IT1112625B - Apparecchiatura perfezionata per l'impiantamento di ioni - Google Patents

Apparecchiatura perfezionata per l'impiantamento di ioni

Info

Publication number
IT1112625B
IT1112625B IT22795/78A IT2279578A IT1112625B IT 1112625 B IT1112625 B IT 1112625B IT 22795/78 A IT22795/78 A IT 22795/78A IT 2279578 A IT2279578 A IT 2279578A IT 1112625 B IT1112625 B IT 1112625B
Authority
IT
Italy
Prior art keywords
ion implantation
perfected
equipment
perfected equipment
implantation
Prior art date
Application number
IT22795/78A
Other languages
English (en)
Italian (it)
Other versions
IT7822795A0 (it
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/794,276 external-priority patent/US4135097A/en
Priority claimed from US05/794,275 external-priority patent/US4118630A/en
Application filed by Ibm filed Critical Ibm
Publication of IT7822795A0 publication Critical patent/IT7822795A0/it
Application granted granted Critical
Publication of IT1112625B publication Critical patent/IT1112625B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/026—Means for avoiding or neutralising unwanted electrical charges on tube components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24405—Faraday cages
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
IT22795/78A 1977-05-05 1978-04-28 Apparecchiatura perfezionata per l'impiantamento di ioni IT1112625B (it)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US05/794,276 US4135097A (en) 1977-05-05 1977-05-05 Ion implantation apparatus for controlling the surface potential of a target surface
US05/794,275 US4118630A (en) 1977-05-05 1977-05-05 Ion implantation apparatus with a cooled structure controlling the surface potential of a target surface

Publications (2)

Publication Number Publication Date
IT7822795A0 IT7822795A0 (it) 1978-04-28
IT1112625B true IT1112625B (it) 1986-01-20

Family

ID=27121491

Family Applications (1)

Application Number Title Priority Date Filing Date
IT22795/78A IT1112625B (it) 1977-05-05 1978-04-28 Apparecchiatura perfezionata per l'impiantamento di ioni

Country Status (5)

Country Link
DE (1) DE2819114C3 (enrdf_load_stackoverflow)
FR (1) FR2389998B1 (enrdf_load_stackoverflow)
GB (1) GB1584224A (enrdf_load_stackoverflow)
IT (1) IT1112625B (enrdf_load_stackoverflow)
NL (1) NL7804691A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2490873A1 (fr) * 1980-09-24 1982-03-26 Varian Associates Procede et dispositif destines a produire une neutralisation amelioree d'un faisceau d'ions positifs
FR2793951B1 (fr) * 1999-05-21 2001-08-17 Centre Nat Etd Spatiales Procede et installation de traitement d'un substrat tel qu'un circuit integre par un faisceau focalise de particules electriquement neutres

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2890342A (en) * 1954-09-29 1959-06-09 Gen Electric System for charge neutralization
US3313969A (en) * 1966-03-25 1967-04-11 Boeing Co Charged particle deflecting apparatus having hemispherical electrodes
US3507709A (en) * 1967-09-15 1970-04-21 Hughes Aircraft Co Method of irradiating dielectriccoated semiconductor bodies with low energy electrons
US3997846A (en) * 1975-06-30 1976-12-14 International Business Machines Corporation Method and apparatus for electrostatic deflection of high current ion beams in scanning apparatus
US4011449A (en) * 1975-11-05 1977-03-08 Ibm Corporation Apparatus for measuring the beam current of charged particle beam
US4013891A (en) * 1975-12-15 1977-03-22 Ibm Corporation Method for varying the diameter of a beam of charged particles

Also Published As

Publication number Publication date
DE2819114A1 (de) 1978-11-16
FR2389998A1 (enrdf_load_stackoverflow) 1978-12-01
DE2819114B2 (de) 1981-07-16
DE2819114C3 (de) 1982-03-04
NL7804691A (nl) 1978-11-07
FR2389998B1 (enrdf_load_stackoverflow) 1981-11-20
GB1584224A (en) 1981-02-11
IT7822795A0 (it) 1978-04-28

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