IL154411A0 - Direct acting vertical thermal actuator with controlled bending - Google Patents

Direct acting vertical thermal actuator with controlled bending

Info

Publication number
IL154411A0
IL154411A0 IL15441101A IL15441101A IL154411A0 IL 154411 A0 IL154411 A0 IL 154411A0 IL 15441101 A IL15441101 A IL 15441101A IL 15441101 A IL15441101 A IL 15441101A IL 154411 A0 IL154411 A0 IL 154411A0
Authority
IL
Israel
Prior art keywords
thermal actuator
direct acting
vertical thermal
controlled bending
acting vertical
Prior art date
Application number
IL15441101A
Other languages
English (en)
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of IL154411A0 publication Critical patent/IL154411A0/xx

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0024—Transducers for transforming thermal into mechanical energy or vice versa, e.g. thermal or bimorph actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0037—For increasing stroke, i.e. achieve large displacement of actuated parts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/031—Thermal actuators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0109—Bridges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0118—Cantilevers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H61/00—Electrothermal relays
    • H01H2061/006—Micromechanical thermal relay
    • H01H2061/008—Micromechanical actuator with a cold and a hot arm, coupled together at one end

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Nanotechnology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Control Of Position Or Direction (AREA)
IL15441101A 2000-09-12 2001-08-30 Direct acting vertical thermal actuator with controlled bending IL154411A0 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/659,798 US6531947B1 (en) 2000-09-12 2000-09-12 Direct acting vertical thermal actuator with controlled bending
PCT/US2001/027144 WO2002022493A2 (en) 2000-09-12 2001-08-30 Direct acting vertical thermal actuator with controlled bending

Publications (1)

Publication Number Publication Date
IL154411A0 true IL154411A0 (en) 2003-09-17

Family

ID=24646886

Family Applications (1)

Application Number Title Priority Date Filing Date
IL15441101A IL154411A0 (en) 2000-09-12 2001-08-30 Direct acting vertical thermal actuator with controlled bending

Country Status (9)

Country Link
US (2) US6531947B1 (xx)
EP (1) EP1317397A2 (xx)
JP (1) JP2004508953A (xx)
KR (1) KR20030067665A (xx)
AU (1) AU2001288586A1 (xx)
CA (1) CA2419137A1 (xx)
IL (1) IL154411A0 (xx)
TW (1) TW520340B (xx)
WO (1) WO2002022493A2 (xx)

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Also Published As

Publication number Publication date
WO2002022493A3 (en) 2002-08-01
CA2419137A1 (en) 2002-03-21
US20030137389A1 (en) 2003-07-24
EP1317397A2 (en) 2003-06-11
KR20030067665A (ko) 2003-08-14
WO2002022493A2 (en) 2002-03-21
AU2001288586A1 (en) 2002-03-26
JP2004508953A (ja) 2004-03-25
TW520340B (en) 2003-02-11
WO2002022493A8 (en) 2003-11-20
US6531947B1 (en) 2003-03-11

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