IT8247840A0 - Perfezionamento nei transistori di potenza mos - Google Patents

Perfezionamento nei transistori di potenza mos

Info

Publication number
IT8247840A0
IT8247840A0 IT8247840A IT4784082A IT8247840A0 IT 8247840 A0 IT8247840 A0 IT 8247840A0 IT 8247840 A IT8247840 A IT 8247840A IT 4784082 A IT4784082 A IT 4784082A IT 8247840 A0 IT8247840 A0 IT 8247840A0
Authority
IT
Italy
Prior art keywords
improvement
power transistors
mos power
mos
transistors
Prior art date
Application number
IT8247840A
Other languages
English (en)
Other versions
IT1154298B (it
Inventor
Thorndike C T New
Lewis E Terry
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Publication of IT8247840A0 publication Critical patent/IT8247840A0/it
Application granted granted Critical
Publication of IT1154298B publication Critical patent/IT1154298B/it

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76Unipolar devices, e.g. field effect transistors
    • H01L29/772Field effect transistors
    • H01L29/78Field effect transistors with field effect produced by an insulated gate
    • H01L29/7801DMOS transistors, i.e. MISFETs with a channel accommodating body or base region adjoining a drain drift region
    • H01L29/7802Vertical DMOS transistors, i.e. VDMOS transistors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/02Semiconductor bodies ; Multistep manufacturing processes therefor
    • H01L29/06Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
    • H01L29/08Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
    • H01L29/0843Source or drain regions of field-effect devices
    • H01L29/0847Source or drain regions of field-effect devices of field-effect transistors with insulated gate

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
IT47840/82A 1981-02-23 1982-02-22 Perfezionemento nei transistori di potenza mos IT1154298B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US23732381A 1981-02-23 1981-02-23

Publications (2)

Publication Number Publication Date
IT8247840A0 true IT8247840A0 (it) 1982-02-22
IT1154298B IT1154298B (it) 1987-01-21

Family

ID=22893251

Family Applications (1)

Application Number Title Priority Date Filing Date
IT47840/82A IT1154298B (it) 1981-02-23 1982-02-22 Perfezionemento nei transistori di potenza mos

Country Status (3)

Country Link
EP (1) EP0077337A1 (it)
IT (1) IT1154298B (it)
WO (1) WO1982002981A1 (it)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4803532A (en) * 1982-11-27 1989-02-07 Nissan Motor Co., Ltd. Vertical MOSFET having a proof structure against puncture due to breakdown
FR2537780A1 (fr) * 1982-12-08 1984-06-15 Radiotechnique Compelec Dispositif mos fet de puissance a structure plane multicellulaire
JPS59167066A (ja) * 1983-03-14 1984-09-20 Nissan Motor Co Ltd 縦形mosfet
US4798810A (en) * 1986-03-10 1989-01-17 Siliconix Incorporated Method for manufacturing a power MOS transistor
US4883767A (en) * 1986-12-05 1989-11-28 General Electric Company Method of fabricating self aligned semiconductor devices
US4956700A (en) * 1987-08-17 1990-09-11 Siliconix Incorporated Integrated circuit with high power, vertical output transistor capability
DE3851815T2 (de) * 1987-09-24 1995-05-24 Mitsubishi Electric Corp Feldeffekttransistor und dessen Herstellungsmethode.
JP2604777B2 (ja) * 1988-01-18 1997-04-30 松下電工株式会社 二重拡散型電界効果半導体装置の製法
JPH0247874A (ja) * 1988-08-10 1990-02-16 Fuji Electric Co Ltd Mos型半導体装置の製造方法
US5184201A (en) * 1989-06-07 1993-02-02 Kabushiki Kaisha Toyoda Jidoshokki Seisakusho Static induction transistor
JP2752184B2 (ja) * 1989-09-11 1998-05-18 株式会社東芝 電力用半導体装置
JPH05160407A (ja) * 1991-12-09 1993-06-25 Nippondenso Co Ltd 縦型絶縁ゲート型半導体装置およびその製造方法
US6008092A (en) * 1996-02-12 1999-12-28 International Rectifier Corporation Short channel IGBT with improved forward voltage drop and improved switching power loss
DE19608003C2 (de) * 1996-03-04 2001-11-29 Daimler Chrysler Ag Leistungs-Feldeffekt-Transistor und Verfahren zu seiner Herstellung
US5821583A (en) * 1996-03-06 1998-10-13 Siliconix Incorporated Trenched DMOS transistor with lightly doped tub
EP1126527A4 (en) * 1999-04-09 2007-06-13 Shindengen Electric Mfg HIGH VOLTAGE SEMICONDUCTOR DEVICE

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4055884A (en) * 1976-12-13 1977-11-01 International Business Machines Corporation Fabrication of power field effect transistors and the resulting structures
JPS5374385A (en) * 1976-12-15 1978-07-01 Hitachi Ltd Manufacture of field effect semiconductor device
JPS54885A (en) * 1977-06-03 1979-01-06 Nec Corp Manufacture of field effect transistor
US4206469A (en) * 1978-09-15 1980-06-03 Westinghouse Electric Corp. Power metal-oxide-semiconductor-field-effect-transistor
JPS6041876B2 (ja) * 1979-12-17 1985-09-19 株式会社日立製作所 絶縁ゲ−ト型電界効果トランジスタの製造方法

Also Published As

Publication number Publication date
WO1982002981A1 (en) 1982-09-02
EP0077337A1 (en) 1983-04-27
IT1154298B (it) 1987-01-21

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