DE69715823D1 - Verfahren zum Fräsen des Rotors einer Turbomolekularpumpe - Google Patents

Verfahren zum Fräsen des Rotors einer Turbomolekularpumpe

Info

Publication number
DE69715823D1
DE69715823D1 DE69715823T DE69715823T DE69715823D1 DE 69715823 D1 DE69715823 D1 DE 69715823D1 DE 69715823 T DE69715823 T DE 69715823T DE 69715823 T DE69715823 T DE 69715823T DE 69715823 D1 DE69715823 D1 DE 69715823D1
Authority
DE
Germany
Prior art keywords
milling
rotor
turbomolecular pump
turbomolecular
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69715823T
Other languages
English (en)
Other versions
DE69715823T2 (de
Inventor
Marco Marzio
Paolo Pellizzari
Dario Inserra
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian SpA filed Critical Varian SpA
Publication of DE69715823D1 publication Critical patent/DE69715823D1/de
Application granted granted Critical
Publication of DE69715823T2 publication Critical patent/DE69715823T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B23Q3/06—Work-clamping means
    • B23Q3/08—Work-clamping means other than mechanically-actuated
    • B23Q3/086—Work-clamping means other than mechanically-actuated using a solidifying liquid, e.g. with freezing, setting or hardening means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Processing And Handling Of Plastics And Other Materials For Molding In General (AREA)
DE69715823T 1997-05-28 1997-07-18 Verfahren zum Fräsen des Rotors einer Turbomolekularpumpe Expired - Fee Related DE69715823T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT97TO000454A IT1293907B1 (it) 1997-05-28 1997-05-28 Procedimento di fresatura di rotori di pompe turbomolecolari con inglobamento in resina del particolare da fresare.

Publications (2)

Publication Number Publication Date
DE69715823D1 true DE69715823D1 (de) 2002-10-31
DE69715823T2 DE69715823T2 (de) 2003-07-31

Family

ID=11415738

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69715823T Expired - Fee Related DE69715823T2 (de) 1997-05-28 1997-07-18 Verfahren zum Fräsen des Rotors einer Turbomolekularpumpe

Country Status (3)

Country Link
EP (1) EP0881030B1 (de)
DE (1) DE69715823T2 (de)
IT (1) IT1293907B1 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10210404A1 (de) * 2002-03-08 2003-09-18 Leybold Vakuum Gmbh Verfahren zur Herstellung des Rotors einer Reibungsvakuumpumpe sowie nach diesem Verfahren hergestellter Rotor
DE102006002617A1 (de) * 2006-01-19 2007-07-26 Mtu Aero Engines Gmbh Verfahren zur Fräsbearbeitung von Bauteilen
EP2013482B1 (de) * 2006-04-29 2014-11-05 Oerlikon Leybold Vacuum GmbH Rotoren oder statoren einer turbomolekularpumpe
GB2519531B (en) * 2013-10-23 2016-06-29 Rolls Royce Plc Method and apparatus for supporting blades

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3623826A (en) * 1969-10-27 1971-11-30 Sargent Welch Scientific Co Turbine pump with improved rotor and seal constructions
DE2923632A1 (de) * 1979-06-11 1980-12-18 Leybold Heraeus Gmbh & Co Kg Verfahren zur herstellung eines schaufelkranzes fuer den rotor einer tubomolekularpumpe und mit schaufelkraenzen dieser art ausgeruesteter rotor
JPS5999001A (ja) * 1982-11-29 1984-06-07 Toshiba Corp セラミツクの加工方法
JPS6071138A (ja) * 1983-09-27 1985-04-23 Aisin Seiki Co Ltd セラミツクタ−ビンロ−タ−の加工方法
DE3535809A1 (de) * 1985-10-08 1987-04-09 Hauni Werke Koerber & Co Kg Halterungskoerper fuer werkstuecke, insbesondere turbinenschaufeln
FR2661631B1 (fr) * 1990-05-03 1995-05-05 Paul Magaud Procede de realisation d'un montage pour l'usinage de piece, avec bloc-support en matiere elastique, dispositif de montage pour l'usinage de piece, et procede de montage d'une piece a usiner.

Also Published As

Publication number Publication date
ITTO970454A1 (it) 1998-11-28
ITTO970454A0 (de) 1997-05-28
EP0881030A1 (de) 1998-12-02
DE69715823T2 (de) 2003-07-31
IT1293907B1 (it) 1999-03-11
EP0881030B1 (de) 2002-09-25

Similar Documents

Publication Publication Date Title
DE69420745D1 (de) Zentrifugal-oder halbaxialturbomaschinen
GB9517369D0 (en) Bladed rotor
GB2286431B (en) Turbomachine rotor
DE69504071D1 (de) Turbomaschine
DE69613111D1 (de) Methode zur auswuchtung eines beschaufelten rotors
KR970058416U (ko) 세탁기의 회전익
FI981353A0 (fi) Menetelmä tahtikoneen roottorikulmaestimaatin virheen minimoimiseksi
FR2731466B1 (fr) Stator de turbomachine
DE69204668D1 (de) Verfahren zur Abdichtung des Rotors einer geothermischen Nassdampfturbine.
GB2293212B (en) Rotor for a turbomachine
DE69728500D1 (de) Turbomaschinenrotor
DE69712978D1 (de) Werkzeug zum Montieren von Statorsegmenten einer Turbomaschine
DE69715823D1 (de) Verfahren zum Fräsen des Rotors einer Turbomolekularpumpe
DE19728384B8 (de) Rotierendes Schaftwerkzeug
FI971035A0 (fi) Biokonversioprosessi trans-hydroksisulfonin syntetisoimiseksi
KR970051860U (ko) 세탁기의 회전익
DE59710425D1 (de) Rotor einer Strömungsmaschine
DE69604649D1 (de) Rotierende Anordnung zur Lagerung des Rotors einer Vakuumpumpe
DE59709507D1 (de) Rotor einer Strömungsmaschine
KR950029045U (ko) 로터베이터용 경운날
KR960022723U (ko) 세탁기의 회전익
KR960017629U (ko) 세탁기의 회전익
KR970017995U (ko) 세탁기의 회전익
KR970023573U (ko) 세탁기의 회전익
KR970013711U (ko) 세탁기의 회전익

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee