IT1114121B - Processo per la preparazione di sostanze resistive sensibili all'azione di un fascio di elettroni - Google Patents

Processo per la preparazione di sostanze resistive sensibili all'azione di un fascio di elettroni

Info

Publication number
IT1114121B
IT1114121B IT26987/77A IT2698777A IT1114121B IT 1114121 B IT1114121 B IT 1114121B IT 26987/77 A IT26987/77 A IT 26987/77A IT 2698777 A IT2698777 A IT 2698777A IT 1114121 B IT1114121 B IT 1114121B
Authority
IT
Italy
Prior art keywords
electrons
preparation
action
substances sensitive
resistive
Prior art date
Application number
IT26987/77A
Other languages
English (en)
Italian (it)
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Application granted granted Critical
Publication of IT1114121B publication Critical patent/IT1114121B/it

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Electron Beam Exposure (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Materials For Photolithography (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
IT26987/77A 1976-09-08 1977-08-26 Processo per la preparazione di sostanze resistive sensibili all'azione di un fascio di elettroni IT1114121B (it)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/721,259 US4074031A (en) 1976-09-08 1976-09-08 Process for preparing electron beam resists

Publications (1)

Publication Number Publication Date
IT1114121B true IT1114121B (it) 1986-01-27

Family

ID=24897209

Family Applications (1)

Application Number Title Priority Date Filing Date
IT26987/77A IT1114121B (it) 1976-09-08 1977-08-26 Processo per la preparazione di sostanze resistive sensibili all'azione di un fascio di elettroni

Country Status (7)

Country Link
US (1) US4074031A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS6013164B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CA (1) CA1078548A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2736756C3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2364487A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1530059A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
IT (1) IT1114121B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4351925A (en) * 1980-04-18 1982-09-28 Celanese Corporation Process for the thermal stabilization of acrylic fibers and films

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3328367A (en) * 1965-04-29 1967-06-27 Du Pont Copolymers
US3728319A (en) * 1970-02-19 1973-04-17 Gaf Corp Reaction products of poly n-vinylpyrrolidone or poly n-vinylpyrrolidones with alkyl side chains and organic secondary or tertiary amines

Also Published As

Publication number Publication date
CA1078548A (en) 1980-05-27
JPS5334475A (en) 1978-03-31
GB1530059A (en) 1978-10-25
FR2364487A1 (fr) 1978-04-07
DE2736756A1 (de) 1978-03-09
JPS6013164B2 (ja) 1985-04-05
US4074031A (en) 1978-02-14
FR2364487B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-03-09
DE2736756C3 (de) 1981-02-12
DE2736756B2 (de) 1980-05-29

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