IT1067163B - Procedimento per formare strutture costituite da strati positivi di vernice fotosensibile su un supporto - Google Patents
Procedimento per formare strutture costituite da strati positivi di vernice fotosensibile su un supportoInfo
- Publication number
- IT1067163B IT1067163B IT25720/76A IT2572076A IT1067163B IT 1067163 B IT1067163 B IT 1067163B IT 25720/76 A IT25720/76 A IT 25720/76A IT 2572076 A IT2572076 A IT 2572076A IT 1067163 B IT1067163 B IT 1067163B
- Authority
- IT
- Italy
- Prior art keywords
- procedure
- support
- forming structures
- structures consisting
- photosensitive paint
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE2534795A DE2534795C3 (de) | 1975-08-04 | 1975-08-04 | Verfahren zur Herstellung von Strukturen aus Positiv-Fotolackschichten |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IT1067163B true IT1067163B (it) | 1985-03-12 |
Family
ID=5953192
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT25720/76A IT1067163B (it) | 1975-08-04 | 1976-07-27 | Procedimento per formare strutture costituite da strati positivi di vernice fotosensibile su un supporto |
Country Status (7)
| Country | Link |
|---|---|
| JP (1) | JPS5219531A (it) |
| BE (1) | BE844743A (it) |
| DE (1) | DE2534795C3 (it) |
| FR (1) | FR2320584A1 (it) |
| GB (1) | GB1548017A (it) |
| IT (1) | IT1067163B (it) |
| NL (1) | NL7608635A (it) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5329135B2 (it) * | 1973-12-12 | 1978-08-18 | ||
| AU544060B2 (en) * | 1980-07-28 | 1985-05-16 | Polychrome Corp. | Accelerated diazo sensitised |
| DE3216268A1 (de) * | 1982-04-30 | 1983-11-03 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur verminderung von linienbreitenschwankungen bei der herstellung von aus fotolackschichten bestehenden strukturen auf fuer integrierte halbleiterschaltungen vorgesehenen substraten durch optische projektionsbelichtung |
| DE3310962A1 (de) * | 1983-03-25 | 1984-09-27 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur reduzierung von linienbreitenschwankungen bei der herstellung von fotolackstrukturen |
| JPS6155649A (ja) * | 1984-08-27 | 1986-03-20 | Nippon Telegr & Teleph Corp <Ntt> | パタン形成法 |
| CA1285418C (en) * | 1985-07-18 | 1991-07-02 | Robert A. Owens | Pre-exposure method for increased sensitivity in high contrast resist development |
| FR2618230A1 (fr) * | 1987-07-17 | 1989-01-20 | Thomson Semiconducteurs | Procede de photolithographie. |
| KR930008139B1 (en) * | 1990-08-30 | 1993-08-26 | Samsung Electronics Co Ltd | Method for preparation of pattern |
| KR950008384B1 (ko) * | 1992-12-10 | 1995-07-28 | 삼성전자주식회사 | 패턴의 형성방법 |
-
1975
- 1975-08-04 DE DE2534795A patent/DE2534795C3/de not_active Expired
-
1976
- 1976-06-30 GB GB27153/76A patent/GB1548017A/en not_active Expired
- 1976-07-26 FR FR7622726A patent/FR2320584A1/fr active Granted
- 1976-07-27 IT IT25720/76A patent/IT1067163B/it active
- 1976-07-30 JP JP51091228A patent/JPS5219531A/ja active Pending
- 1976-07-30 BE BE169435A patent/BE844743A/xx unknown
- 1976-08-03 NL NL7608635A patent/NL7608635A/xx not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| GB1548017A (en) | 1979-07-04 |
| DE2534795B2 (de) | 1977-09-29 |
| DE2534795A1 (de) | 1977-02-10 |
| FR2320584B1 (it) | 1979-09-28 |
| JPS5219531A (en) | 1977-02-14 |
| BE844743A (fr) | 1976-11-16 |
| FR2320584A1 (fr) | 1977-03-04 |
| NL7608635A (nl) | 1977-02-08 |
| DE2534795C3 (de) | 1978-05-24 |
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