IL313221A - ציפוי משטחים דיאלקטריים בשכבת מתכת עם דוגמה - Google Patents

ציפוי משטחים דיאלקטריים בשכבת מתכת עם דוגמה

Info

Publication number
IL313221A
IL313221A IL313221A IL31322124A IL313221A IL 313221 A IL313221 A IL 313221A IL 313221 A IL313221 A IL 313221A IL 31322124 A IL31322124 A IL 31322124A IL 313221 A IL313221 A IL 313221A
Authority
IL
Israel
Prior art keywords
wafer
dielectric
etching
metal layer
chemical etching
Prior art date
Application number
IL313221A
Other languages
English (en)
Inventor
Sirota Marina
Nuttman David
Original Assignee
Israel Aerospace Ind Ltd
Sirota Marina
Nuttman David
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Israel Aerospace Ind Ltd, Sirota Marina, Nuttman David filed Critical Israel Aerospace Ind Ltd
Priority to IL313221A priority Critical patent/IL313221A/he
Priority to PCT/IL2025/050396 priority patent/WO2025248513A1/en
Publication of IL313221A publication Critical patent/IL313221A/he

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00095—Interconnects
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0323—Grooves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0174—Manufacture or treatment of microstructural devices or systems in or on a substrate for making multi-layered devices, film deposition or growing
    • B81C2201/0181—Physical Vapour Deposition [PVD], i.e. evaporation, sputtering, ion plating or plasma assisted deposition, ion cluster beam technology

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
IL313221A 2024-05-30 2024-05-30 ציפוי משטחים דיאלקטריים בשכבת מתכת עם דוגמה IL313221A (he)

Priority Applications (2)

Application Number Priority Date Filing Date Title
IL313221A IL313221A (he) 2024-05-30 2024-05-30 ציפוי משטחים דיאלקטריים בשכבת מתכת עם דוגמה
PCT/IL2025/050396 WO2025248513A1 (en) 2024-05-30 2025-05-12 Coating dielectric surfaces with patterned metal layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL313221A IL313221A (he) 2024-05-30 2024-05-30 ציפוי משטחים דיאלקטריים בשכבת מתכת עם דוגמה

Publications (1)

Publication Number Publication Date
IL313221A true IL313221A (he) 2025-12-01

Family

ID=97869702

Family Applications (1)

Application Number Title Priority Date Filing Date
IL313221A IL313221A (he) 2024-05-30 2024-05-30 ציפוי משטחים דיאלקטריים בשכבת מתכת עם דוגמה

Country Status (2)

Country Link
IL (1) IL313221A (he)
WO (1) WO2025248513A1 (he)

Also Published As

Publication number Publication date
WO2025248513A1 (en) 2025-12-04

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