IT1209570B - Perfezionamento nei reattori epitassiali. - Google Patents
Perfezionamento nei reattori epitassiali.Info
- Publication number
- IT1209570B IT1209570B IT8421960A IT2196084A IT1209570B IT 1209570 B IT1209570 B IT 1209570B IT 8421960 A IT8421960 A IT 8421960A IT 2196084 A IT2196084 A IT 2196084A IT 1209570 B IT1209570 B IT 1209570B
- Authority
- IT
- Italy
- Prior art keywords
- improvement
- epitaxial reactors
- epitaxial
- reactors
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/12—Substrate holders or susceptors
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/10—Heating of the reaction chamber or the substrate
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT8421960A IT1209570B (it) | 1984-07-19 | 1984-07-19 | Perfezionamento nei reattori epitassiali. |
CH2789/85A CH666140A5 (it) | 1984-07-19 | 1985-06-28 | Reattore epitassiale con campana di quarzo e suscettore di grafite. |
FR8510992A FR2567921B1 (fr) | 1984-07-19 | 1985-07-18 | Perfectionnements aux reacteurs epitaxiques |
JP60157106A JPH0644557B2 (ja) | 1984-07-19 | 1985-07-18 | エピタキシー反応器 |
NL8502087A NL8502087A (nl) | 1984-07-19 | 1985-07-19 | Reactievat. |
DE19853525870 DE3525870A1 (de) | 1984-07-19 | 1985-07-19 | Epitaxialreaktor |
US07/073,483 US4858557A (en) | 1984-07-19 | 1987-07-15 | Epitaxial reactors |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT8421960A IT1209570B (it) | 1984-07-19 | 1984-07-19 | Perfezionamento nei reattori epitassiali. |
Publications (2)
Publication Number | Publication Date |
---|---|
IT8421960A0 IT8421960A0 (it) | 1984-07-19 |
IT1209570B true IT1209570B (it) | 1989-08-30 |
Family
ID=11189425
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT8421960A IT1209570B (it) | 1984-07-19 | 1984-07-19 | Perfezionamento nei reattori epitassiali. |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPH0644557B2 (it) |
CH (1) | CH666140A5 (it) |
DE (1) | DE3525870A1 (it) |
FR (1) | FR2567921B1 (it) |
IT (1) | IT1209570B (it) |
NL (1) | NL8502087A (it) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1215444B (it) * | 1987-04-24 | 1990-02-14 | L P E S P A | Perfezionamenti ad induttori e suscettori impiegabili in reattori epitassiali. |
JPS636725U (it) * | 1986-07-01 | 1988-01-18 | ||
DE3827506C1 (en) * | 1988-08-12 | 1990-01-11 | Marino 8011 Baldham De Pradetto | Device and method for epitaxial deposition of especially semiconductor material onto silicon wafers from the gaseous state |
IT1392068B1 (it) * | 2008-11-24 | 2012-02-09 | Lpe Spa | Camera di reazione di un reattore epitassiale |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3424298A (en) * | 1967-03-22 | 1969-01-28 | Price Wilson Ltd Price Wilson | Ammunition holder |
US3699398A (en) * | 1971-10-12 | 1972-10-17 | Reed A Newmeyer | Sensor for vehicular traffic counters |
DD96852A1 (it) * | 1972-05-09 | 1973-04-12 | ||
US4284867A (en) * | 1979-02-09 | 1981-08-18 | General Instrument Corporation | Chemical vapor deposition reactor with infrared reflector |
US4322592A (en) * | 1980-08-22 | 1982-03-30 | Rca Corporation | Susceptor for heating semiconductor substrates |
JPS59111997A (ja) * | 1982-12-14 | 1984-06-28 | Kyushu Denshi Kinzoku Kk | エピタキシヤル成長装置 |
DE3485898D1 (de) * | 1983-12-09 | 1992-10-01 | Applied Materials Inc | Induktiv beheitzter reaktor zur chemischen abscheidung aus der dampfphase. |
DD221973A1 (de) * | 1984-03-20 | 1985-05-08 | Goerlitz Waggonbau Veb | Fussboden fuer schienenfahrzeuge, insbesondere trieb- und reisezugwagen |
-
1984
- 1984-07-19 IT IT8421960A patent/IT1209570B/it active
-
1985
- 1985-06-28 CH CH2789/85A patent/CH666140A5/it not_active IP Right Cessation
- 1985-07-18 FR FR8510992A patent/FR2567921B1/fr not_active Expired
- 1985-07-18 JP JP60157106A patent/JPH0644557B2/ja not_active Expired - Fee Related
- 1985-07-19 DE DE19853525870 patent/DE3525870A1/de not_active Ceased
- 1985-07-19 NL NL8502087A patent/NL8502087A/nl not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
JPH0644557B2 (ja) | 1994-06-08 |
FR2567921B1 (fr) | 1988-04-15 |
JPS6136924A (ja) | 1986-02-21 |
IT8421960A0 (it) | 1984-07-19 |
CH666140A5 (it) | 1988-06-30 |
FR2567921A1 (fr) | 1986-01-24 |
DE3525870A1 (de) | 1986-01-23 |
NL8502087A (nl) | 1986-02-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3579440D1 (de) | Kopfstuetze. | |
NO854639L (no) | Formgitte hydrogelgjenstander. | |
DE3576064D1 (de) | Melkkreuz. | |
FI843385A0 (fi) | Anordning i virvelbaeddsreaktor. | |
DE3579704D1 (de) | Flachzelle. | |
FI844903L (fi) | Anordning foer att slao in en artikel med en toejbar plastfilm. | |
DE3578058D1 (de) | Schiffsbodenstruktur. | |
FI852527L (fi) | Alifatiska tioetrar. | |
NO161033C (no) | Foradditiv med hoeyt propylenglycolinnhold. | |
FI850441L (fi) | Elektrolytisk cell. | |
DE3581253D1 (de) | S-korrigierte ablenkschaltung. | |
KR850009994U (ko) | 리크라이너 | |
IT1209570B (it) | Perfezionamento nei reattori epitassiali. | |
FI850783L (fi) | Gasutvecklingsanordning med flere i en tryckgasbehaollare insatta gasflaskor. | |
FI842051A0 (fi) | Daempningsventil foer kopplingen i en traktors kraftoeverfoeringsaxel. | |
OA07951A (fr) | Perfectionnement aux constructions verticales. | |
FI843081A (fi) | Dubbelviraformare i pappersmaskin. | |
FI842050A (fi) | Banformningsparti i pappersmaskin. | |
ES279954Y (es) | Asiento mejorado | |
FI844057A (fi) | Vertikal vaegg i uppvaermd byggnad. | |
ES283399Y (es) | Tapon-precinto con anti-giro | |
IT8430689V0 (it) | Vaschetta savoiardi. | |
ATE48798T1 (de) | Schabloniervorrichtung. | |
FI843181A0 (fi) | Stegloes kuggvaexel. no = 842881a | |
FI843191A0 (fi) | Automatisk momentfrikoppling. no = 842942a |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19970730 |