FR2389998A1 - - Google Patents

Info

Publication number
FR2389998A1
FR2389998A1 FR7809182A FR7809182A FR2389998A1 FR 2389998 A1 FR2389998 A1 FR 2389998A1 FR 7809182 A FR7809182 A FR 7809182A FR 7809182 A FR7809182 A FR 7809182A FR 2389998 A1 FR2389998 A1 FR 2389998A1
Authority
FR
France
Prior art keywords
target
ion beam
electron sources
potential
faraday
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7809182A
Other languages
English (en)
French (fr)
Other versions
FR2389998B1 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US05/794,276 external-priority patent/US4135097A/en
Priority claimed from US05/794,275 external-priority patent/US4118630A/en
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2389998A1 publication Critical patent/FR2389998A1/fr
Application granted granted Critical
Publication of FR2389998B1 publication Critical patent/FR2389998B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/026—Means for avoiding or neutralising unwanted electrical charges on tube components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24405—Faraday cages
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7809182A 1977-05-05 1978-03-23 Expired FR2389998B1 (enrdf_load_stackoverflow)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US05/794,276 US4135097A (en) 1977-05-05 1977-05-05 Ion implantation apparatus for controlling the surface potential of a target surface
US05/794,275 US4118630A (en) 1977-05-05 1977-05-05 Ion implantation apparatus with a cooled structure controlling the surface potential of a target surface

Publications (2)

Publication Number Publication Date
FR2389998A1 true FR2389998A1 (enrdf_load_stackoverflow) 1978-12-01
FR2389998B1 FR2389998B1 (enrdf_load_stackoverflow) 1981-11-20

Family

ID=27121491

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7809182A Expired FR2389998B1 (enrdf_load_stackoverflow) 1977-05-05 1978-03-23

Country Status (5)

Country Link
DE (1) DE2819114C3 (enrdf_load_stackoverflow)
FR (1) FR2389998B1 (enrdf_load_stackoverflow)
GB (1) GB1584224A (enrdf_load_stackoverflow)
IT (1) IT1112625B (enrdf_load_stackoverflow)
NL (1) NL7804691A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2490873A1 (fr) * 1980-09-24 1982-03-26 Varian Associates Procede et dispositif destines a produire une neutralisation amelioree d'un faisceau d'ions positifs
FR2793951A1 (fr) * 1999-05-21 2000-11-24 Centre Nat Etd Spatiales Procede et installation de traitement d'un substrat tel qu'un circuit integre par un faisceau focalise de particules electriquement neutres

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2890342A (en) * 1954-09-29 1959-06-09 Gen Electric System for charge neutralization
US3313969A (en) * 1966-03-25 1967-04-11 Boeing Co Charged particle deflecting apparatus having hemispherical electrodes
US3507709A (en) * 1967-09-15 1970-04-21 Hughes Aircraft Co Method of irradiating dielectriccoated semiconductor bodies with low energy electrons
US4011449A (en) * 1975-11-05 1977-03-08 Ibm Corporation Apparatus for measuring the beam current of charged particle beam
US4013891A (en) * 1975-12-15 1977-03-22 Ibm Corporation Method for varying the diameter of a beam of charged particles

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3997846A (en) * 1975-06-30 1976-12-14 International Business Machines Corporation Method and apparatus for electrostatic deflection of high current ion beams in scanning apparatus

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2890342A (en) * 1954-09-29 1959-06-09 Gen Electric System for charge neutralization
US3313969A (en) * 1966-03-25 1967-04-11 Boeing Co Charged particle deflecting apparatus having hemispherical electrodes
US3507709A (en) * 1967-09-15 1970-04-21 Hughes Aircraft Co Method of irradiating dielectriccoated semiconductor bodies with low energy electrons
US4011449A (en) * 1975-11-05 1977-03-08 Ibm Corporation Apparatus for measuring the beam current of charged particle beam
US4013891A (en) * 1975-12-15 1977-03-22 Ibm Corporation Method for varying the diameter of a beam of charged particles

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2490873A1 (fr) * 1980-09-24 1982-03-26 Varian Associates Procede et dispositif destines a produire une neutralisation amelioree d'un faisceau d'ions positifs
FR2793951A1 (fr) * 1999-05-21 2000-11-24 Centre Nat Etd Spatiales Procede et installation de traitement d'un substrat tel qu'un circuit integre par un faisceau focalise de particules electriquement neutres

Also Published As

Publication number Publication date
DE2819114A1 (de) 1978-11-16
DE2819114B2 (de) 1981-07-16
IT1112625B (it) 1986-01-20
DE2819114C3 (de) 1982-03-04
NL7804691A (nl) 1978-11-07
FR2389998B1 (enrdf_load_stackoverflow) 1981-11-20
GB1584224A (en) 1981-02-11
IT7822795A0 (it) 1978-04-28

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Legal Events

Date Code Title Description
ST Notification of lapse