ITMI910177A1 - DYNAMIC RANDOM ACCESS MEMORY HAVING A STACKED TYPE CAPACITOR AND ITS MANUFACTURING PROCEDURE - Google Patents
DYNAMIC RANDOM ACCESS MEMORY HAVING A STACKED TYPE CAPACITOR AND ITS MANUFACTURING PROCEDUREInfo
- Publication number
- ITMI910177A1 ITMI910177A1 IT000177A ITMI910177A ITMI910177A1 IT MI910177 A1 ITMI910177 A1 IT MI910177A1 IT 000177 A IT000177 A IT 000177A IT MI910177 A ITMI910177 A IT MI910177A IT MI910177 A1 ITMI910177 A1 IT MI910177A1
- Authority
- IT
- Italy
- Prior art keywords
- random access
- access memory
- dynamic random
- manufacturing procedure
- type capacitor
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/31—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor
- H10B12/318—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells having a storage electrode stacked over the transistor the storage electrode having multiple segments
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1696090 | 1990-01-26 | ||
JP8986990 | 1990-04-03 | ||
JP2251306A JP2528731B2 (en) | 1990-01-26 | 1990-09-19 | Semiconductor memory device and manufacturing method thereof |
Publications (3)
Publication Number | Publication Date |
---|---|
ITMI910177A0 ITMI910177A0 (en) | 1991-01-24 |
ITMI910177A1 true ITMI910177A1 (en) | 1992-07-24 |
IT1245495B IT1245495B (en) | 1994-09-27 |
Family
ID=27281633
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ITMI910177A IT1245495B (en) | 1990-01-26 | 1991-01-24 | DYNAMIC RANDOM ACCESS MEMORY HAVING A STACKED TYPE CAPACITOR AND ITS MANUFACTURING PROCEDURE |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE4102184C2 (en) |
IT (1) | IT1245495B (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2689031B2 (en) * | 1991-04-01 | 1997-12-10 | 三菱電機株式会社 | Semiconductor memory device and method of manufacturing the same |
KR940004606B1 (en) * | 1991-09-13 | 1994-05-25 | 금성일렉트론 주식회사 | Method of fabricating a semiconductor memory capacitor |
TW221720B (en) * | 1991-11-15 | 1994-03-11 | Gold Star Co | |
DE4222467C1 (en) * | 1992-07-08 | 1993-06-24 | Siemens Ag, 8000 Muenchen, De | |
JPH06151749A (en) * | 1992-11-04 | 1994-05-31 | Mitsubishi Electric Corp | Semiconductor device and manufacture thereof |
JP3272517B2 (en) * | 1993-12-01 | 2002-04-08 | 三菱電機株式会社 | Method for manufacturing semiconductor device |
TW427014B (en) * | 1997-12-24 | 2001-03-21 | United Microelectronics Corp | The manufacturing method of the capacitors of DRAM |
GB2336714B (en) * | 1997-12-24 | 2000-03-08 | United Semiconductor Corp | Method of fabricating capacitor |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3918924C2 (en) * | 1988-06-10 | 1996-03-21 | Mitsubishi Electric Corp | Manufacturing method for a semiconductor memory device |
JPH0221652A (en) * | 1988-07-08 | 1990-01-24 | Mitsubishi Electric Corp | Semiconductor storage device |
JP2519569B2 (en) * | 1990-04-27 | 1996-07-31 | 三菱電機株式会社 | Semiconductor memory device and manufacturing method thereof |
-
1991
- 1991-01-24 IT ITMI910177A patent/IT1245495B/en active IP Right Grant
- 1991-01-25 DE DE4102184A patent/DE4102184C2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE4102184A1 (en) | 1991-08-08 |
IT1245495B (en) | 1994-09-27 |
DE4102184C2 (en) | 1995-03-16 |
ITMI910177A0 (en) | 1991-01-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
0001 | Granted | ||
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19960423 |