IN2012DN01719A - - Google Patents

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Publication number
IN2012DN01719A
IN2012DN01719A IN1719DEN2012A IN2012DN01719A IN 2012DN01719 A IN2012DN01719 A IN 2012DN01719A IN 1719DEN2012 A IN1719DEN2012 A IN 1719DEN2012A IN 2012DN01719 A IN2012DN01719 A IN 2012DN01719A
Authority
IN
India
Prior art keywords
sensor
position sensitive
pyrometer includes
sensitive pyrometer
sensitive
Prior art date
Application number
Inventor
E Beck Markus
Lun Yu Ming
Original Assignee
First Solar Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by First Solar Inc filed Critical First Solar Inc
Publication of IN2012DN01719A publication Critical patent/IN2012DN01719A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G01J5/0007—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter of wafers or semiconductor substrates, e.g. using Rapid Thermal Processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0022—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiation of moving bodies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/027—Constructional details making use of sensor-related data, e.g. for identification of sensor parts or optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0275—Control or determination of height or distance or angle information for sensors or receivers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G01J5/047—Mobile mounting; Scanning arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0801—Means for wavelength selection or discrimination
    • G01J5/0802—Optical filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0818—Waveguides
    • G01J5/0821—Optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0831—Masks; Aperture plates; Spatial light modulators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0846—Optical arrangements having multiple detectors for performing different types of detection, e.g. using radiometry and reflectometry channels

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

A position sensitive pyrometer includes a sensor.
IN1719DEN2012 2009-08-21 2010-08-20 IN2012DN01719A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US23585509P 2009-08-21 2009-08-21
PCT/US2010/046167 WO2011022648A1 (en) 2009-08-21 2010-08-20 Pyrometer

Publications (1)

Publication Number Publication Date
IN2012DN01719A true IN2012DN01719A (en) 2015-06-05

Family

ID=43606030

Family Applications (1)

Application Number Title Priority Date Filing Date
IN1719DEN2012 IN2012DN01719A (en) 2009-08-21 2010-08-20

Country Status (5)

Country Link
US (1) US20110046916A1 (en)
CN (1) CN102484041B (en)
IN (1) IN2012DN01719A (en)
TW (1) TWI481836B (en)
WO (1) WO2011022648A1 (en)

