IT991124B - Metodo di fabbricazione di un tracciato di interconnessioni - Google Patents

Metodo di fabbricazione di un tracciato di interconnessioni

Info

Publication number
IT991124B
IT991124B IT26441/73A IT2644173A IT991124B IT 991124 B IT991124 B IT 991124B IT 26441/73 A IT26441/73 A IT 26441/73A IT 2644173 A IT2644173 A IT 2644173A IT 991124 B IT991124 B IT 991124B
Authority
IT
Italy
Prior art keywords
manufacturing
interconnection track
interconnection
track
Prior art date
Application number
IT26441/73A
Other languages
English (en)
Original Assignee
Itt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Itt filed Critical Itt
Application granted granted Critical
Publication of IT991124B publication Critical patent/IT991124B/it

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
    • H10W74/43—Encapsulations, e.g. protective coatings characterised by their materials comprising oxides, nitrides or carbides, e.g. ceramics or glasses
IT26441/73A 1972-07-21 1973-07-11 Metodo di fabbricazione di un tracciato di interconnessioni IT991124B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2235749A DE2235749C3 (de) 1972-07-21 1972-07-21 Verfahren zum Herstellen eines Leitbahnenmusters

Publications (1)

Publication Number Publication Date
IT991124B true IT991124B (it) 1975-07-30

Family

ID=5851230

Family Applications (1)

Application Number Title Priority Date Filing Date
IT26441/73A IT991124B (it) 1972-07-21 1973-07-11 Metodo di fabbricazione di un tracciato di interconnessioni

Country Status (6)

Country Link
JP (1) JPS5734647B2 (it)
AU (1) AU5795273A (it)
DE (1) DE2235749C3 (it)
FR (1) FR2194046B1 (it)
GB (1) GB1411864A (it)
IT (1) IT991124B (it)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4076575A (en) * 1976-06-30 1978-02-28 International Business Machines Corporation Integrated fabrication method of forming connectors through insulative layers
JPS55163860A (en) * 1979-06-06 1980-12-20 Toshiba Corp Manufacture of semiconductor device
DE3109801A1 (de) * 1981-03-13 1982-09-30 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen von halbleiterbauelementen
JPS60153122A (ja) * 1984-01-20 1985-08-12 Matsushita Electronics Corp 半導体装置の製造方法
CN107068546B (zh) * 2015-11-06 2022-05-24 马维尔以色列(M.I.S.L.)有限公司 生产用于多功能产品的半导体晶片的方法

Also Published As

Publication number Publication date
AU5795273A (en) 1975-01-16
DE2235749B2 (de) 1978-12-14
GB1411864A (en) 1975-10-29
FR2194046B1 (it) 1977-02-18
JPS5734647B2 (it) 1982-07-24
JPS4980973A (it) 1974-08-05
FR2194046A1 (it) 1974-02-22
DE2235749C3 (de) 1979-09-20
DE2235749A1 (de) 1974-01-31

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