IT1175968B - PROCEDURE FOR MANUFACTURING SEMICONDUCTOR MATERIALS AND RELATED EQUIPMENT - Google Patents

PROCEDURE FOR MANUFACTURING SEMICONDUCTOR MATERIALS AND RELATED EQUIPMENT

Info

Publication number
IT1175968B
IT1175968B IT20408/84A IT2040884A IT1175968B IT 1175968 B IT1175968 B IT 1175968B IT 20408/84 A IT20408/84 A IT 20408/84A IT 2040884 A IT2040884 A IT 2040884A IT 1175968 B IT1175968 B IT 1175968B
Authority
IT
Italy
Prior art keywords
procedure
semiconductor materials
manufacturing semiconductor
related equipment
equipment
Prior art date
Application number
IT20408/84A
Other languages
Italian (it)
Other versions
IT8420408A0 (en
Inventor
Shimizu Hirofumi
Fujita Masato
Suzuki Kazuya
Hanagata Fumiaki
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Publication of IT8420408A0 publication Critical patent/IT8420408A0/en
Application granted granted Critical
Publication of IT1175968B publication Critical patent/IT1175968B/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14—Heating of the melt or the crystallised materials
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
IT20408/84A 1983-04-08 1984-04-05 PROCEDURE FOR MANUFACTURING SEMICONDUCTOR MATERIALS AND RELATED EQUIPMENT IT1175968B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58060757A JPS59190300A (en) 1983-04-08 1983-04-08 Method and apparatus for production of semiconductor

Publications (2)

Publication Number Publication Date
IT8420408A0 IT8420408A0 (en) 1984-04-05
IT1175968B true IT1175968B (en) 1987-08-12

Family

ID=13151461

Family Applications (1)

Application Number Title Priority Date Filing Date
IT20408/84A IT1175968B (en) 1983-04-08 1984-04-05 PROCEDURE FOR MANUFACTURING SEMICONDUCTOR MATERIALS AND RELATED EQUIPMENT

Country Status (6)

