IL159778A0 - Device for analysing a wavefront with enhanced resolution - Google Patents

Device for analysing a wavefront with enhanced resolution

Info

Publication number
IL159778A0
IL159778A0 IL15977802A IL15977802A IL159778A0 IL 159778 A0 IL159778 A0 IL 159778A0 IL 15977802 A IL15977802 A IL 15977802A IL 15977802 A IL15977802 A IL 15977802A IL 159778 A0 IL159778 A0 IL 159778A0
Authority
IL
Israel
Prior art keywords
sub
diffraction
pupil
pupils
axes
Prior art date
Application number
IL15977802A
Other languages
English (en)
Original Assignee
Imagine Optic
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imagine Optic filed Critical Imagine Optic
Publication of IL159778A0 publication Critical patent/IL159778A0/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
IL15977802A 2001-07-12 2002-07-12 Device for analysing a wavefront with enhanced resolution IL159778A0 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0109435A FR2827380B1 (fr) 2001-07-12 2001-07-12 Dispositif d'analyse d'un front d'onde a resolution amelioree
PCT/FR2002/002495 WO2003006940A1 (fr) 2001-07-12 2002-07-12 Dispositif d'analyse d'un front d'onde a resolution amelioree

Publications (1)

Publication Number Publication Date
IL159778A0 true IL159778A0 (en) 2004-06-20

Family

ID=8865532

Family Applications (1)

Application Number Title Priority Date Filing Date
IL15977802A IL159778A0 (en) 2001-07-12 2002-07-12 Device for analysing a wavefront with enhanced resolution

Country Status (8)

Country Link
US (1) US7301613B2 (xx)
EP (1) EP1415133B1 (xx)
JP (1) JP4212472B2 (xx)
AT (1) ATE322669T1 (xx)
DE (1) DE60210472T2 (xx)
FR (1) FR2827380B1 (xx)
IL (1) IL159778A0 (xx)
WO (1) WO2003006940A1 (xx)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE449319T1 (de) * 2004-08-11 2009-12-15 Max Planck Gesellschaft Verfahren und vorrichtung zur messung von wellenfronten
CN1844873B (zh) * 2006-05-22 2010-09-22 中国科学院光电技术研究所 基于h-s波前传感器的超声速流场探测系统及其探测方法
US8928892B2 (en) * 2009-03-04 2015-01-06 Elie Meimoun Wavefront analysis inspection apparatus and method
KR20110072630A (ko) * 2009-12-23 2011-06-29 삼성전자주식회사 빔의 위치 측정 장치 및 방법
CN102735348B (zh) * 2012-06-15 2013-07-24 中国科学院光电技术研究所 一种基于哈特曼波前传感器的波前测量方法
JP6080427B2 (ja) * 2012-08-10 2017-02-15 キヤノン株式会社 シャック・ハルトマンセンサとそれを利用した波面計測方法
JP6494205B2 (ja) 2013-07-31 2019-04-03 キヤノン株式会社 波面計測方法、形状計測方法、光学素子の製造方法、光学機器の製造方法、プログラム、波面計測装置
CN111263918B (zh) 2017-05-31 2022-11-08 Asml荷兰有限公司 辐射源布置、检查设备、波前传感器、相关的方法以及非暂时性存储介质
EP3410211A1 (en) 2017-05-31 2018-12-05 Stichting VU Methods and apparatus for predicting performance of a measurement method, measurement method and apparatus
EP3686673A1 (en) 2019-01-25 2020-07-29 ASML Netherlands B.V. Wavefront sensor and associated metrology apparatus
EP3964809A1 (en) 2020-09-02 2022-03-09 Stichting VU Wavefront metrology sensor and mask therefor, method for optimizing a mask and associated apparatuses

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4725138A (en) * 1985-05-22 1988-02-16 Adaptive Optics Associates Incorporated Optical wavefront sensing system
US5973844A (en) * 1996-01-26 1999-10-26 Proxemics Lenslet array systems and methods
US5864381A (en) * 1996-07-10 1999-01-26 Sandia Corporation Automated pupil remapping with binary optics
ES2133094B1 (es) * 1997-03-14 2000-05-01 Inst De Astrofisica De Canaria Alineamiento de superficies opticas usando medidas de gradiente y curvatura local del frente de onda.
FR2795175B1 (fr) * 1999-06-17 2001-07-27 Onera (Off Nat Aerospatiale) Interferometre optique achromatique, du type a sensibilite continument reglable
US6376819B1 (en) * 1999-07-09 2002-04-23 Wavefront Sciences, Inc. Sub-lens spatial resolution Shack-Hartmann wavefront sensing
WO2001004591A1 (en) * 1999-07-09 2001-01-18 Wavefront Sciences, Inc. Apodized micro-lenses for hartmann wavefront sensing and method for fabricating optical elements with varying transmission

Also Published As

Publication number Publication date
JP4212472B2 (ja) 2009-01-21
US7301613B2 (en) 2007-11-27
DE60210472T2 (de) 2006-11-30
DE60210472D1 (de) 2006-05-18
ATE322669T1 (de) 2006-04-15
JP2004534250A (ja) 2004-11-11
EP1415133B1 (fr) 2006-04-05
FR2827380A1 (fr) 2003-01-17
US20040196450A1 (en) 2004-10-07
WO2003006940A1 (fr) 2003-01-23
EP1415133A1 (fr) 2004-05-06
FR2827380B1 (fr) 2003-11-07

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