IT1118869B - Utensile di afferramento e dispositivo di trasporto per manipolare piastrine di semicondottori - Google Patents

Utensile di afferramento e dispositivo di trasporto per manipolare piastrine di semicondottori

Info

Publication number
IT1118869B
IT1118869B IT49390/79A IT4939079A IT1118869B IT 1118869 B IT1118869 B IT 1118869B IT 49390/79 A IT49390/79 A IT 49390/79A IT 4939079 A IT4939079 A IT 4939079A IT 1118869 B IT1118869 B IT 1118869B
Authority
IT
Italy
Prior art keywords
semiconductors
transport device
gripping tool
handle plates
handle
Prior art date
Application number
IT49390/79A
Other languages
English (en)
Other versions
IT7949390A0 (it
Original Assignee
Codi Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Codi Corp filed Critical Codi Corp
Publication of IT7949390A0 publication Critical patent/IT7949390A0/it
Application granted granted Critical
Publication of IT1118869B publication Critical patent/IT1118869B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G7/00—Devices for assisting manual moving or tilting heavy loads
    • B65G7/12—Load carriers, e.g. hooks, slings, harness, gloves, modified for load carrying

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
IT49390/79A 1978-06-12 1979-06-12 Utensile di afferramento e dispositivo di trasporto per manipolare piastrine di semicondottori IT1118869B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/914,972 US4195871A (en) 1978-06-12 1978-06-12 Diffusion boat and grip

Publications (2)

Publication Number Publication Date
IT7949390A0 IT7949390A0 (it) 1979-06-12
IT1118869B true IT1118869B (it) 1986-03-03

Family

ID=25435026

Family Applications (1)

Application Number Title Priority Date Filing Date
IT49390/79A IT1118869B (it) 1978-06-12 1979-06-12 Utensile di afferramento e dispositivo di trasporto per manipolare piastrine di semicondottori

Country Status (5)

Country Link
US (1) US4195871A (it)
EP (1) EP0016071A4 (it)
JP (1) JPS55500686A (it)
IT (1) IT1118869B (it)
WO (1) WO1980000073A1 (it)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3024751C2 (de) * 1980-06-30 1982-06-03 Heraeus Quarzschmelze Gmbh, 6450 Hanau Trägerhorde aus Quarzglas
US4723799A (en) * 1985-09-13 1988-02-09 Wollmann Engineering, Inc. Wafer carrier transport system interface
US5100190A (en) * 1989-11-20 1992-03-31 Submicron Systems, Inc. Wafer carrier holder for wafer carriers
US5149158A (en) * 1989-11-20 1992-09-22 Submicron Systems, Inc. Wafer carrier holder for wafer carriers
US5029922A (en) * 1990-02-20 1991-07-09 Advanced Micro Devices, Inc. Wafer processing cassette handle
US5263774A (en) * 1992-03-04 1993-11-23 Kamyr, Inc. Rotor for increasing mixing efficiency in a medium consistency mixer
FR2693395B1 (fr) * 1992-07-08 1994-10-14 Sgs Thomson Microelectronics Outil de préhension de nacelles pour plaquettes de silicium.
US5364144A (en) * 1992-08-28 1994-11-15 Motorola, Inc. Cassette transporting apparatus
US5775752A (en) * 1996-05-20 1998-07-07 Niemirowski; George E. Holder for semiconductor wafer cassettes
FR2778496B1 (fr) 1998-05-05 2002-04-19 Recif Sa Procede et dispositif de changement de position d'une plaque de semi-conducteur
US6669253B2 (en) * 2000-12-18 2003-12-30 David W. Benzing Wafer boat and boat holder
US8814239B2 (en) * 2012-02-15 2014-08-26 Varian Semiconductor Equipment Associates, Inc. Techniques for handling media arrays
TWI651609B (zh) * 2017-02-09 2019-02-21 新唐科技股份有限公司 低電壓鎖定電路及其整合參考電壓產生電路之裝置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3861733A (en) * 1973-05-21 1975-01-21 Allied Chem Silicon semi-conductor wafer constraint
US3923191A (en) * 1974-09-11 1975-12-02 Fluoroware Inc Wafer basket and handle
US3951587A (en) * 1974-12-06 1976-04-20 Norton Company Silicon carbide diffusion furnace components

Also Published As

Publication number Publication date
IT7949390A0 (it) 1979-06-12
JPS55500686A (it) 1980-09-25
US4195871A (en) 1980-04-01
WO1980000073A1 (en) 1980-01-24
EP0016071A4 (en) 1980-10-09
EP0016071A1 (en) 1980-10-01

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