GB2052146B - Unitary electromagnet for double deflection scanning of charged particle beam - Google Patents

Unitary electromagnet for double deflection scanning of charged particle beam

Info

Publication number
GB2052146B
GB2052146B GB8016659A GB8016659A GB2052146B GB 2052146 B GB2052146 B GB 2052146B GB 8016659 A GB8016659 A GB 8016659A GB 8016659 A GB8016659 A GB 8016659A GB 2052146 B GB2052146 B GB 2052146B
Authority
GB
United Kingdom
Prior art keywords
charged particle
particle beam
deflection scanning
double deflection
electromagnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8016659A
Other versions
GB2052146A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Publication of GB2052146A publication Critical patent/GB2052146A/en
Application granted granted Critical
Publication of GB2052146B publication Critical patent/GB2052146B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
    • G21K1/093—Deviation, concentration or focusing of the beam by electric or magnetic means by magnetic means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/31701—Ion implantation

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Particle Accelerators (AREA)
GB8016659A 1979-06-04 1980-05-20 Unitary electromagnet for double deflection scanning of charged particle beam Expired GB2052146B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US4503579A 1979-06-04 1979-06-04

Publications (2)

Publication Number Publication Date
GB2052146A GB2052146A (en) 1981-01-21
GB2052146B true GB2052146B (en) 1983-06-22

Family

ID=21935663

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8016659A Expired GB2052146B (en) 1979-06-04 1980-05-20 Unitary electromagnet for double deflection scanning of charged particle beam

Country Status (4)

Country Link
JP (1) JPS561399A (en)
CH (1) CH649652A5 (en)
DE (1) DE3020281C2 (en)
GB (1) GB2052146B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4276477A (en) * 1979-09-17 1981-06-30 Varian Associates, Inc. Focusing apparatus for uniform application of charged particle beam
JPS57182864U (en) * 1981-05-18 1982-11-19
JPS58190000U (en) * 1982-06-14 1983-12-16 日新ハイボルテ−ジ株式会社 charged particle deflector
DE3513546A1 (en) * 1985-04-16 1986-10-16 Leybold-Heraeus GmbH, 5000 Köln Method and arrangement for deflecting an electron beam
US5461235A (en) * 1991-06-21 1995-10-24 Cottrell; John S. Mass spectrometry apparatus and method relating thereto
AU2002239682A1 (en) * 2000-12-28 2002-07-16 Proteros, Llc Ion beam collimating system
DE102011009488A1 (en) * 2011-01-26 2012-07-26 Global Beam Technologies Ag Electron-beam system for processing of component e.g. turbine blade, has beam director that directs deflected electron beam to construction material layer surface at preset incident angle

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB832500A (en) * 1955-12-12 1960-04-13 Ass Elect Ind Improvements relating to electron optical apparatus
US3569757A (en) * 1968-10-04 1971-03-09 Houghes Aircraft Co Acceleration system for implanting ions in specimen
US3778626A (en) * 1972-07-28 1973-12-11 Western Electric Co Mechanical scan system for ion implantation
US3983402A (en) * 1975-12-22 1976-09-28 International Business Machines Corporation Ion implantation apparatus
JPS52106267A (en) * 1976-03-03 1977-09-06 Hitachi Ltd Electronic line deflection unit
US4117339A (en) * 1977-07-01 1978-09-26 Burroughs Corporation Double deflection electron beam generator for employment in the fabrication of semiconductor and other devices

Also Published As

Publication number Publication date
JPS561399A (en) 1981-01-09
DE3020281C2 (en) 1993-10-07
DE3020281A1 (en) 1980-12-11
JPH0340360B2 (en) 1991-06-18
GB2052146A (en) 1981-01-21
CH649652A5 (en) 1985-05-31

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Legal Events

Date Code Title Description
PE20 Patent expired after termination of 20 years

Effective date: 20000519