IT7926278A0 - Gruppo trasduttore di pressione a semi-conduttori. - Google Patents

Gruppo trasduttore di pressione a semi-conduttori.

Info

Publication number
IT7926278A0
IT7926278A0 IT7926278A IT2627879A IT7926278A0 IT 7926278 A0 IT7926278 A0 IT 7926278A0 IT 7926278 A IT7926278 A IT 7926278A IT 2627879 A IT2627879 A IT 2627879A IT 7926278 A0 IT7926278 A0 IT 7926278A0
Authority
IT
Italy
Prior art keywords
semi
pressure transducer
transducer assembly
conductor pressure
conductor
Prior art date
Application number
IT7926278A
Other languages
English (en)
Inventor
Takahashi Minoru
Minorikawa Hitoshi
Yamada Kazuji
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of IT7926278A0 publication Critical patent/IT7926278A0/it

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73265—Layer and wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/1015—Shape
    • H01L2924/10155—Shape being other than a cuboid
    • H01L2924/10158—Shape being other than a cuboid at the passive surface

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
IT7926278A 1978-10-06 1979-10-05 Gruppo trasduttore di pressione a semi-conduttori. IT7926278A0 (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12254078A JPS5550668A (en) 1978-10-06 1978-10-06 Semiconductor pressure converter

Publications (1)

Publication Number Publication Date
IT7926278A0 true IT7926278A0 (it) 1979-10-05

Family

ID=14838386

Family Applications (1)

Application Number Title Priority Date Filing Date
IT7926278A IT7926278A0 (it) 1978-10-06 1979-10-05 Gruppo trasduttore di pressione a semi-conduttori.

Country Status (6)

Country Link
JP (1) JPS5550668A (it)
AU (1) AU5117679A (it)
DE (1) DE2940497A1 (it)
FR (1) FR2438264A1 (it)
GB (1) GB2034970A (it)
IT (1) IT7926278A0 (it)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57142533A (en) * 1981-02-27 1982-09-03 Mitsubishi Electric Corp Pressure sensor
JPS6056244U (ja) * 1983-09-26 1985-04-19 住友電気工業株式会社 半導体圧力センサ
JPS60149369A (ja) * 1984-01-14 1985-08-06 Hitoshi Nagaoka 霊芝菌糸体エキスおよびその製造方法
GB2229816B (en) * 1989-03-31 1992-11-18 Stc Plc Pressure sensor
JPH0465643A (ja) * 1990-07-05 1992-03-02 Mitsubishi Electric Corp 半導体圧力センサ及びその製造方法
DE4309917A1 (de) * 1992-03-30 1993-10-07 Awa Microelectronics Verfahren zur Herstellung von Siliziummikrostrukturen sowie Siliziummikrostruktur
AU660358B2 (en) * 1992-03-30 1995-06-22 Awa Microelectronics Pty Limited Silicon transducer
US6647794B1 (en) * 2002-05-06 2003-11-18 Rosemount Inc. Absolute pressure sensor
TWI583931B (zh) * 2016-02-02 2017-05-21 Asia Pacific Microsystems Inc Miniature piezoresistive pressure sensor

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL162254B (nl) * 1968-11-29 1979-11-15 Philips Nv Halfgeleiderinrichting voor het omzetten van mechanische spanningen in elektrische signalen en werkwijze voor het vervaardigen daarvan.
US3819431A (en) * 1971-10-05 1974-06-25 Kulite Semiconductor Products Method of making transducers employing integral protective coatings and supports
JPS5217780A (en) * 1975-07-04 1977-02-09 Hitachi Ltd Pressure convertor with semi-conductor elements
JPS52127257A (en) * 1976-04-19 1977-10-25 Hitachi Ltd Displacement converter

Also Published As

Publication number Publication date
GB2034970A (en) 1980-06-11
FR2438264A1 (fr) 1980-04-30
DE2940497A1 (de) 1980-04-10
JPS5550668A (en) 1980-04-12
AU5117679A (en) 1980-04-17

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