IL80347A - Method and apparatus for cleaning surfaces by atomic beam irradiation - Google Patents

Method and apparatus for cleaning surfaces by atomic beam irradiation

Info

Publication number
IL80347A
IL80347A IL80347A IL8034786A IL80347A IL 80347 A IL80347 A IL 80347A IL 80347 A IL80347 A IL 80347A IL 8034786 A IL8034786 A IL 8034786A IL 80347 A IL80347 A IL 80347A
Authority
IL
Israel
Prior art keywords
beam irradiation
cleaning surfaces
atomic beam
atomic
cleaning
Prior art date
Application number
IL80347A
Other languages
English (en)
Other versions
IL80347A0 (en
Original Assignee
Hughes Aircraft Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hughes Aircraft Co filed Critical Hughes Aircraft Co
Publication of IL80347A0 publication Critical patent/IL80347A0/xx
Publication of IL80347A publication Critical patent/IL80347A/xx

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0006—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B64—AIRCRAFT; AVIATION; COSMONAUTICS
    • B64G—COSMONAUTICS; VEHICLES OR EQUIPMENT THEREFOR
    • B64G1/00—Cosmonautic vehicles
    • B64G1/22—Parts of, or equipment specially adapted for fitting in or to, cosmonautic vehicles
    • B64G1/52—Protection, safety or emergency devices; Survival aids
    • B64G1/54—Protection against radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Critical Care (AREA)
  • Remote Sensing (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Emergency Medicine (AREA)
  • Toxicology (AREA)
  • General Physics & Mathematics (AREA)
  • Cleaning In General (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
IL80347A 1985-10-29 1986-10-16 Method and apparatus for cleaning surfaces by atomic beam irradiation IL80347A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US79238085A 1985-10-29 1985-10-29

Publications (2)

Publication Number Publication Date
IL80347A0 IL80347A0 (en) 1987-01-30
IL80347A true IL80347A (en) 1990-09-17

Family

ID=25156707

Family Applications (1)

Application Number Title Priority Date Filing Date
IL80347A IL80347A (en) 1985-10-29 1986-10-16 Method and apparatus for cleaning surfaces by atomic beam irradiation

Country Status (6)

Country Link
US (1) US4846425A (xx)
EP (1) EP0250455B1 (xx)
JP (1) JPH0655600B2 (xx)
DE (1) DE3682063D1 (xx)
IL (1) IL80347A (xx)
WO (1) WO1987002603A1 (xx)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2631258B1 (fr) * 1988-05-10 1991-04-05 Prestations Services Sps Procede de nettoyage en surface par plasma differe
NL8900544A (nl) * 1989-03-06 1990-10-01 Asm Europ Behandelingsstelsel, behandelingsvat en werkwijze voor het behandelen van een substraat.
JP2819166B2 (ja) * 1989-10-03 1998-10-30 キヤノン株式会社 放射光用光学素子の汚れ除去装置および方法
US5418431A (en) * 1993-08-27 1995-05-23 Hughes Aircraft Company RF plasma source and antenna therefor
US6409891B1 (en) * 1994-04-29 2002-06-25 Hughes Electronics Corporation Low energy plasma cleaning method for cryofilms
US5560781A (en) * 1995-05-08 1996-10-01 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Process for non-contact removal of organic coatings from the surface of paintings
US6087991A (en) * 1999-04-15 2000-07-11 Lockheed Martin Corporation Semiconductor antenna array and solar energy collection array assembly for spacecraft
US6537379B1 (en) * 2000-01-13 2003-03-25 Hrl Laboratories, Llc Photocatalytic coating and method for cleaning spacecraft surfaces
US6500275B1 (en) * 2000-06-12 2002-12-31 The United States Of America As Represented By The Secretary Of The Air Force Mitigation of spacecraft charging by means of polar molecules
DE10061248B4 (de) 2000-12-09 2004-02-26 Carl Zeiss Verfahren und Vorrichtung zur In-situ-Dekontamination eines EUV-Lithographiegerätes
US20040011381A1 (en) * 2002-07-17 2004-01-22 Klebanoff Leonard E. Method for removing carbon contamination from optic surfaces
US8181511B2 (en) * 2008-07-18 2012-05-22 Meier Robert R Method and system of imaging electrons in the near earth space environment
GB2467309B (en) * 2009-01-28 2015-03-25 David Hostettler Wain Spacecraft decontamination
US9083864B2 (en) * 2013-07-31 2015-07-14 Ford Global Technologies, Llc Self-cleaning camera lens
RU2688561C1 (ru) * 2018-09-11 2019-05-21 Российская Федерация, от имени которой выступает Государственная корпорация по космической деятельности "РОСКОСМОС" Устройство защиты космического аппарата обслуживания от рассеянных частиц с поверхности облучаемого объекта

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3233137A (en) * 1961-08-28 1966-02-01 Litton Systems Inc Method and apparatus for cleansing by ionic bombardment
US3868271A (en) * 1973-06-13 1975-02-25 Ibm Method of cleaning a glass substrate by ionic bombardment in a wet active gas
DE2647088B2 (de) * 1976-10-19 1979-04-05 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Verfahren und Vorrichtung zum Reinigen von Oberflächen
US4278493A (en) * 1980-04-28 1981-07-14 International Business Machines Corporation Method for cleaning surfaces by ion milling
US4500564A (en) * 1982-02-01 1985-02-19 Agency Of Industrial Science & Technology Method for surface treatment by ion bombardment
JPS5979579A (ja) * 1982-10-29 1984-05-08 Fujitsu Ltd 太陽電池システム
US4600442A (en) * 1984-08-14 1986-07-15 Hughes Aircraft Company Process for the removal of impurities from optical component materials

Also Published As

Publication number Publication date
EP0250455A1 (en) 1988-01-07
IL80347A0 (en) 1987-01-30
WO1987002603A1 (en) 1987-05-07
JPH0655600B2 (ja) 1994-07-27
US4846425A (en) 1989-07-11
EP0250455B1 (en) 1991-10-16
JPS63501558A (ja) 1988-06-16
DE3682063D1 (de) 1991-11-21

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Legal Events

Date Code Title Description
KB Patent renewed
HC Change of name of proprietor(s)
EXP Patent expired