IT1279238B1 - Sistema continuo di evaporazione con ossidazione assistita da plasma, per depositare sotto vuoto ossidi di metalli su pellicole plastiche - Google Patents

Sistema continuo di evaporazione con ossidazione assistita da plasma, per depositare sotto vuoto ossidi di metalli su pellicole plastiche

Info

Publication number
IT1279238B1
IT1279238B1 IT95FI000136A ITFI950136A IT1279238B1 IT 1279238 B1 IT1279238 B1 IT 1279238B1 IT 95FI000136 A IT95FI000136 A IT 95FI000136A IT FI950136 A ITFI950136 A IT FI950136A IT 1279238 B1 IT1279238 B1 IT 1279238B1
Authority
IT
Italy
Prior art keywords
plasma
under vacuum
metal oxides
plastic films
evaporation system
Prior art date
Application number
IT95FI000136A
Other languages
English (en)
Inventor
Andrea Fusi
Original Assignee
Galileo Vacuum Tec Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Galileo Vacuum Tec Spa filed Critical Galileo Vacuum Tec Spa
Priority to IT95FI000136A priority Critical patent/IT1279238B1/it
Publication of ITFI950136A0 publication Critical patent/ITFI950136A0/it
Priority to EP96830340A priority patent/EP0750056A1/en
Publication of ITFI950136A1 publication Critical patent/ITFI950136A1/it
Application granted granted Critical
Publication of IT1279238B1 publication Critical patent/IT1279238B1/it

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
IT95FI000136A 1995-06-19 1995-06-19 Sistema continuo di evaporazione con ossidazione assistita da plasma, per depositare sotto vuoto ossidi di metalli su pellicole plastiche IT1279238B1 (it)

Priority Applications (2)

Application Number Priority Date Filing Date Title
IT95FI000136A IT1279238B1 (it) 1995-06-19 1995-06-19 Sistema continuo di evaporazione con ossidazione assistita da plasma, per depositare sotto vuoto ossidi di metalli su pellicole plastiche
EP96830340A EP0750056A1 (en) 1995-06-19 1996-06-14 Continuous vacuum evaporation system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT95FI000136A IT1279238B1 (it) 1995-06-19 1995-06-19 Sistema continuo di evaporazione con ossidazione assistita da plasma, per depositare sotto vuoto ossidi di metalli su pellicole plastiche

Publications (3)

Publication Number Publication Date
ITFI950136A0 ITFI950136A0 (it) 1995-06-19
ITFI950136A1 ITFI950136A1 (it) 1996-12-19
IT1279238B1 true IT1279238B1 (it) 1997-12-09

Family

ID=11351316

Family Applications (1)

Application Number Title Priority Date Filing Date
IT95FI000136A IT1279238B1 (it) 1995-06-19 1995-06-19 Sistema continuo di evaporazione con ossidazione assistita da plasma, per depositare sotto vuoto ossidi di metalli su pellicole plastiche

Country Status (2)

Country Link
EP (1) EP0750056A1 (it)
IT (1) IT1279238B1 (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2702184B1 (en) * 2011-04-29 2018-12-05 Applied Materials, Inc. Gas system for reactive deposition process

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3980044A (en) * 1972-03-06 1976-09-14 Balzers Patent Und Beteiligungs Ag Apparatus for depositing thin coats by vaporization under the simultaneous action of an ionized gas
US4526132A (en) * 1982-11-24 1985-07-02 Konishiroku Photo Industry Co., Ltd. Evaporator
JPS6154040A (ja) * 1984-08-24 1986-03-18 Fuji Photo Film Co Ltd 磁気記録媒体の製造方法
JPS6320447A (ja) * 1986-07-15 1988-01-28 Nisshin Steel Co Ltd 金属帯を連続的にセラミツクでコ−テイングする方法と装置
JPS63274762A (ja) * 1987-05-01 1988-11-11 Ulvac Corp 反応蒸着膜の形成装置
JPH01240646A (ja) * 1988-03-18 1989-09-26 Kawasaki Steel Corp 大量蒸着用ｈｃｄ法イオンプレーティング装置

Also Published As

Publication number Publication date
EP0750056A1 (en) 1996-12-27
ITFI950136A0 (it) 1995-06-19
ITFI950136A1 (it) 1996-12-19

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Legal Events

Date Code Title Description
0001 Granted
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19980626