IT1083777B - Procedimento per fabbricare maschere per la litorgrafia a raggi rontgen - Google Patents
Procedimento per fabbricare maschere per la litorgrafia a raggi rontgenInfo
- Publication number
- IT1083777B IT1083777B IT2465877A IT2465877A IT1083777B IT 1083777 B IT1083777 B IT 1083777B IT 2465877 A IT2465877 A IT 2465877A IT 2465877 A IT2465877 A IT 2465877A IT 1083777 B IT1083777 B IT 1083777B
- Authority
- IT
- Italy
- Prior art keywords
- lithorgraphy
- rontgen
- masks
- procedure
- manufacturing
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19762626851 DE2626851C3 (de) | 1976-06-15 | 1976-06-15 | Verfahren zur Herstellung von Masken für die Röntgenlithographie |
Publications (1)
Publication Number | Publication Date |
---|---|
IT1083777B true IT1083777B (it) | 1985-05-25 |
Family
ID=5980611
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT2465877A IT1083777B (it) | 1976-06-15 | 1977-06-14 | Procedimento per fabbricare maschere per la litorgrafia a raggi rontgen |
Country Status (7)
Country | Link |
---|---|
JP (1) | JPS52153673A (it) |
BE (1) | BE855701A (it) |
DE (1) | DE2626851C3 (it) |
FR (1) | FR2355314A1 (it) |
GB (1) | GB1544787A (it) |
IT (1) | IT1083777B (it) |
NL (1) | NL186201C (it) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4171489A (en) * | 1978-09-13 | 1979-10-16 | Bell Telephone Laboratories, Incorporated | Radiation mask structure |
GB2089524B (en) * | 1980-12-17 | 1984-12-05 | Westinghouse Electric Corp | High resolution lithographic process |
GB2121980B (en) * | 1982-06-10 | 1986-02-05 | Standard Telephones Cables Ltd | X ray masks |
DE3435178A1 (de) * | 1983-09-26 | 1985-04-04 | Canon K.K., Tokio/Tokyo | Gegenstand mit maskenstruktur fuer die lithografie |
DE3338717A1 (de) * | 1983-10-25 | 1985-05-02 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur herstellung einer roentgenmaske mit metalltraegerfolie |
JPS6169133A (ja) * | 1985-05-07 | 1986-04-09 | Chiyou Lsi Gijutsu Kenkyu Kumiai | 軟x線露光方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1948141A1 (de) * | 1968-09-23 | 1970-04-23 | Polaroid Corp | Optisches Element mit Antireflexueberzug |
-
1976
- 1976-06-15 DE DE19762626851 patent/DE2626851C3/de not_active Expired
-
1977
- 1977-05-02 GB GB1836377A patent/GB1544787A/en not_active Expired
- 1977-06-08 FR FR7717507A patent/FR2355314A1/fr active Granted
- 1977-06-14 IT IT2465877A patent/IT1083777B/it active
- 1977-06-14 NL NL7706552A patent/NL186201C/xx not_active IP Right Cessation
- 1977-06-15 JP JP7095277A patent/JPS52153673A/ja active Pending
- 1977-06-15 BE BE178453A patent/BE855701A/xx not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
NL7706552A (nl) | 1977-12-19 |
JPS52153673A (en) | 1977-12-20 |
FR2355314A1 (fr) | 1978-01-13 |
FR2355314B1 (it) | 1981-08-14 |
DE2626851A1 (de) | 1977-12-22 |
DE2626851C3 (de) | 1982-03-18 |
DE2626851B2 (de) | 1981-07-02 |
BE855701A (fr) | 1977-10-03 |
NL186201C (nl) | 1990-10-01 |
GB1544787A (en) | 1979-04-25 |
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