Country Link
JP (1) JPS59190300A (en)
KR (1) KR840008533A (en)
DE (1) DE3413082A1 (en)
FR (2) FR2543980A1 (en)
GB (1) GB2137524A (en)
IT (1) IT1175968B (en)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61219795A (en) * 1985-03-25 1986-09-30 Mitsubishi Metal Corp Silicon single crystal wafer speedy in forming velocity of deposited nucleus and its production
JPS61222999A (en) * 1985-03-27 1986-10-03 Dowa Mining Co Ltd Method of improving electric characteristics of single crystal of compound semiconductor of group iii-v
JPH0787187B2 (en) * 1987-08-13 1995-09-20 古河電気工業株式会社 Method for manufacturing GaAs compound semiconductor substrate
JPS6472999A (en) * 1987-09-14 1989-03-17 Nippon Mining Co Heat treatment of compound semiconductor single crystal
JPS6472997A (en) * 1987-09-14 1989-03-17 Nippon Mining Co Heat treatment of compound semiconductor single crystal
WO1989008158A1 (en) * 1988-02-24 1989-09-08 Nippon Mining Co., Ltd. Single crystal of compound semiconductor, process for its production and semiconductor device manufactured by using same
US5209811A (en) * 1988-03-25 1993-05-11 Shin-Etsu Handotai Company Limited Of Japan Method for heat-treating gallium arsenide monocrystals
US5228927A (en) * 1988-03-25 1993-07-20 Shin-Etsu Handotai Company Limited Method for heat-treating gallium arsenide monocrystals
JPH0653639B2 (en) * 1988-10-31 1994-07-20 株式会社ジャパンエナジー Method for producing compound semiconductor single crystal
JPH02263792A (en) * 1989-03-31 1990-10-26 Shin Etsu Handotai Co Ltd Heat treatment of silicon
JPH0633236B2 (en) * 1989-09-04 1994-05-02 新日本製鐵株式会社 Method and apparatus for heat treating silicon single crystal and manufacturing apparatus
JPH04215439A (en) * 1990-12-14 1992-08-06 Nikko Kyodo Co Ltd Manufacture of gaas single crystal substrate
CN1280455C (en) 1997-04-09 2006-10-18 Memc电子材料有限公司 Low defect density silicon
DE69841714D1 (en) 1997-04-09 2010-07-22 Memc Electronic Materials Silicon with low defect density and ideal oxygen precipitation
JP2003517412A (en) * 1998-06-26 2003-05-27 エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド Method for growing defect-free silicon crystals with arbitrarily large diameter
DE69908965T2 (en) 1998-10-14 2004-05-13 Memc Electronic Materials, Inc. HEAT TEMPERATURE SINGLE CRYSTAL SILICON WITH LOW ERROR DENSITY
US6284039B1 (en) 1998-10-14 2001-09-04 Memc Electronic Materials, Inc. Epitaxial silicon wafers substantially free of grown-in defects
US6312516B2 (en) 1998-10-14 2001-11-06 Memc Electronic Materials, Inc. Process for preparing defect free silicon crystals which allows for variability in process conditions
US7105050B2 (en) 2000-11-03 2006-09-12 Memc Electronic Materials, Inc. Method for the production of low defect density silicon
US6858307B2 (en) 2000-11-03 2005-02-22 Memc Electronic Materials, Inc. Method for the production of low defect density silicon
US6689209B2 (en) * 2000-11-03 2004-02-10 Memc Electronic Materials, Inc. Process for preparing low defect density silicon using high growth rates
US6846539B2 (en) 2001-01-26 2005-01-25 Memc Electronic Materials, Inc. Low defect density silicon having a vacancy-dominated core substantially free of oxidation induced stacking faults
WO2004003265A1 (en) * 2002-07-01 2004-01-08 Sumitomo Titanium Corporation Silicon single crystal material and its production method
MY157902A (en) 2006-05-19 2016-08-15 Memc Electronic Materials Controlling agglomerated point defect and oxygen cluster formation induced by the lateral surface of a silicon single crystal during cz growth
CN101660209B (en) * 2009-06-25 2012-05-30 南安市三晶阳光电力有限公司 Method and device for reducing polysilicon cast ingot stress
CN102094248B (en) * 2010-12-31 2012-07-11 东莞市中镓半导体科技有限公司 Annealing device and method
JP6287462B2 (en) * 2014-03-27 2018-03-07 三菱マテリアル株式会社 Electrode plate for plasma processing apparatus and method for manufacturing the same
US11739437B2 (en) 2018-12-27 2023-08-29 Globalwafers Co., Ltd. Resistivity stabilization measurement of fat neck slabs for high resistivity and ultra-high resistivity single crystal silicon ingot growth

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1719021B1 (en) * 1963-07-13 1969-09-11 Siemens Ag Method for reducing the cross section of a vertically arranged rod of semiconductor material
CH458566A (en) * 1967-08-14 1968-06-30 Balzers Patent Beteilig Ag Method and device for zone melting in a vacuum with electron beam bombardment
GB1186127A (en) * 1968-01-05 1970-04-02 Dow Corning Method and Apparatus for Doping Semiconductors.
DE1769405B2 (en) * 1968-05-18 1972-08-03 Battelle-Entwicklungs-Gesellschaft mbH, 6000 Frankfurt PROCESS FOR THE PRODUCTION OF SINGLE CRYSTALS FROM MELTABLE SUBSTANCES
JPS5029405B1 (en) * 1971-02-06 1975-09-23
US3737282A (en) * 1971-10-01 1973-06-05 Ibm Method for reducing crystallographic defects in semiconductor structures
DE2436490C3 (en) * 1974-07-29 1978-12-07 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Process for phosphorus doping of weakly n-conducting silicon bodies
GB2080780B (en) * 1980-07-18 1983-06-29 Secr Defence Heat treatment of silicon slices
JPS5750427A (en) * 1980-09-12 1982-03-24 Ushio Inc Annealing device and annealing method
GB2116871B (en) * 1982-03-16 1985-11-13 Vnii Monokristallov Apparatus for growing single crystals from a melt using the czochralski method

Also Published As

Publication number Publication date
FR2543980A1 (en) 1984-10-12
JPH0453840B2 (en) 1992-08-27
GB8404092D0 (en) 1984-03-21
DE3413082A1 (en) 1984-10-11
IT8420408A0 (en) 1984-04-05
JPS59190300A (en) 1984-10-29
FR2543981A1 (en) 1984-10-12
GB2137524A (en) 1984-10-10
KR840008533A (en) 1984-12-15

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Legal Events

Date Code Title Description
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19940426