IT1154343B - Pompa molecolare a flusso assiale - Google Patents
Pompa molecolare a flusso assialeInfo
- Publication number
- IT1154343B IT1154343B IT49064/82A IT4906482A IT1154343B IT 1154343 B IT1154343 B IT 1154343B IT 49064/82 A IT49064/82 A IT 49064/82A IT 4906482 A IT4906482 A IT 4906482A IT 1154343 B IT1154343 B IT 1154343B
- Authority
- IT
- Italy
- Prior art keywords
- axial flow
- flow pump
- molecular
- molecular axial
- pump
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
- F16C32/0406—Magnetic bearings
- F16C32/044—Active magnetic bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56139556A JPS5841296A (ja) | 1981-09-04 | 1981-09-04 | 磁気軸受を応用した小型軸流分子ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
IT8249064A0 IT8249064A0 (it) | 1982-09-02 |
IT1154343B true IT1154343B (it) | 1987-01-21 |
Family
ID=15248006
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT49064/82A IT1154343B (it) | 1981-09-04 | 1982-09-02 | Pompa molecolare a flusso assiale |
Country Status (5)
Country | Link |
---|---|
US (1) | US4717315A (it) |
JP (1) | JPS5841296A (it) |
DE (1) | DE3232871A1 (it) |
FR (1) | FR2512507B1 (it) |
IT (1) | IT1154343B (it) |
Families Citing this family (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0646036B2 (ja) * | 1982-11-19 | 1994-06-15 | セイコー電子工業株式会社 | 軸流分子ポンプ |
JPS5999117A (ja) * | 1982-11-30 | 1984-06-07 | Toshiba Corp | 高速回転体装置 |
US4835114A (en) * | 1986-02-19 | 1989-05-30 | Hitachi, Ltd. | Method for LPCVD of semiconductors using oil free vacuum pumps |
JP2556320B2 (ja) * | 1987-03-18 | 1996-11-20 | セイコ−精機株式会社 | 真空ポンプ |
US4880362A (en) * | 1988-05-24 | 1989-11-14 | Laing Karsten A | Rotor with stabilizing magnets |
DE3818556A1 (de) * | 1988-06-01 | 1989-12-07 | Pfeiffer Vakuumtechnik | Magnetlager fuer eine schnell rotierende vakuumpumpe |
FR2659395B1 (fr) * | 1990-03-07 | 1992-05-15 | Cit Alcatel | Pompe a vide a suspension magnetique. |
FR2659396B1 (fr) * | 1990-03-07 | 1992-05-15 | Cit Alcatel | Pompe a vide pour vide moleculaire propre. |
JPH04219493A (ja) * | 1990-08-10 | 1992-08-10 | Ebara Corp | ターボ分子ポンプ |
US5501583A (en) * | 1992-08-19 | 1996-03-26 | Hitachi, Ltd. | Turbo vacuum pump |
JP2998441B2 (ja) * | 1992-08-19 | 2000-01-11 | 株式会社日立製作所 | ターボ真空ポンプ |
FR2715201B1 (fr) * | 1994-01-19 | 1996-02-09 | Inst Nat Polytech Grenoble | Palier magnétique et ensemble comportant une partie statorique et une partie rotorique suspendue par un tel palier. |
DE4427154A1 (de) * | 1994-08-01 | 1996-02-08 | Balzers Pfeiffer Gmbh | Reibungspumpe mit Magnetlagerung |
JPH08159157A (ja) * | 1994-12-05 | 1996-06-18 | Seiko Seiki Co Ltd | 磁気軸受装置 |
FR2728738B1 (fr) * | 1994-12-26 | 1997-01-31 | Cit Alcatel | Ensemble tournant comportant notamment des moyens de sustentation radiaux et une butee axiale magnetique |
DE19637270A1 (de) | 1996-09-13 | 1998-03-19 | Schlafhorst & Co W | Topfspinnvorrichtung |
US6129704A (en) | 1997-06-12 | 2000-10-10 | Schneider (Usa) Inc. | Perfusion balloon catheter having a magnetically driven impeller |
US6123522A (en) * | 1997-07-22 | 2000-09-26 | Koyo Seiko Co., Ltd. | Turbo molecular pump |
US6179573B1 (en) * | 1999-03-24 | 2001-01-30 | Varian, Inc. | Vacuum pump with inverted motor |
JP3215842B2 (ja) * | 1999-03-29 | 2001-10-09 | セイコーインスツルメンツ株式会社 | 磁気軸受保護装置及びターボ分子ポンプ |
US6412173B1 (en) | 1999-07-26 | 2002-07-02 | Phoenix Analysis And Design Technologies, Inc. | Miniature turbomolecular pump |
DE10043235A1 (de) * | 2000-09-02 | 2002-03-14 | Leybold Vakuum Gmbh | Vakuumpumpe |
JP2002242876A (ja) * | 2001-02-19 | 2002-08-28 | Stmp Kk | 磁気軸受式ポンプ |
US6770995B1 (en) * | 2001-09-22 | 2004-08-03 | Gerald K. Foshage | Passive radial magnetic bearing |
US7140833B2 (en) * | 2004-11-04 | 2006-11-28 | The Boc Group, Llc | Integrated turbo/drag/regenerative pump with counter-rotating turbo blades |
CA2638940C (en) * | 2008-08-28 | 2009-09-15 | Dalton Chemical Laboratories Inc. | Improved synthesis of hexahydrodibenzopyranones |
