IT1293907B1 - Procedimento di fresatura di rotori di pompe turbomolecolari con inglobamento in resina del particolare da fresare. - Google Patents

Procedimento di fresatura di rotori di pompe turbomolecolari con inglobamento in resina del particolare da fresare.

Info

Publication number
IT1293907B1
IT1293907B1 IT97TO000454A ITTO970454A IT1293907B1 IT 1293907 B1 IT1293907 B1 IT 1293907B1 IT 97TO000454 A IT97TO000454 A IT 97TO000454A IT TO970454 A ITTO970454 A IT TO970454A IT 1293907 B1 IT1293907 B1 IT 1293907B1
Authority
IT
Italy
Prior art keywords
rotors
milled
parts
milling procedure
turbomolecular pumps
Prior art date
Application number
IT97TO000454A
Other languages
English (en)
Italian (it)
Inventor
Marco Marzio
Paolo Pellizzari
Dario Inserra
Original Assignee
Varian Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Spa filed Critical Varian Spa
Priority to IT97TO000454A priority Critical patent/IT1293907B1/it
Publication of ITTO970454A0 publication Critical patent/ITTO970454A0/it
Priority to DE69715823T priority patent/DE69715823T2/de
Priority to EP97202253A priority patent/EP0881030B1/en
Publication of ITTO970454A1 publication Critical patent/ITTO970454A1/it
Application granted granted Critical
Publication of IT1293907B1 publication Critical patent/IT1293907B1/it

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B23Q3/06Work-clamping means
    • B23Q3/08Work-clamping means other than mechanically-actuated
    • B23Q3/086Work-clamping means other than mechanically-actuated using a solidifying liquid, e.g. with freezing, setting or hardening means
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00Axial-flow pumps
    • F04D19/02Multi-stage pumps
    • F04D19/04Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042Turbomolecular vacuum pumps
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04DNON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00Details, component parts, or accessories
    • F04D29/26Rotors specially for elastic fluids
    • F04D29/32Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321Rotors specially for elastic fluids for axial flow pumps for axial flow compressors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
IT97TO000454A 1997-05-28 1997-05-28 Procedimento di fresatura di rotori di pompe turbomolecolari con inglobamento in resina del particolare da fresare. IT1293907B1 (it)

Priority Applications (3)

Application Number Priority Date Filing Date Title
IT97TO000454A IT1293907B1 (it) 1997-05-28 1997-05-28 Procedimento di fresatura di rotori di pompe turbomolecolari con inglobamento in resina del particolare da fresare.
DE69715823T DE69715823T2 (de) 1997-05-28 1997-07-18 Verfahren zum Fräsen des Rotors einer Turbomolekularpumpe
EP97202253A EP0881030B1 (en) 1997-05-28 1997-07-18 A process for milling the rotor of a turbomolecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT97TO000454A IT1293907B1 (it) 1997-05-28 1997-05-28 Procedimento di fresatura di rotori di pompe turbomolecolari con inglobamento in resina del particolare da fresare.

Publications (3)

Publication Number Publication Date
ITTO970454A0 ITTO970454A0 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1997-05-28
ITTO970454A1 ITTO970454A1 (it) 1998-11-28
IT1293907B1 true IT1293907B1 (it) 1999-03-11

Family

ID=11415738

Family Applications (1)

Application Number Title Priority Date Filing Date
IT97TO000454A IT1293907B1 (it) 1997-05-28 1997-05-28 Procedimento di fresatura di rotori di pompe turbomolecolari con inglobamento in resina del particolare da fresare.

Country Status (3)

Country Link
EP (1) EP0881030B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE69715823T2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
IT (1) IT1293907B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10210404A1 (de) * 2002-03-08 2003-09-18 Leybold Vakuum Gmbh Verfahren zur Herstellung des Rotors einer Reibungsvakuumpumpe sowie nach diesem Verfahren hergestellter Rotor
DE102006002617A1 (de) 2006-01-19 2007-07-26 Mtu Aero Engines Gmbh Verfahren zur Fräsbearbeitung von Bauteilen
DE502007003011D1 (de) * 2006-04-29 2010-04-15 Oerlikon Leybold Vacuum Gmbh Verfahren zur herstellung von rotoren oder statoren einer turbomolekularpumpe
GB2519531B (en) 2013-10-23 2016-06-29 Rolls Royce Plc Method and apparatus for supporting blades

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3623826A (en) * 1969-10-27 1971-11-30 Sargent Welch Scientific Co Turbine pump with improved rotor and seal constructions
DE2923632A1 (de) * 1979-06-11 1980-12-18 Leybold Heraeus Gmbh & Co Kg Verfahren zur herstellung eines schaufelkranzes fuer den rotor einer tubomolekularpumpe und mit schaufelkraenzen dieser art ausgeruesteter rotor
JPS5999001A (ja) * 1982-11-29 1984-06-07 Toshiba Corp セラミツクの加工方法
JPS6071138A (ja) * 1983-09-27 1985-04-23 Aisin Seiki Co Ltd セラミツクタ−ビンロ−タ−の加工方法
DE3535809A1 (de) * 1985-10-08 1987-04-09 Hauni Werke Koerber & Co Kg Halterungskoerper fuer werkstuecke, insbesondere turbinenschaufeln
FR2661631B1 (fr) * 1990-05-03 1995-05-05 Paul Magaud Procede de realisation d'un montage pour l'usinage de piece, avec bloc-support en matiere elastique, dispositif de montage pour l'usinage de piece, et procede de montage d'une piece a usiner.

Also Published As

Publication number Publication date
DE69715823T2 (de) 2003-07-31
ITTO970454A1 (it) 1998-11-28
EP0881030B1 (en) 2002-09-25
ITTO970454A0 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1997-05-28
EP0881030A1 (en) 1998-12-02
DE69715823D1 (de) 2002-10-31

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