IT1108801B - Procedimento per fabbricare un transistore per alte frequenze - Google Patents
Procedimento per fabbricare un transistore per alte frequenzeInfo
- Publication number
- IT1108801B IT1108801B IT24720/78A IT2472078A IT1108801B IT 1108801 B IT1108801 B IT 1108801B IT 24720/78 A IT24720/78 A IT 24720/78A IT 2472078 A IT2472078 A IT 2472078A IT 1108801 B IT1108801 B IT 1108801B
- Authority
- IT
- Italy
- Prior art keywords
- procedure
- manufacturing
- high frequency
- frequency transistor
- transistor
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D10/00—Bipolar junction transistors [BJT]
- H10D10/01—Manufacture or treatment
- H10D10/051—Manufacture or treatment of vertical BJTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/10—Shapes, relative sizes or dispositions of the regions of the semiconductor bodies; Shapes of the semiconductor bodies
- H10D62/17—Semiconductor regions connected to electrodes not carrying current to be rectified, amplified or switched, e.g. channel regions
- H10D62/177—Base regions of bipolar transistors, e.g. BJTs or IGBTs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/01—Manufacture or treatment
- H10W10/011—Manufacture or treatment of isolation regions comprising dielectric materials
- H10W10/012—Manufacture or treatment of isolation regions comprising dielectric materials using local oxidation of silicon [LOCOS]
- H10W10/0125—Manufacture or treatment of isolation regions comprising dielectric materials using local oxidation of silicon [LOCOS] comprising introducing electrical impurities in local oxidation regions, e.g. to alter LOCOS oxide growth characteristics
- H10W10/0126—Manufacture or treatment of isolation regions comprising dielectric materials using local oxidation of silicon [LOCOS] comprising introducing electrical impurities in local oxidation regions, e.g. to alter LOCOS oxide growth characteristics introducing electrical active impurities in local oxidation regions to create channel stoppers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W10/00—Isolation regions in semiconductor bodies between components of integrated devices
- H10W10/10—Isolation regions comprising dielectric materials
- H10W10/13—Isolation regions comprising dielectric materials formed using local oxidation of silicon [LOCOS], e.g. sealed interface localised oxidation [SILO] or side-wall mask isolation [SWAMI]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/965—Shaped junction formation
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19772728845 DE2728845A1 (de) | 1977-06-27 | 1977-06-27 | Verfahren zum herstellen eines hochfrequenztransistors |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| IT7824720A0 IT7824720A0 (it) | 1978-06-20 |
| IT1108801B true IT1108801B (it) | 1985-12-09 |
Family
ID=6012432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT24720/78A IT1108801B (it) | 1977-06-27 | 1978-06-20 | Procedimento per fabbricare un transistore per alte frequenze |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4175983A (enExample) |
| JP (1) | JPS5411683A (enExample) |
| DE (1) | DE2728845A1 (enExample) |
| FR (1) | FR2396411B2 (enExample) |
| GB (1) | GB1577405A (enExample) |
| IT (1) | IT1108801B (enExample) |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5577172A (en) * | 1978-12-06 | 1980-06-10 | Oki Electric Ind Co Ltd | Semiconductor device |
| US4269636A (en) * | 1978-12-29 | 1981-05-26 | Harris Corporation | Method of fabricating self-aligned bipolar transistor process and device utilizing etching and self-aligned masking |
| JPS5852339B2 (ja) * | 1979-03-20 | 1983-11-22 | 富士通株式会社 | 半導体装置の製造方法 |
| US4261761A (en) * | 1979-09-04 | 1981-04-14 | Tektronix, Inc. | Method of manufacturing sub-micron channel width MOS transistor |
| US4261763A (en) * | 1979-10-01 | 1981-04-14 | Burroughs Corporation | Fabrication of integrated circuits employing only ion implantation for all dopant layers |
| JPS57149770A (en) * | 1981-03-11 | 1982-09-16 | Mitsubishi Electric Corp | Manufacture of semiconductor device |
| EP0080523B1 (de) * | 1981-11-28 | 1986-10-01 | Deutsche ITT Industries GmbH | Verfahren zum Herstellen einer monolithisch integrierten Schaltung mit mindestens einem Paar von komplementären Feldeffekttransistoren und mindestens einem Bipolartransistor |
| US4624046A (en) * | 1982-01-04 | 1986-11-25 | Fairchild Camera & Instrument Corp. | Oxide isolation process for standard RAM/PROM and lateral PNP cell RAM |
| US4961102A (en) * | 1982-01-04 | 1990-10-02 | Shideler Jay A | Junction programmable vertical transistor with high performance transistor |
| JPS5941877A (ja) * | 1982-08-31 | 1984-03-08 | Junichi Nishizawa | フオトトランジスタ |
| SE461428B (sv) * | 1988-06-16 | 1990-02-12 | Ericsson Telefon Ab L M | Foerfarande foer att paa ett underlag av halvledarmaterial framstaella en bipolaer transistor eller en bipolaer transistor och en faelteffekttransistor eller en bipolaer transistor och en faelteffekttransistor med en komplementaer faelteffekttransistor och anordningar framstaellda enligt foerfarandena |
| JP2748420B2 (ja) * | 1988-08-12 | 1998-05-06 | ソニー株式会社 | バイポーラトランジスタ及びその製造方法 |
| DE69323614T2 (de) * | 1992-11-12 | 1999-06-17 | National Semiconductor Corp., Santa Clara, Calif. | Schmale Basis-Effekte vermeidendes Verfahren für einen Transistor |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1457139A (en) * | 1973-09-27 | 1976-12-01 | Hitachi Ltd | Method of manufacturing semiconductor device |
| JPS5214594B2 (enExample) * | 1973-10-17 | 1977-04-22 | ||
| NL180466C (nl) * | 1974-03-15 | 1987-02-16 | Philips Nv | Werkwijze voor het vervaardigen van een halfgeleiderinrichting met een halfgeleiderlichaam voorzien van een in het halfgeleiderlichaam verzonken patroon van isolerend materiaal. |
| US3904450A (en) * | 1974-04-26 | 1975-09-09 | Bell Telephone Labor Inc | Method of fabricating injection logic integrated circuits using oxide isolation |
| JPS50153873A (enExample) * | 1974-05-30 | 1975-12-11 | ||
| US4066473A (en) * | 1976-07-15 | 1978-01-03 | Fairchild Camera And Instrument Corporation | Method of fabricating high-gain transistors |
-
1977
- 1977-06-27 DE DE19772728845 patent/DE2728845A1/de active Granted
-
1978
- 1978-04-28 GB GB16908/78A patent/GB1577405A/en not_active Expired
- 1978-06-14 US US05/915,368 patent/US4175983A/en not_active Expired - Lifetime
- 1978-06-20 IT IT24720/78A patent/IT1108801B/it active
- 1978-06-21 FR FR7818541A patent/FR2396411B2/fr not_active Expired
- 1978-06-26 JP JP7733678A patent/JPS5411683A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| DE2728845A1 (de) | 1979-01-18 |
| FR2396411A2 (enExample) | 1979-01-26 |
| FR2396411B2 (enExample) | 1983-08-05 |
| GB1577405A (en) | 1980-10-22 |
| JPS5411683A (en) | 1979-01-27 |
| IT7824720A0 (it) | 1978-06-20 |
| DE2728845C2 (enExample) | 1987-07-16 |
| US4175983A (en) | 1979-11-27 |
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