IT1153022B - Tavolo di incisione a radio requenza con organo di estensione polarizzato - Google Patents

Tavolo di incisione a radio requenza con organo di estensione polarizzato

Info

Publication number
IT1153022B
IT1153022B IT24237/82A IT2423782A IT1153022B IT 1153022 B IT1153022 B IT 1153022B IT 24237/82 A IT24237/82 A IT 24237/82A IT 2423782 A IT2423782 A IT 2423782A IT 1153022 B IT1153022 B IT 1153022B
Authority
IT
Italy
Prior art keywords
requence
radio
extension body
engraving table
polarized
Prior art date
Application number
IT24237/82A
Other languages
English (en)
Other versions
IT8224237A0 (it
Inventor
David James Harra
Frederick Thomas Turner
Original Assignee
Varia Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varia Associates Inc filed Critical Varia Associates Inc
Publication of IT8224237A0 publication Critical patent/IT8224237A0/it
Application granted granted Critical
Publication of IT1153022B publication Critical patent/IT1153022B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32697—Electrostatic control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
IT24237/82A 1981-11-12 1982-11-12 Tavolo di incisione a radio requenza con organo di estensione polarizzato IT1153022B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/320,385 US4392938A (en) 1981-11-12 1981-11-12 Radio frequency etch table with biased extension member

Publications (2)

Publication Number Publication Date
IT8224237A0 IT8224237A0 (it) 1982-11-12
IT1153022B true IT1153022B (it) 1987-01-14

Family

ID=23246176

Family Applications (1)

Application Number Title Priority Date Filing Date
IT24237/82A IT1153022B (it) 1981-11-12 1982-11-12 Tavolo di incisione a radio requenza con organo di estensione polarizzato

Country Status (6)

Country Link
US (1) US4392938A (it)
JP (1) JPS5889826A (it)
DE (1) DE3241391A1 (it)
FR (1) FR2516308B1 (it)
GB (1) GB2109282B (it)
IT (1) IT1153022B (it)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4473455A (en) * 1981-12-21 1984-09-25 At&T Bell Laboratories Wafer holding apparatus and method
JPS60213026A (ja) * 1984-04-09 1985-10-25 Kokusai Electric Co Ltd ドライエツチング装置
DE3835153A1 (de) * 1988-10-15 1990-04-26 Leybold Ag Vorrichtung zum aetzen von substraten durch eine glimmentladung
DE3900768C1 (en) * 1989-01-12 1990-02-22 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De Plasma etching device and method for operating it
US5102496A (en) * 1989-09-26 1992-04-07 Applied Materials, Inc. Particulate contamination prevention using low power plasma
US5498313A (en) * 1993-08-20 1996-03-12 International Business Machines Corp. Symmetrical etching ring with gas control
JP2659919B2 (ja) * 1994-01-13 1997-09-30 インターナショナル・ビジネス・マシーンズ・コーポレイション プラズマの不均一性を補正するプラズマ装置
US9287093B2 (en) * 2011-05-31 2016-03-15 Applied Materials, Inc. Dynamic ion radical sieve and ion radical aperture for an inductively coupled plasma (ICP) reactor
US11049701B2 (en) 2016-11-26 2021-06-29 Applied Materials, Inc. Biased cover ring for a substrate processing system
US10879052B2 (en) * 2018-11-21 2020-12-29 Taiwan Semiconductor Manufacturing Co., Ltd. Plasma processing apparatus and manufacturing method using the same

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB736512A (en) * 1952-08-25 1955-09-07 Edwards & Co London Ltd W Improvements in or relating to cathode sputtering apparatus
FR2082505A5 (it) * 1970-03-18 1971-12-10 Radiotechnique Compelec
JPS53123669A (en) * 1977-04-05 1978-10-28 Fujitsu Ltd Wafer holding method
US4261762A (en) * 1979-09-14 1981-04-14 Eaton Corporation Method for conducting heat to or from an article being treated under vacuum
US4297162A (en) * 1979-10-17 1981-10-27 Texas Instruments Incorporated Plasma etching using improved electrode
JPS5687672A (en) * 1979-12-15 1981-07-16 Anelva Corp Dry etching apparatus
JPS5687671A (en) * 1979-12-15 1981-07-16 Anelva Corp Dry etching apparatus
JPS5694745A (en) * 1979-12-28 1981-07-31 Sony Corp Plasma treatment device
JPS5796530A (en) * 1980-12-09 1982-06-15 Nec Corp Lasma etching device
JPS57149734A (en) * 1981-03-12 1982-09-16 Anelva Corp Plasma applying working device

Also Published As

Publication number Publication date
DE3241391A1 (de) 1983-05-19
FR2516308A1 (fr) 1983-05-13
GB2109282A (en) 1983-06-02
GB2109282B (en) 1985-09-04
IT8224237A0 (it) 1982-11-12
JPS5889826A (ja) 1983-05-28
US4392938A (en) 1983-07-12
FR2516308B1 (fr) 1988-12-23

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