IN2012DN00837A - - Google Patents

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Publication number
IN2012DN00837A
IN2012DN00837A IN837DEN2012A IN2012DN00837A IN 2012DN00837 A IN2012DN00837 A IN 2012DN00837A IN 837DEN2012 A IN837DEN2012 A IN 837DEN2012A IN 2012DN00837 A IN2012DN00837 A IN 2012DN00837A
Authority
IN
India
Prior art keywords
electron microscope
scanning electron
unit
main scanning
bottom plate
Prior art date
Application number
Inventor
Tomohisa Ohtaki
Masahiko Ajima
Sukehiro Ito
Mitsuru Onuma
Akira Omachi
Original Assignee
Hitachi High Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Tech Corp filed Critical Hitachi High Tech Corp
Publication of IN2012DN00837A publication Critical patent/IN2012DN00837A/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H01J2237/0216—Means for avoiding or correcting vibration effects

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Vibration Prevention Devices (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

An objective of the present invention is to provide a desk top type scanning electron microscope, which has a main scanning electron microscope unit and a control unit inclusive of an evacuation unit, a power supply and a cooling fan installed on a single bottom plate and with which high resolution images are obtained. A significant feature of the scanning electron microscope of the present invention is that the scanning electron microscope comprises a main scanning electron microscope unit, an evacuation unit to evacuate an inside of the main scanning electron microscope unit, a control unit over the main scanning electron microscope unit and has all of them enclosed with a bottom plate and a cover, that the control unit is disposed on the bottom plate disposed over a floor, and that the main scanning electron microscope unit is installed on dampers disposed on the floor through opening holes bored through the bottom plate. The scanning electron microscope of the present invention is capable of preventing a vibration generated by a cooling fan or from inside the apparatus from being transmitted to the main scanning electron microscope unit and obtaining high resolution observation images. Refer to Figure 1
IN837DEN2012 2009-07-30 2010-07-20 IN2012DN00837A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009177196 2009-07-30
PCT/JP2010/004636 WO2011013323A1 (en) 2009-07-30 2010-07-20 Scanning electron microscope

Publications (1)

Publication Number Publication Date
IN2012DN00837A true IN2012DN00837A (en) 2015-06-26

Family

ID=43528997

Family Applications (1)

Application Number Title Priority Date Filing Date
IN837DEN2012 IN2012DN00837A (en) 2009-07-30 2010-07-20

Country Status (7)

Country Link
US (1) US8809782B2 (en)
JP (1) JP5241922B2 (en)
KR (1) KR101364289B1 (en)
CN (1) CN102473577B (en)
DE (1) DE112010003102B4 (en)
IN (1) IN2012DN00837A (en)
WO (1) WO2011013323A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106537552B (en) 2015-04-28 2018-11-06 株式会社日立高新技术 Charged particle rays device, setting method
JP6633986B2 (en) 2016-07-20 2020-01-22 株式会社日立ハイテクノロジーズ Charged particle beam equipment

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2106378C3 (en) * 1971-02-05 1974-06-20 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V., 3400 Goettingen Corpuscular beam microscope, in particular electron microscope, with a vibratory foundation
GB1400389A (en) * 1971-06-23 1975-07-16 Ass Elect Ind Arrangements for supporting a mass with vibration isolation
DE2540594C2 (en) * 1975-09-09 1977-11-03 Siemens AG, 1000 Berlin und 8000 München Corpuscular beam microscope, in particular electron microscope, with a vibration-damped base
JPS611U (en) 1984-06-06 1986-01-06 フジタ工業株式会社 Embedded hardware measuring gauge
JPH0624124Y2 (en) * 1989-06-09 1994-06-22 日本電子株式会社 Scanning electron microscope
JPH0845462A (en) * 1994-07-27 1996-02-16 Topcon Corp Scanning electron microscope with carrier
US5559329A (en) * 1994-08-31 1996-09-24 Touchstone Research Laboratory, Ltd. Scanning electron microscope fiber push-out apparatus and method
EP0767320B1 (en) * 1995-10-04 2004-01-21 Ebara Corporation Vibration damping apparatus
AU1691899A (en) * 1997-12-26 1999-07-19 Nikon Corporation Exposure apparatus, method of producing the apparatus, and exposure method, and device and method of manufacturing the device
US6246190B1 (en) * 1999-07-30 2001-06-12 Etec Systems, Inc. Integrated electron gun and electronics module
JP2004176851A (en) * 2002-11-28 2004-06-24 Fujikura Rubber Ltd Vibration isolation table
CN1518049A (en) * 2003-01-28 2004-08-04 ������������ʽ���� Electronic microscope
JP2004253374A (en) * 2003-01-28 2004-09-09 Hitachi Ltd Electron microscope
JP2005010059A (en) * 2003-06-20 2005-01-13 Jeol Ltd Scanning probe microscope
JP2005077498A (en) * 2003-08-28 2005-03-24 Ricoh Co Ltd Image forming apparatus
JP2006079870A (en) 2004-09-08 2006-03-23 Hitachi High-Technologies Corp Charged particle beam device

Also Published As

Publication number Publication date
WO2011013323A1 (en) 2011-02-03
US20120127299A1 (en) 2012-05-24
KR20120047923A (en) 2012-05-14
KR101364289B1 (en) 2014-02-18
CN102473577A (en) 2012-05-23
CN102473577B (en) 2015-05-06
JP5241922B2 (en) 2013-07-17
DE112010003102B4 (en) 2019-11-28
DE112010003102T5 (en) 2012-10-04
JPWO2011013323A1 (en) 2013-01-07
US8809782B2 (en) 2014-08-19

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