FR2364487B1 - - Google Patents
Info
- Publication number
- FR2364487B1 FR2364487B1 FR7722461A FR7722461A FR2364487B1 FR 2364487 B1 FR2364487 B1 FR 2364487B1 FR 7722461 A FR7722461 A FR 7722461A FR 7722461 A FR7722461 A FR 7722461A FR 2364487 B1 FR2364487 B1 FR 2364487B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Electron Beam Exposure (AREA)
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Materials For Photolithography (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/721,259 US4074031A (en) | 1976-09-08 | 1976-09-08 | Process for preparing electron beam resists |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2364487A1 FR2364487A1 (fr) | 1978-04-07 |
| FR2364487B1 true FR2364487B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1979-03-09 |
Family
ID=24897209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7722461A Granted FR2364487A1 (fr) | 1976-09-08 | 1977-07-13 | Procede de preparation de materiaux photo-resistants de type positif sensibles a un rayonnement electronique |
Country Status (7)
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4351925A (en) * | 1980-04-18 | 1982-09-28 | Celanese Corporation | Process for the thermal stabilization of acrylic fibers and films |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3328367A (en) * | 1965-04-29 | 1967-06-27 | Du Pont | Copolymers |
| US3728319A (en) * | 1970-02-19 | 1973-04-17 | Gaf Corp | Reaction products of poly n-vinylpyrrolidone or poly n-vinylpyrrolidones with alkyl side chains and organic secondary or tertiary amines |
-
1976
- 1976-09-08 US US05/721,259 patent/US4074031A/en not_active Expired - Lifetime
-
1977
- 1977-07-13 FR FR7722461A patent/FR2364487A1/fr active Granted
- 1977-07-26 JP JP52088913A patent/JPS6013164B2/ja not_active Expired
- 1977-08-16 DE DE2736756A patent/DE2736756C3/de not_active Expired
- 1977-08-24 GB GB35563/77A patent/GB1530059A/en not_active Expired
- 1977-08-26 IT IT26987/77A patent/IT1114121B/it active
- 1977-09-08 CA CA286,286A patent/CA1078548A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| CA1078548A (en) | 1980-05-27 |
| JPS5334475A (en) | 1978-03-31 |
| GB1530059A (en) | 1978-10-25 |
| FR2364487A1 (fr) | 1978-04-07 |
| IT1114121B (it) | 1986-01-27 |
| DE2736756A1 (de) | 1978-03-09 |
| JPS6013164B2 (ja) | 1985-04-05 |
| US4074031A (en) | 1978-02-14 |
| DE2736756C3 (de) | 1981-02-12 |
| DE2736756B2 (de) | 1980-05-29 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |