DE60210472D1 - Einrichtung zur analyse einer wellenfront mit verbesserter auflösung - Google Patents

Einrichtung zur analyse einer wellenfront mit verbesserter auflösung

Info

Publication number
DE60210472D1
DE60210472D1 DE60210472T DE60210472T DE60210472D1 DE 60210472 D1 DE60210472 D1 DE 60210472D1 DE 60210472 T DE60210472 T DE 60210472T DE 60210472 T DE60210472 T DE 60210472T DE 60210472 D1 DE60210472 D1 DE 60210472D1
Authority
DE
Germany
Prior art keywords
sub
diffraction
pupil
pupils
wave front
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60210472T
Other languages
English (en)
Other versions
DE60210472T2 (de
Inventor
Jean-Francois Levecq
Fabrice Harms
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Imagine Optic SA
Original Assignee
Imagine Optic SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imagine Optic SA filed Critical Imagine Optic SA
Publication of DE60210472D1 publication Critical patent/DE60210472D1/de
Application granted granted Critical
Publication of DE60210472T2 publication Critical patent/DE60210472T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
DE60210472T 2001-07-12 2002-07-12 Einrichtung zur analyse einer wellenfront mit verbesserter auflösung Expired - Lifetime DE60210472T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0109435A FR2827380B1 (fr) 2001-07-12 2001-07-12 Dispositif d'analyse d'un front d'onde a resolution amelioree
FR0109435 2001-07-12
PCT/FR2002/002495 WO2003006940A1 (fr) 2001-07-12 2002-07-12 Dispositif d'analyse d'un front d'onde a resolution amelioree

Publications (2)

Publication Number Publication Date
DE60210472D1 true DE60210472D1 (de) 2006-05-18
DE60210472T2 DE60210472T2 (de) 2006-11-30

Family

ID=8865532

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60210472T Expired - Lifetime DE60210472T2 (de) 2001-07-12 2002-07-12 Einrichtung zur analyse einer wellenfront mit verbesserter auflösung

Country Status (8)

Country Link
US (1) US7301613B2 (de)
EP (1) EP1415133B1 (de)
JP (1) JP4212472B2 (de)
AT (1) ATE322669T1 (de)
DE (1) DE60210472T2 (de)
FR (1) FR2827380B1 (de)
IL (1) IL159778A0 (de)
WO (1) WO2003006940A1 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE602004024193D1 (de) * 2004-08-11 2009-12-31 Max Planck Gesellschaft Verfahren und Vorrichtung zur Messung von Wellenfronten
CN1844873B (zh) * 2006-05-22 2010-09-22 中国科学院光电技术研究所 基于h-s波前传感器的超声速流场探测系统及其探测方法
US8928892B2 (en) * 2009-03-04 2015-01-06 Elie Meimoun Wavefront analysis inspection apparatus and method
KR20110072630A (ko) * 2009-12-23 2011-06-29 삼성전자주식회사 빔의 위치 측정 장치 및 방법
CN102735348B (zh) * 2012-06-15 2013-07-24 中国科学院光电技术研究所 一种基于哈特曼波前传感器的波前测量方法
JP6080427B2 (ja) * 2012-08-10 2017-02-15 キヤノン株式会社 シャック・ハルトマンセンサとそれを利用した波面計測方法
JP6494205B2 (ja) 2013-07-31 2019-04-03 キヤノン株式会社 波面計測方法、形状計測方法、光学素子の製造方法、光学機器の製造方法、プログラム、波面計測装置
EP3410211A1 (de) 2017-05-31 2018-12-05 Stichting VU Verfahren und vorrichtung zur vorhersage der leistung eines messverfahrens, messverfahren und vorrichtung
CN111263918B (zh) 2017-05-31 2022-11-08 Asml荷兰有限公司 辐射源布置、检查设备、波前传感器、相关的方法以及非暂时性存储介质
EP3686673A1 (de) 2019-01-25 2020-07-29 ASML Netherlands B.V. Wellenfrontsensor und zugehörige messvorrichtung
EP3964809A1 (de) 2020-09-02 2022-03-09 Stichting VU Wellenfrontmetrologiesensor und maske dafür, verfahren zur optimierung einer maske und zugehörige vorrichtungen

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4725138A (en) * 1985-05-22 1988-02-16 Adaptive Optics Associates Incorporated Optical wavefront sensing system
US5973844A (en) * 1996-01-26 1999-10-26 Proxemics Lenslet array systems and methods
US5864381A (en) * 1996-07-10 1999-01-26 Sandia Corporation Automated pupil remapping with binary optics
ES2133094B1 (es) * 1997-03-14 2000-05-01 Inst De Astrofisica De Canaria Alineamiento de superficies opticas usando medidas de gradiente y curvatura local del frente de onda.
FR2795175B1 (fr) * 1999-06-17 2001-07-27 Onera (Off Nat Aerospatiale) Interferometre optique achromatique, du type a sensibilite continument reglable
WO2001004590A1 (en) * 1999-07-09 2001-01-18 Wavefront Sciences, Inc. Sub-lens spatial resolution shack-hartmann wavefront sensing
US6376819B1 (en) * 1999-07-09 2002-04-23 Wavefront Sciences, Inc. Sub-lens spatial resolution Shack-Hartmann wavefront sensing

Also Published As

Publication number Publication date
FR2827380A1 (fr) 2003-01-17
WO2003006940A1 (fr) 2003-01-23
US20040196450A1 (en) 2004-10-07
EP1415133A1 (de) 2004-05-06
JP2004534250A (ja) 2004-11-11
JP4212472B2 (ja) 2009-01-21
IL159778A0 (en) 2004-06-20
FR2827380B1 (fr) 2003-11-07
ATE322669T1 (de) 2006-04-15
EP1415133B1 (de) 2006-04-05
DE60210472T2 (de) 2006-11-30
US7301613B2 (en) 2007-11-27

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