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CN102364700B (en) * 2011-10-26 2013-03-27 常州天合光能有限公司 Solar cell reactive ion etching (RIE) technology temperature compensation method
US9151597B2 (en) * 2012-02-13 2015-10-06 First Solar, Inc. In situ substrate detection for a processing system using infrared detection
CN104075809B (en) * 2013-03-28 2019-05-07 中晟光电设备（上海）股份有限公司 Infrared optics temperature measuring device, method and MOCVD system
US9486878B2 (en) 2014-06-20 2016-11-08 Velo3D, Inc. Apparatuses, systems and methods for three-dimensional printing
US10065270B2 (en) 2015-11-06 2018-09-04 Velo3D, Inc. Three-dimensional printing in real time
US10286603B2 (en) 2015-12-10 2019-05-14 Velo3D, Inc. Skillful three-dimensional printing
US20170239719A1 (en) 2016-02-18 2017-08-24 Velo3D, Inc. Accurate three-dimensional printing
US11691343B2 (en) 2016-06-29 2023-07-04 Velo3D, Inc. Three-dimensional printing and three-dimensional printers
EP3492244A1 (en) 2016-06-29 2019-06-05 VELO3D, Inc. Three-dimensional printing system and method for three-dimensional printing
US20180093418A1 (en) 2016-09-30 2018-04-05 Velo3D, Inc. Three-dimensional objects and their formation
US20180126460A1 (en) 2016-11-07 2018-05-10 Velo3D, Inc. Gas flow in three-dimensional printing
US20180186082A1 (en) 2017-01-05 2018-07-05 Velo3D, Inc. Optics in three-dimensional printing
US10315252B2 (en) 2017-03-02 2019-06-11 Velo3D, Inc. Three-dimensional printing of three-dimensional objects
US10449696B2 (en) 2017-03-28 2019-10-22 Velo3D, Inc. Material manipulation in three-dimensional printing
US10272525B1 (en) 2017-12-27 2019-04-30 Velo3D, Inc. Three-dimensional printing systems and methods of their use
US10144176B1 (en) 2018-01-15 2018-12-04 Velo3D, Inc. Three-dimensional printing systems and methods of their use
WO2019144098A1 (en) * 2018-01-22 2019-07-25 Bristol-Myers Squibb Company Compositions and methods of treating cancer
CA3148849A1 (en) 2019-07-26 2021-02-04 Velo3D, Inc. Quality assurance in formation of three-dimensional objects
DE102021103455A1 (en) 2020-04-30 2021-11-04 Taiwan Semiconductor Manufacturing Co., Ltd. SYSTEM AND METHOD FOR DETECTION OF THIN FILM CONTAMINATION
US11686683B2 (en) * 2020-04-30 2023-06-27 Taiwan Semiconductor Manufacturing Co., Ltd. System and method for detecting contamination of thin-films
US11813926B2 (en) 2020-08-20 2023-11-14 Denso International America, Inc. Binding agent and olfaction sensor
US11760170B2 (en) 2020-08-20 2023-09-19 Denso International America, Inc. Olfaction sensor preservation systems and methods
US11881093B2 (en) 2020-08-20 2024-01-23 Denso International America, Inc. Systems and methods for identifying smoking in vehicles
US12377711B2 (en) 2020-08-20 2025-08-05 Denso International America, Inc. Vehicle feature control systems and methods based on smoking
US12251991B2 (en) 2020-08-20 2025-03-18 Denso International America, Inc. Humidity control for olfaction sensors
US11828210B2 (en) 2020-08-20 2023-11-28 Denso International America, Inc. Diagnostic systems and methods of vehicles using olfaction
US12017506B2 (en) 2020-08-20 2024-06-25 Denso International America, Inc. Passenger cabin air control systems and methods
US11760169B2 (en) 2020-08-20 2023-09-19 Denso International America, Inc. Particulate control systems and methods for olfaction sensors
US11636870B2 (en) 2020-08-20 2023-04-25 Denso International America, Inc. Smoking cessation systems and methods
US11932080B2 (en) 2020-08-20 2024-03-19 Denso International America, Inc. Diagnostic and recirculation control systems and methods
US12269315B2 (en) 2020-08-20 2025-04-08 Denso International America, Inc. Systems and methods for measuring and managing odor brought into rental vehicles
ES2926693B2 (en) 2021-04-20 2023-02-28 Univ Madrid Carlos Iii Pyrometer with high spatial resolution
JP2024541233A (en) * 2021-10-27 2024-11-08 シランナ・ユー・ブイ・テクノロジーズ・プライベート・リミテッド Method and system for heating a wide bandgap substrate - Patents.com
EP4430671A4 (en) 2021-11-10 2025-09-24 Silanna UV Technologies Pte Ltd Epitaxial oxide materials, structures and devices
JP2025500012A (en) 2021-11-10 2025-01-07 シランナ・ユー・ブイ・テクノロジーズ・プライベート・リミテッド Epitaxial oxide materials, structures, and devices
KR20240109261A (en) 2021-11-10 2024-07-10 실라나 유브이 테크놀로지스 피티이 리미티드 Ultra-widebandgap semiconductor device containing magnesium germanium oxide
DE102022200914B3 (en) * 2022-01-27 2023-05-17 Singulus Technologies Aktiengesellschaft Coating chamber with detection of the substrate distance and method for coating substrates

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Also Published As

Publication number Publication date
TWI481836B (en) 2015-04-21
CN102484041A (en) 2012-05-30
TW201129786A (en) 2011-09-01
US20110046916A1 (en) 2011-02-24
CN102484041B (en) 2015-09-23
WO2011022648A1 (en) 2011-02-24

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