IN2012DN01719A - - Google Patents

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Publication number
IN2012DN01719A
IN2012DN01719A IN1719DEN2012A IN2012DN01719A IN 2012DN01719 A IN2012DN01719 A IN 2012DN01719A IN 1719DEN2012 A IN1719DEN2012 A IN 1719DEN2012A IN 2012DN01719 A IN2012DN01719 A IN 2012DN01719A
Authority
IN
India
Prior art keywords
sensor
position sensitive
pyrometer includes
sensitive pyrometer
sensitive
Prior art date
Application number
Other languages
English (en)
Inventor
E Beck Markus
Lun Yu Ming
Original Assignee
First Solar Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by First Solar Inc filed Critical First Solar Inc
Publication of IN2012DN01719A publication Critical patent/IN2012DN01719A/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G01J5/0007Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0022Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiation of moving bodies
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/027Constructional details making use of sensor-related data, e.g. for identification of sensor parts or optical elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/0275Control or determination of height or distance or angle information for sensors or receivers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/04Casings
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/04Casings
    • G01J5/047Mobile mounting; Scanning arrangements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0801Means for wavelength selection or discrimination
    • G01J5/0802Optical filters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0818Waveguides
    • G01J5/0821Optical fibres
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0831Masks; Aperture plates; Spatial light modulators
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0846Optical arrangements having multiple detectors for performing different types of detection, e.g. using radiometry and reflectometry channels

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
IN1719DEN2012 2009-08-21 2010-08-20 IN2012DN01719A (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US23585509P 2009-08-21 2009-08-21
PCT/US2010/046167 WO2011022648A1 (en) 2009-08-21 2010-08-20 Pyrometer

Publications (1)

Publication Number Publication Date
IN2012DN01719A true IN2012DN01719A (de) 2015-06-05

Family

ID=43606030

Family Applications (1)

Application Number Title Priority Date Filing Date
IN1719DEN2012 IN2012DN01719A (de) 2009-08-21 2010-08-20

Country Status (5)

Country Link
US (1) US20110046916A1 (de)
CN (1) CN102484041B (de)
IN (1) IN2012DN01719A (de)
TW (1) TWI481836B (de)
WO (1) WO2011022648A1 (de)

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CN102364700B (zh) * 2011-10-26 2013-03-27 常州天合光能有限公司 太阳能电池rie工艺温度补偿方法
US9151597B2 (en) * 2012-02-13 2015-10-06 First Solar, Inc. In situ substrate detection for a processing system using infrared detection
CN104075809B (zh) * 2013-03-28 2019-05-07 中晟光电设备(上海)股份有限公司 红外光学温度测量装置、方法及mocvd系统
US20150367418A1 (en) 2014-06-20 2015-12-24 Velo3D, Inc. Apparatuses, systems and methods for three-dimensional printing
EP3370948A4 (de) 2015-11-06 2019-07-24 Velo3d Inc. Professionelles dreidimensionales drucken
US9962767B2 (en) 2015-12-10 2018-05-08 Velo3D, Inc. Apparatuses for three-dimensional printing
US20170239891A1 (en) 2016-02-18 2017-08-24 Velo3D, Inc. Accurate three-dimensional printing
EP3263316B1 (de) 2016-06-29 2019-02-13 VELO3D, Inc. Dreidimensionales drucken und dreidimensionaler drucken
US11691343B2 (en) 2016-06-29 2023-07-04 Velo3D, Inc. Three-dimensional printing and three-dimensional printers
US20180093418A1 (en) 2016-09-30 2018-04-05 Velo3D, Inc. Three-dimensional objects and their formation
US20180126650A1 (en) 2016-11-07 2018-05-10 Velo3D, Inc. Gas flow in three-dimensional printing
US20180154443A1 (en) * 2016-12-06 2018-06-07 Velo3D, Inc. Optics, detectors, and three-dimensional printing
US20180186080A1 (en) 2017-01-05 2018-07-05 Velo3D, Inc. Optics in three-dimensional printing
US20180250771A1 (en) 2017-03-02 2018-09-06 Velo3D, Inc. Three-dimensional printing of three-dimensional objects
US10449696B2 (en) 2017-03-28 2019-10-22 Velo3D, Inc. Material manipulation in three-dimensional printing
US10272525B1 (en) 2017-12-27 2019-04-30 Velo3D, Inc. Three-dimensional printing systems and methods of their use
US10144176B1 (en) 2018-01-15 2018-12-04 Velo3D, Inc. Three-dimensional printing systems and methods of their use
BR112020014574A2 (pt) * 2018-01-22 2020-12-08 Bristol-Myers Squibb Company Composições e métodos para o tratamento do câncer
KR20230047214A (ko) 2019-07-26 2023-04-06 벨로3디, 인크. 3차원 물체 형상화에 대한 품질 보증
DE102021103455A1 (de) 2020-04-30 2021-11-04 Taiwan Semiconductor Manufacturing Co., Ltd. System und verfahren zur erkennung der verunreinigung vondünnschichten
US11686683B2 (en) * 2020-04-30 2023-06-27 Taiwan Semiconductor Manufacturing Co., Ltd. System and method for detecting contamination of thin-films
US11342484B2 (en) 2020-05-11 2022-05-24 Silanna UV Technologies Pte Ltd Metal oxide semiconductor-based light emitting device
US11760170B2 (en) 2020-08-20 2023-09-19 Denso International America, Inc. Olfaction sensor preservation systems and methods
US12251991B2 (en) 2020-08-20 2025-03-18 Denso International America, Inc. Humidity control for olfaction sensors
US11932080B2 (en) 2020-08-20 2024-03-19 Denso International America, Inc. Diagnostic and recirculation control systems and methods
US11636870B2 (en) 2020-08-20 2023-04-25 Denso International America, Inc. Smoking cessation systems and methods
US12269315B2 (en) 2020-08-20 2025-04-08 Denso International America, Inc. Systems and methods for measuring and managing odor brought into rental vehicles
US12017506B2 (en) 2020-08-20 2024-06-25 Denso International America, Inc. Passenger cabin air control systems and methods
US11760169B2 (en) 2020-08-20 2023-09-19 Denso International America, Inc. Particulate control systems and methods for olfaction sensors
US11828210B2 (en) 2020-08-20 2023-11-28 Denso International America, Inc. Diagnostic systems and methods of vehicles using olfaction
US11813926B2 (en) 2020-08-20 2023-11-14 Denso International America, Inc. Binding agent and olfaction sensor
US12377711B2 (en) 2020-08-20 2025-08-05 Denso International America, Inc. Vehicle feature control systems and methods based on smoking
US11881093B2 (en) 2020-08-20 2024-01-23 Denso International America, Inc. Systems and methods for identifying smoking in vehicles
ES2926693B2 (es) 2021-04-20 2023-02-28 Univ Madrid Carlos Iii Pirómetro con alta resolución espacial
JP2024541233A (ja) * 2021-10-27 2024-11-08 シランナ・ユー・ブイ・テクノロジーズ・プライベート・リミテッド ワイドバンドギャップ基板を加熱する方法及びシステム
JP7793776B2 (ja) 2021-11-10 2026-01-05 シランナ・ユー・ブイ・テクノロジーズ・プライベート・リミテッド エピタキシャル酸化物材料、構造、及びデバイス
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Also Published As

Publication number Publication date
TW201129786A (en) 2011-09-01
CN102484041B (zh) 2015-09-23
TWI481836B (zh) 2015-04-21
CN102484041A (zh) 2012-05-30
WO2011022648A1 (en) 2011-02-24
US20110046916A1 (en) 2011-02-24

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