IL148283A0 - Unreacted gas detector and unreacted gas sensor - Google Patents
Unreacted gas detector and unreacted gas sensorInfo
- Publication number
- IL148283A0 IL148283A0 IL14828302A IL14828302A IL148283A0 IL 148283 A0 IL148283 A0 IL 148283A0 IL 14828302 A IL14828302 A IL 14828302A IL 14828302 A IL14828302 A IL 14828302A IL 148283 A0 IL148283 A0 IL 148283A0
- Authority
- IL
- Israel
- Prior art keywords
- unreacted gas
- detector
- gas sensor
- sensor
- gas detector
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
- G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
- G01N25/22—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures
- G01N25/28—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly
- G01N25/34—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly using mechanical temperature-responsive elements, e.g. bimetallic
- G01N25/36—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly using mechanical temperature-responsive elements, e.g. bimetallic for investigating the composition of gas mixtures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N25/00—Investigating or analyzing materials by the use of thermal means
- G01N25/20—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity
- G01N25/22—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures
- G01N25/28—Investigating or analyzing materials by the use of thermal means by investigating the development of heat, i.e. calorimetry, e.g. by measuring specific heat, by measuring thermal conductivity on combustion or catalytic oxidation, e.g. of components of gas mixtures the rise in temperature of the gases resulting from combustion being measured directly
Landscapes
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Immunology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Pathology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001084749A JP2002286665A (ja) | 2001-03-23 | 2001-03-23 | 未反応ガス検出装置及び未反応ガス検出センサ |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IL148283A0 true IL148283A0 (en) | 2002-09-12 |
Family
ID=18940373
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IL14828302A IL148283A0 (en) | 2001-03-23 | 2002-02-21 | Unreacted gas detector and unreacted gas sensor |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20020134135A1 (de) |
| EP (1) | EP1243920A3 (de) |
| JP (1) | JP2002286665A (de) |
| KR (1) | KR20020075203A (de) |
| CN (1) | CN1376914A (de) |
| IL (1) | IL148283A0 (de) |
| TW (1) | TW536525B (de) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060211253A1 (en) * | 2005-03-16 | 2006-09-21 | Ing-Shin Chen | Method and apparatus for monitoring plasma conditions in an etching plasma processing facility |
| US20110079074A1 (en) * | 2009-05-28 | 2011-04-07 | Saroj Kumar Sahu | Hydrogen chlorine level detector |
| WO2010138942A2 (en) * | 2009-05-28 | 2010-12-02 | Deeya Energy, Inc. | Redox flow cell rebalancing |
| CN102959389A (zh) * | 2010-05-17 | 2013-03-06 | 本田技研工业株式会社 | 接触燃烧式气体传感器 |
| JP5776941B2 (ja) * | 2012-03-29 | 2015-09-09 | 三菱マテリアル株式会社 | 温度センサ及びその製造方法 |
| CN111905672B (zh) * | 2020-06-22 | 2021-10-08 | 西安交通大学 | 一种多通道连续在线检测光催化反应装置 |
| US20230187169A1 (en) * | 2021-12-13 | 2023-06-15 | Applied Materials, Inc | Method to measure radical ion flux using a modified pirani vacuum gauge architecture |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB761055A (en) * | 1953-03-25 | 1956-11-07 | Arthur Light | Improvements in methods and apparatus for detecting and measuring the concentration of gases |
| GB1490066A (en) * | 1974-10-07 | 1977-10-26 | Johnson Matthey Co Ltd | Gas composition detection apparatus |
| US4029472A (en) * | 1976-04-05 | 1977-06-14 | General Motors Corporation | Thermoelectric exhaust gas sensor |
| US4169126A (en) * | 1976-09-03 | 1979-09-25 | Johnson, Matthey & Co., Limited | Temperature-responsive device |
| JPS55122143A (en) * | 1979-03-15 | 1980-09-19 | Nippon Soken Inc | Gas detector |
| US4298574A (en) * | 1979-06-25 | 1981-11-03 | The Babcock & Wilcox Company | Hydrogen gas detector |
| JPS56168149A (en) * | 1980-05-29 | 1981-12-24 | Toyota Motor Corp | Detecting method for content of carbon monoxide |
| US5070024A (en) * | 1988-07-12 | 1991-12-03 | Gas Research Institute | Hydrocarbon detector utilizing catalytic cracking |
| US5441076A (en) * | 1992-12-11 | 1995-08-15 | Tokyo Electron Limited | Processing apparatus using gas |
| JP3380988B2 (ja) * | 1993-04-21 | 2003-02-24 | 東京エレクトロン株式会社 | 熱処理装置 |
| EP1911722A2 (de) * | 1996-01-29 | 2008-04-16 | FUJIKIN Inc. | Verfahren zur Erzeugung von Feuchtigkeit, Reaktor zur Erzeugung von Feuchtigkeit, Verfahren zur Temperatursteuerung des Reaktors zur Erzeugung von Feuchtigkeit sowie Verfahren zur Erzeugung einer platinbeschichteten Katalysatorschicht |
| JPH1010069A (ja) * | 1996-06-20 | 1998-01-16 | Hitachi Ltd | 未燃物濃度測定装置及び触媒診断装置 |
| DE19645694C2 (de) * | 1996-11-06 | 2002-10-24 | Deutsch Zentr Luft & Raumfahrt | Sensor zur Messung der Zusammensetzung von Wasserstoff-Sauerstoff-Gasgemischen |
| US6037183A (en) * | 1996-12-20 | 2000-03-14 | Corning Incorporated | Automotive hydrocarbon sensor system |
| US5804703A (en) * | 1997-06-09 | 1998-09-08 | General Motors Corporation | Circuit for a combustible gas sensor |
| JPH1130602A (ja) * | 1997-07-11 | 1999-02-02 | Tadahiro Omi | ガス検出センサー及びその防爆取付構造 |
| US6009742A (en) * | 1997-11-14 | 2000-01-04 | Engelhard Corporation | Multi-channel pellistor type emission sensor |
| DE60131698T2 (de) * | 2000-05-31 | 2008-10-30 | Tokyo Electron Ltd. | Thermische Behandlungsvorrichtung und Verfahren |
-
2001
- 2001-03-23 JP JP2001084749A patent/JP2002286665A/ja active Pending
- 2001-12-10 TW TW090130540A patent/TW536525B/zh not_active IP Right Cessation
- 2001-12-26 KR KR1020010085140A patent/KR20020075203A/ko not_active Application Discontinuation
-
2002
- 2002-02-21 IL IL14828302A patent/IL148283A0/xx unknown
- 2002-03-07 EP EP02251626A patent/EP1243920A3/de not_active Withdrawn
- 2002-03-13 US US10/098,038 patent/US20020134135A1/en not_active Abandoned
- 2002-03-25 CN CN02107863A patent/CN1376914A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| CN1376914A (zh) | 2002-10-30 |
| JP2002286665A (ja) | 2002-10-03 |
| KR20020075203A (ko) | 2002-10-04 |
| EP1243920A2 (de) | 2002-09-25 |
| US20020134135A1 (en) | 2002-09-26 |
| EP1243920A3 (de) | 2002-10-23 |
| TW536525B (en) | 2003-06-11 |
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