三星モバイルディスプレイ株式會社 蒸発源及びこれを採用した蒸着装置
KR100711885B1 (ko) * 2005-08-31 2007-04-25 삼성에스디아이 주식회사 유기 증착원 및 이의 가열원 제어방법
KR100645689B1 (ko) 2005-08-31 2006-11-14 삼성에스디아이 주식회사 선형 증착원

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3244857A (en) * 1963-12-23 1966-04-05 Ibm Vapor deposition source
DE3530106A1 (de) * 1985-08-23 1987-02-26 Kempten Elektroschmelz Gmbh Aufdampfgut zum aufdampfen anorganischer verbindungen mittels einer photonen-erzeugenden strahlungsheizquelle in kontinuierlich betriebenen vakuumbedampfungsanlagen
DE3632027C1 (de) * 1986-09-20 1988-02-18 Rudnay Andre Dr De Verfahren und Vakuumbedampfungsanlage zum Metallisieren von Folienoberflaechen
DE4104415C1 (cs) * 1991-02-14 1992-06-04 4P Verpackungen Ronsberg Gmbh, 8951 Ronsberg, De

Also Published As

Publication number Publication date
IT1276064B1 (it) 1997-10-24
DE4439519C1 (de) 1996-04-25
ITMI952254A1 (it) 1997-05-01

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Legal Events

Date Code Title Description
0001 Granted