IT942744B - Procedimento per stabilire contat ti chmici su circuiti a strato sottile - Google Patents
Procedimento per stabilire contat ti chmici su circuiti a strato sottileInfo
- Publication number
- IT942744B IT942744B IT70487/71A IT7048771A IT942744B IT 942744 B IT942744 B IT 942744B IT 70487/71 A IT70487/71 A IT 70487/71A IT 7048771 A IT7048771 A IT 7048771A IT 942744 B IT942744 B IT 942744B
- Authority
- IT
- Italy
- Prior art keywords
- procedure
- thin layer
- layer circuits
- chemical contacts
- establishing chemical
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/18—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material comprising a plurality of layers stacked between terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Semiconductor Integrated Circuits (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7039766A FR2112667A5 (US07655688-20100202-C00086.png) | 1970-11-05 | 1970-11-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
IT942744B true IT942744B (it) | 1973-04-02 |
Family
ID=9063772
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT70487/71A IT942744B (it) | 1970-11-05 | 1971-10-23 | Procedimento per stabilire contat ti chmici su circuiti a strato sottile |
Country Status (5)
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2290762A1 (fr) * | 1974-11-06 | 1976-06-04 | Lignes Telegraph Telephon | Procede de realisation de contacts ohmiques pour circuits en couche mince |
US4226932A (en) * | 1979-07-05 | 1980-10-07 | Gte Automatic Electric Laboratories Incorporated | Titanium nitride as one layer of a multi-layered coating intended to be etched |
US4336117A (en) * | 1979-12-07 | 1982-06-22 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Refractory coatings and method of producing the same |
US4591418A (en) * | 1984-10-26 | 1986-05-27 | The Parker Pen Company | Microlaminated coating |
US4774151A (en) * | 1986-05-23 | 1988-09-27 | International Business Machines Corporation | Low contact electrical resistant composition, substrates coated therewith, and process for preparing such |
JP2919306B2 (ja) * | 1995-05-31 | 1999-07-12 | 日本電気株式会社 | 低抵抗タンタル薄膜の製造方法及び低抵抗タンタル配線並びに電極 |
KR100578976B1 (ko) * | 2004-10-15 | 2006-05-12 | 삼성에스디아이 주식회사 | 접착력이 우수한 다층 박막 및 이의 제조방법 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL124711C (US07655688-20100202-C00086.png) * | 1961-10-03 | |||
US3444015A (en) * | 1965-03-04 | 1969-05-13 | Sperry Rand Corp | Method of etching tantalum |
US3382053A (en) * | 1965-04-05 | 1968-05-07 | Western Electric Co | Tantalum films of unique structure |
US3726733A (en) * | 1970-02-10 | 1973-04-10 | Fujitsu Ltd | Method of manufacturing thin-film integrated circuits |
US3718565A (en) * | 1970-11-27 | 1973-02-27 | Bell Telephone Labor Inc | Technique for the fabrication of discrete rc structure |
-
1970
- 1970-11-05 FR FR7039766A patent/FR2112667A5/fr not_active Expired
-
1971
- 1971-10-20 US US00190906A patent/US3793175A/en not_active Expired - Lifetime
- 1971-10-22 BE BE774345A patent/BE774345A/xx not_active IP Right Cessation
- 1971-10-23 IT IT70487/71A patent/IT942744B/it active
- 1971-10-26 GB GB4975171A patent/GB1368139A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
GB1368139A (en) | 1974-09-25 |
US3793175A (en) | 1974-02-19 |
DE2155056A1 (de) | 1972-05-10 |
FR2112667A5 (US07655688-20100202-C00086.png) | 1972-06-23 |
DE2155056B2 (de) | 1977-03-31 |
BE774345A (fr) | 1972-02-14 |
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