IN2012DN00837A - - Google Patents
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- Publication number
- IN2012DN00837A IN2012DN00837A IN837DEN2012A IN2012DN00837A IN 2012DN00837 A IN2012DN00837 A IN 2012DN00837A IN 837DEN2012 A IN837DEN2012 A IN 837DEN2012A IN 2012DN00837 A IN2012DN00837 A IN 2012DN00837A
- Authority
- IN
- India
- Prior art keywords
- electron microscope
- scanning electron
- unit
- main scanning
- bottom plate
- Prior art date
Links
- 238000001816 cooling Methods 0.000 abstract 2
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/16—Vessels; Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/02—Details
- H01J2237/0216—Means for avoiding or correcting vibration effects
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Mechanical Engineering (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Vibration Prevention Devices (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009177196 | 2009-07-30 | ||
| PCT/JP2010/004636 WO2011013323A1 (ja) | 2009-07-30 | 2010-07-20 | 走査電子顕微鏡 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IN2012DN00837A true IN2012DN00837A (enrdf_load_stackoverflow) | 2015-06-26 |
Family
ID=43528997
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IN837DEN2012 IN2012DN00837A (enrdf_load_stackoverflow) | 2009-07-30 | 2010-07-20 |
Country Status (7)
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10008361B2 (en) | 2015-04-28 | 2018-06-26 | Hitachi High-Technologies Corporation | Charged particle beam device and installation method |
| JP6633986B2 (ja) | 2016-07-20 | 2020-01-22 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2106378C3 (de) * | 1971-02-05 | 1974-06-20 | Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen | Korpuskularstrahlmikroskop, insbesondere Elektronenmikroskop, mit einem schwingungsfähigen Fundament |
| GB1400389A (en) * | 1971-06-23 | 1975-07-16 | Ass Elect Ind | Arrangements for supporting a mass with vibration isolation |
| DE2540594C2 (de) * | 1975-09-09 | 1977-11-03 | Siemens AG, 1000 Berlin und 8000 München | Korpuskularstrahlmikroskop, insbesondere Elektronenmikroskop, mit einem schwingungsgedämpften Sockel |
| JPS611U (ja) | 1984-06-06 | 1986-01-06 | フジタ工業株式会社 | 埋め込み金物測定ゲ−ジ |
| JPH0624124Y2 (ja) * | 1989-06-09 | 1994-06-22 | 日本電子株式会社 | 走査電子顕微鏡 |
| JPH0845462A (ja) * | 1994-07-27 | 1996-02-16 | Topcon Corp | 搬送装置を備えた走査型電子顕微鏡 |
| US5559329A (en) * | 1994-08-31 | 1996-09-24 | Touchstone Research Laboratory, Ltd. | Scanning electron microscope fiber push-out apparatus and method |
| DE69631362T2 (de) * | 1995-10-04 | 2004-11-04 | Ebara Corp. | Vorrichtung zur Schwingungsdämpfung |
| WO1999034418A1 (fr) * | 1997-12-26 | 1999-07-08 | Nikon Corporation | Appareil d'exposition, procede pour produire cet appareil, et methode d'exposition, ainsi que dispositif et procede pour fabriquer ce dispositif |
| US6246190B1 (en) * | 1999-07-30 | 2001-06-12 | Etec Systems, Inc. | Integrated electron gun and electronics module |
| JP2004176851A (ja) * | 2002-11-28 | 2004-06-24 | Fujikura Rubber Ltd | 除振台 |
| JP2004253374A (ja) | 2003-01-28 | 2004-09-09 | Hitachi Ltd | 電子顕微鏡 |
| CN1518049A (zh) * | 2003-01-28 | 2004-08-04 | ������������ʽ���� | 电子显微镜 |
| JP2005010059A (ja) | 2003-06-20 | 2005-01-13 | Jeol Ltd | 走査形プローブ顕微鏡 |
| JP2005077498A (ja) | 2003-08-28 | 2005-03-24 | Ricoh Co Ltd | 画像形成装置 |
| JP2006079870A (ja) * | 2004-09-08 | 2006-03-23 | Hitachi High-Technologies Corp | 荷電粒子線装置 |
-
2010
- 2010-07-20 IN IN837DEN2012 patent/IN2012DN00837A/en unknown
- 2010-07-20 WO PCT/JP2010/004636 patent/WO2011013323A1/ja active Application Filing
- 2010-07-20 JP JP2011524643A patent/JP5241922B2/ja active Active
- 2010-07-20 DE DE112010003102.9T patent/DE112010003102B4/de active Active
- 2010-07-20 CN CN201080031156.6A patent/CN102473577B/zh active Active
- 2010-07-20 US US13/387,424 patent/US8809782B2/en active Active
- 2010-07-20 KR KR1020127002432A patent/KR101364289B1/ko active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2011013323A1 (ja) | 2013-01-07 |
| KR20120047923A (ko) | 2012-05-14 |
| US20120127299A1 (en) | 2012-05-24 |
| DE112010003102T5 (de) | 2012-10-04 |
| WO2011013323A1 (ja) | 2011-02-03 |
| KR101364289B1 (ko) | 2014-02-18 |
| JP5241922B2 (ja) | 2013-07-17 |
| CN102473577A (zh) | 2012-05-23 |
| CN102473577B (zh) | 2015-05-06 |
| US8809782B2 (en) | 2014-08-19 |
| DE112010003102B4 (de) | 2019-11-28 |
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