IT1279080B1 - Processo di fabbricazione di circuiti in film sottile comprendenti condensatori integrati - Google Patents
Processo di fabbricazione di circuiti in film sottile comprendenti condensatori integratiInfo
- Publication number
- IT1279080B1 IT1279080B1 IT95MI002486A ITMI952486A IT1279080B1 IT 1279080 B1 IT1279080 B1 IT 1279080B1 IT 95MI002486 A IT95MI002486 A IT 95MI002486A IT MI952486 A ITMI952486 A IT MI952486A IT 1279080 B1 IT1279080 B1 IT 1279080B1
- Authority
- IT
- Italy
- Prior art keywords
- thin film
- manufacturing process
- process including
- including integrated
- film circuits
- Prior art date
Links
- 239000003990 capacitor Substances 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
- H01L28/40—Capacitors
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT95MI002486A IT1279080B1 (it) | 1995-11-29 | 1995-11-29 | Processo di fabbricazione di circuiti in film sottile comprendenti condensatori integrati |
EP96934619A EP0870326B1 (en) | 1995-11-29 | 1996-10-10 | Manufacturing process for thin-film circuits comprising integrated capacitors |
PCT/EP1996/004406 WO1997020345A1 (en) | 1995-11-29 | 1996-10-10 | Manufacturing process for thin-film circuits comprising integrated capacitors |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT95MI002486A IT1279080B1 (it) | 1995-11-29 | 1995-11-29 | Processo di fabbricazione di circuiti in film sottile comprendenti condensatori integrati |
Publications (3)
Publication Number | Publication Date |
---|---|
ITMI952486A0 ITMI952486A0 (it) | 1995-11-29 |
ITMI952486A1 ITMI952486A1 (it) | 1997-05-29 |
IT1279080B1 true IT1279080B1 (it) | 1997-12-04 |
Family
ID=11372617
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT95MI002486A IT1279080B1 (it) | 1995-11-29 | 1995-11-29 | Processo di fabbricazione di circuiti in film sottile comprendenti condensatori integrati |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0870326B1 (it) |
IT (1) | IT1279080B1 (it) |
WO (1) | WO1997020345A1 (it) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002025709A2 (en) * | 2000-09-21 | 2002-03-28 | Casper Michael D | Integrated thin film capacitor/inductor/interconnect system and method |
CN110491830B (zh) * | 2019-07-18 | 2022-08-19 | 福建省福联集成电路有限公司 | 一种空气桥制作方法及具有该空气桥的器件 |
CN117524828B (zh) * | 2024-01-05 | 2024-04-09 | 合肥晶合集成电路股份有限公司 | 溅射刻蚀方法及半导体结构 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4436766A (en) * | 1981-05-15 | 1984-03-13 | The United States Of America As Represented By The Secretary Of The Navy | Plated bridge step-over connection for monolithic devices and method for making thereof |
EP0670668B1 (en) * | 1993-12-22 | 1998-01-28 | Italtel s.p.a. | Process for the provision of metallized holes in dielectric substrates comprising interconnected thin film conductive and/or resistive paths |
-
1995
- 1995-11-29 IT IT95MI002486A patent/IT1279080B1/it active IP Right Grant
-
1996
- 1996-10-10 EP EP96934619A patent/EP0870326B1/en not_active Expired - Lifetime
- 1996-10-10 WO PCT/EP1996/004406 patent/WO1997020345A1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
EP0870326B1 (en) | 2000-05-31 |
ITMI952486A1 (it) | 1997-05-29 |
EP0870326A1 (en) | 1998-10-14 |
WO1997020345A1 (en) | 1997-06-05 |
ITMI952486A0 (it) | 1995-11-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
0001 | Granted |