CA970257A - Insulating layer on a semiconductor substrate - Google Patents

Insulating layer on a semiconductor substrate

Info

Publication number
CA970257A
CA970257A CA105,339A CA105339A CA970257A CA 970257 A CA970257 A CA 970257A CA 105339 A CA105339 A CA 105339A CA 970257 A CA970257 A CA 970257A
Authority
CA
Canada
Prior art keywords
insulating layer
semiconductor substrate
semiconductor
substrate
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA105,339A
Inventor
Dietrich Widmann
Dirk Limann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of CA970257A publication Critical patent/CA970257A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02172—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides
    • H01L21/02175—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal
    • H01L21/02186—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal the material containing titanium, e.g. TiO2
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    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/02227—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process
    • H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
    • H01L21/02244—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate of a metallic layer
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    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
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Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
CA105,339A 1970-02-13 1971-02-13 Insulating layer on a semiconductor substrate Expired CA970257A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702006703 DE2006703A1 (en) 1970-02-13 1970-02-13 Insulation layer on a semiconductor base body

Publications (1)

Publication Number Publication Date
CA970257A true CA970257A (en) 1975-07-01

Family

ID=5762226

Family Applications (1)

Application Number Title Priority Date Filing Date
CA105,339A Expired CA970257A (en) 1970-02-13 1971-02-13 Insulating layer on a semiconductor substrate

Country Status (8)

Country Link
AT (1) AT327291B (en)
CA (1) CA970257A (en)
CH (1) CH522960A (en)
DE (1) DE2006703A1 (en)
FR (1) FR2079406B1 (en)
GB (1) GB1312183A (en)
NL (1) NL7101934A (en)
SE (1) SE365900B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2188308B1 (en) * 1972-06-02 1977-04-01 Thomson Csf
NL184184C (en) * 1981-03-20 1989-05-01 Philips Nv METHOD FOR APPLYING CONTACT INCREASES TO CONTACT PLACES OF AN ELECTRONIC MICROCKETES

Also Published As

Publication number Publication date
NL7101934A (en) 1971-08-17
AT327291B (en) 1976-01-26
SE365900B (en) 1974-04-01
CH522960A (en) 1972-05-15
GB1312183A (en) 1973-04-04
DE2006703A1 (en) 1971-08-26
FR2079406A1 (en) 1971-11-12
ATA102271A (en) 1975-04-15
FR2079406B1 (en) 1976-10-29

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