DE102016012252A1 (de) | 2016-07-13 | 2018-01-18 | Schwarzer Precision GmbH & Co. KG | Pumpenbaugruppe für eine Pumpe, Pumpe und Verfahren zur Verringerung oder Beseitigung von Störgeräuschen und/oder Vibrationen bei Pumpen |
JP6948147B2 (ja) * | 2017-04-18 | 2021-10-13 | エドワーズ株式会社 | 真空ポンプ、真空ポンプに備わる磁気軸受部およびシャフト |
GB2588146A (en) * | 2019-10-09 | 2021-04-21 | Edwards Ltd | Vacuum pump |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT942651B (it) * | 1971-09-30 | 1973-04-02 | Elettrorava Spa | Cuscinetto magnetico radiale |
DE2213470B2 (de) * | 1972-03-20 | 1980-04-10 | Padana Ag, Zug (Schweiz) | Magnetisches Lager |
DE2337226A1 (de) * | 1973-07-21 | 1975-02-06 | Maschf Augsburg Nuernberg Ag | Vakuumpumpe mit einem im innenraum ihres gehaeuses gelagerten laeufer |
DE2349033C3 (de) * | 1973-09-29 | 1984-08-30 | Leybold-Heraeus Gmbh, 5000 Koeln | Turbomolekularpumpe |
CH583856A5 (it) * | 1974-09-27 | 1977-01-14 | Balzers Patent Beteilig Ag | |
DE2457783C2 (de) * | 1974-12-06 | 1986-10-09 | Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar | Magnetische Lagerung |
JPS5226292A (en) * | 1975-08-23 | 1977-02-26 | Res Dev Corp Of Japan | Ion sensor |
FR2326270A1 (fr) * | 1975-10-02 | 1977-04-29 | Europ Propulsion | Montage de broche porte-outil, notamment pour rectifieuse |
DE2544726C2 (de) * | 1975-10-07 | 1983-08-18 | Teldix Gmbh, 6900 Heidelberg | Störkomponentenunterdrückung bei der magnetischen Radiallagerung eines Rotors |
FR2336602A1 (fr) * | 1975-12-24 | 1977-07-22 | Europ Propulsion | Dispositif de compensation des perturbations synchrones dans une suspension magnetique d'un rotor |
US4116592A (en) * | 1976-08-20 | 1978-09-26 | Viktor Yakovlevich Cherny | Turbomolecular high-vacuum pulp |
FR2377549A1 (fr) * | 1977-01-12 | 1978-08-11 | Europ Propulsion | Montage de rotor court de grand diametre |
DE2741062A1 (de) * | 1977-09-13 | 1979-03-22 | Teldix Gmbh | Anordnung zur magnetischen lagerung |
-
1981
- 1981-09-04 JP JP56139556A patent/JPS5841296A/ja active Pending
-
1982
- 1982-08-27 FR FR8214706A patent/FR2512507B1/fr not_active Expired
- 1982-09-02 IT IT49064/82A patent/IT1154343B/it active
- 1982-09-03 DE DE19823232871 patent/DE3232871A1/de not_active Withdrawn
-
1985
- 1985-01-25 US US06/694,907 patent/US4717315A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US4717315A (en) | 1988-01-05 |
DE3232871A1 (de) | 1983-03-24 |
IT8249064A0 (it) | 1982-09-02 |
FR2512507B1 (fr) | 1986-07-18 |
JPS5841296A (ja) | 1983-03-10 |
FR2512507A1 (fr) | 1983-03-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
IT1154343B (it) | Pompa molecolare a flusso assiale | |
IT8420405A0 (it) | Pompa a pistone. | |
IT8221837A0 (it) | Pompa d'iniezione di combustibile. | |
IT1142652B (it) | Pompa a stantuffo radiale | |
IT1148535B (it) | Pompa centrifuga per alte pressioni | |
IT1196536B (it) | Pompa a stantuffo con portata di mandata regolata | |
IT8223066A0 (it) | Pompa dosatrice. | |
DE3580074D1 (de) | Schlauchpumpe. | |
IT1205388B (it) | Pompa a stantuffi assiali | |
IT8121054A0 (it) | Pompa alternativa per fluidi con commutatore a effetto hall. | |
IT8583424A0 (it) | Pompa sommersa ad alta pressione. | |
IT8422050V0 (it) | Pompa centrifuga. | |
IT1237338B (it) | Pompa autoadescante. | |
IT8121958A0 (it) | Pompa a membrana. | |
IT1154566B (it) | Pompa per siringa ipodermica | |
IT8121689V0 (it) | Pompa manuale ad ingombro trasversale riducibile. | |
IT8219320A0 (it) | Pompa centrifuga. | |
NO863387D0 (no) | Fluidpumpe. | |
IT8453916V0 (it) | Pompa peristaltica | |
IT8420308A0 (it) | Pompa a palette. | |
IT8424064A0 (it) | Pompa nebulizzatrice a turbolenza. | |
IT1217259B (it) | Pompa a stantuffi radiali a portata regolabile | |
IT8420403A0 (it) | Pompa a girante. | |
IT1143528B (it) | Sistema a pompa di calore | |
IT8102117A0 (it) | Pompa idraulica tritto 2000 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
TA | Fee payment date (situation as of event date), data collected since 19931001 |
Effective date: 19970929 |