IT1041193B - Perfezionamenti nei procedimenti per la fabbricazione di dispositivi a semiconduttor - Google Patents

Perfezionamenti nei procedimenti per la fabbricazione di dispositivi a semiconduttor

Info

Publication number
IT1041193B
IT1041193B IT50889/75A IT5088975A IT1041193B IT 1041193 B IT1041193 B IT 1041193B IT 50889/75 A IT50889/75 A IT 50889/75A IT 5088975 A IT5088975 A IT 5088975A IT 1041193 B IT1041193 B IT 1041193B
Authority
IT
Italy
Prior art keywords
procedures
manufacture
semiconductor devices
semiconductor
devices
Prior art date
Application number
IT50889/75A
Other languages
English (en)
Inventor
M Buiatti
Original Assignee
Selenia Ind Elettroniche
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Selenia Ind Elettroniche filed Critical Selenia Ind Elettroniche
Priority to IT50889/75A priority Critical patent/IT1041193B/it
Priority to US05/636,468 priority patent/US4048712A/en
Priority to GB32701/76A priority patent/GB1510293A/en
Priority to DE19762635369 priority patent/DE2635369A1/de
Priority to FR7624034A priority patent/FR2320632A1/fr
Application granted granted Critical
Publication of IT1041193B publication Critical patent/IT1041193B/it

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/66007—Multistep manufacturing processes
    • H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
    • H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
    • H01L29/66409—Unipolar field-effect transistors
    • H01L29/66848—Unipolar field-effect transistors with a Schottky gate, i.e. MESFET
    • H01L29/66856—Unipolar field-effect transistors with a Schottky gate, i.e. MESFET with an active layer made of a group 13/15 material
    • H01L29/66863—Lateral single gate transistors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
    • H01L21/28575—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising AIIIBV compounds
    • H01L21/28587—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising AIIIBV compounds characterised by the sectional shape, e.g. T, inverted T
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors
    • H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
    • H01L29/812—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with a Schottky gate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/139—Schottky barrier
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/143—Shadow masking

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Electrodes Of Semiconductors (AREA)
IT50889/75A 1975-08-08 1975-08-08 Perfezionamenti nei procedimenti per la fabbricazione di dispositivi a semiconduttor IT1041193B (it)

Priority Applications (5)

Application Number Priority Date Filing Date Title
IT50889/75A IT1041193B (it) 1975-08-08 1975-08-08 Perfezionamenti nei procedimenti per la fabbricazione di dispositivi a semiconduttor
US05/636,468 US4048712A (en) 1975-08-08 1975-12-01 Processes for manufacturing semiconductor devices
GB32701/76A GB1510293A (en) 1975-08-08 1976-08-05 Manufacture of semiconductor devices
DE19762635369 DE2635369A1 (de) 1975-08-08 1976-08-06 Verfahren zur herstellung von halbleitervorrichtungen
FR7624034A FR2320632A1 (fr) 1975-08-08 1976-08-06 Ameliorations apportees aux procedes de fabrication des dispositifs a semi-conducteurs, notamment pour l'autoalignement de la porte d'un transistor a effet de champ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT50889/75A IT1041193B (it) 1975-08-08 1975-08-08 Perfezionamenti nei procedimenti per la fabbricazione di dispositivi a semiconduttor

Publications (1)

Publication Number Publication Date
IT1041193B true IT1041193B (it) 1980-01-10

Family

ID=11274039

Family Applications (1)

Application Number Title Priority Date Filing Date
IT50889/75A IT1041193B (it) 1975-08-08 1975-08-08 Perfezionamenti nei procedimenti per la fabbricazione di dispositivi a semiconduttor

Country Status (5)

Country Link
US (1) US4048712A (it)
DE (1) DE2635369A1 (it)
FR (1) FR2320632A1 (it)
GB (1) GB1510293A (it)
IT (1) IT1041193B (it)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2348574A1 (fr) * 1976-04-16 1977-11-10 Thomson Csf Procede de realisation d'une source d'ondes millimetriques et adaptation d'une telle source a la transmission par guide d'ondes
US4253229A (en) * 1978-04-27 1981-03-03 Xerox Corporation Self-aligned narrow gate MESFET process
DE2821975C2 (de) * 1978-05-19 1983-01-27 Siemens AG, 1000 Berlin und 8000 München Metall-Halbleiter-Feldeffekttransistor (MESFET) und Verfahren zu dessen Herstellung
GB1601059A (en) * 1978-05-31 1981-10-21 Secr Defence Fet devices and their fabrication
GB1603260A (en) * 1978-05-31 1981-11-25 Secr Defence Devices and their fabrication
GB1602498A (en) * 1978-05-31 1981-11-11 Secr Defence Fet devices and their fabrication
DE2824026A1 (de) * 1978-06-01 1979-12-20 Licentia Gmbh Verfahren zum herstellen eines sperrschicht-feldeffekttransistors
US4213840A (en) * 1978-11-13 1980-07-22 Avantek, Inc. Low-resistance, fine-line semiconductor device and the method for its manufacture
US4358891A (en) * 1979-06-22 1982-11-16 Burroughs Corporation Method of forming a metal semiconductor field effect transistor
US4379005A (en) * 1979-10-26 1983-04-05 International Business Machines Corporation Semiconductor device fabrication
US4310570A (en) * 1979-12-20 1982-01-12 Eaton Corporation Field-effect transistors with micron and submicron gate lengths
US4325181A (en) * 1980-12-17 1982-04-20 The United States Of America As Represented By The Secretary Of The Navy Simplified fabrication method for high-performance FET
JPS5950567A (ja) * 1982-09-16 1984-03-23 Hitachi Ltd 電界効果トランジスタの製造方法
GB2127751B (en) * 1982-10-06 1986-04-23 Plessey Co Plc Producing narrow features in electrical devices
US4400257A (en) * 1982-12-21 1983-08-23 Rca Corporation Method of forming metal lines
US4586063A (en) * 1984-04-02 1986-04-29 Oki Electric Industry Co., Ltd. Schottky barrier gate FET including tungsten-aluminum alloy
US4985369A (en) * 1987-01-21 1991-01-15 Ford Microelectronics, Inc. Method for making self-aligned ohmic contacts
US4829347A (en) * 1987-02-06 1989-05-09 American Telephone And Telegraph Company, At&T Bell Laboratories Process for making indium gallium arsenide devices
US4927782A (en) * 1989-06-27 1990-05-22 The United States Of America As Represented By The Secretary Of The Navy Method of making self-aligned GaAs/AlGaAs FET's
US5011785A (en) * 1990-10-30 1991-04-30 The United States Of America As Represented By The Secretary Of The Navy Insulator assisted self-aligned gate junction

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1958542A1 (de) * 1968-11-22 1970-07-09 Tokyo Shibaura Electric Co Halbleitervorrichtung
DE2037589C3 (de) * 1970-07-29 1974-02-21 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zum Herstellen eines Sperrschicht-Feldeffekttransistors
US3711745A (en) * 1971-10-06 1973-01-16 Microwave Ass Inc Low barrier height gallium arsenide microwave schottky diodes using gold-germanium alloy

Also Published As

Publication number Publication date
FR2320632B3 (it) 1979-05-04
FR2320632A1 (fr) 1977-03-04
DE2635369A1 (de) 1977-02-24
GB1510293A (en) 1978-05-10
US4048712A (en) 1977-09-20

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